Patent classifications
C04B41/4527
Methods of minimizing particles on wafer from plasma spray coatings
Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.
Methods of minimizing particles on wafer from plasma spray coatings
Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.
THERMAL SPRAY DEPOSITED ENVIRONMENTAL BARRIER COATING
In one example, a method for forming an environmental barrier coating (EBC) on a substrate. The method may include heating a backside of a substrate using a furnace enclosure, wherein a frontside of the substrate is outside the furnace enclosure, wherein the heating of the backside of the substrate with the furnace enclosure heats the frontside of the substrate to a surface temperature by heat conduction from the backside of the substrate to the frontside of the substrate; and depositing an environmental barrier coating (EBC) on the frontside of the substrate via a thermal spray device while the backside of the substrate is heated using the furnace enclosure, wherein the surface temperature of the frontside of the substrate is selected to control at least one of a porosity of the deposited EBC or a weight percent of a crystalline phase in the deposited EBC.
THERMAL SPRAY DEPOSITED ENVIRONMENTAL BARRIER COATING
In one example, a method for forming an environmental barrier coating (EBC) on a substrate. The method may include heating a backside of a substrate using a furnace enclosure, wherein a frontside of the substrate is outside the furnace enclosure, wherein the heating of the backside of the substrate with the furnace enclosure heats the frontside of the substrate to a surface temperature by heat conduction from the backside of the substrate to the frontside of the substrate; and depositing an environmental barrier coating (EBC) on the frontside of the substrate via a thermal spray device while the backside of the substrate is heated using the furnace enclosure, wherein the surface temperature of the frontside of the substrate is selected to control at least one of a porosity of the deposited EBC or a weight percent of a crystalline phase in the deposited EBC.
METHODS OF FABRICATING OXIDE/METAL COMPOSITES AND COMPONENTS PRODUCED THEREBY
Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.
METHODS OF FABRICATING OXIDE/METAL COMPOSITES AND COMPONENTS PRODUCED THEREBY
Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.
Rare-earth oxide based erosion resistant coatings for semiconductor application
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol %, ZrO.sub.2 in a range between about 1 mol % to about 55 mol %, and Al.sub.2O.sub.3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol % and Al.sub.2O.sub.3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol % and ZrO.sub.2 in a range between about 1 mol % to about 55 mol %.
Rare-earth oxide based erosion resistant coatings for semiconductor application
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol %, ZrO.sub.2 in a range between about 1 mol % to about 55 mol %, and Al.sub.2O.sub.3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol % and Al.sub.2O.sub.3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y.sub.2O.sub.3 in a range between about 45 mol % to about 99 mol % and ZrO.sub.2 in a range between about 1 mol % to about 55 mol %.
Coating including a rare earth silicate-based layer including a second phase
A coating including a bond layer deposited on a substrate. The bond layer includes a rare earth silicate and a second phase, the second phase including at least one of silicon, silicides, alkali metal oxides, alkali earth metal oxides, glass ceramics, Al.sub.2O.sub.3, TiO.sub.2, Ta.sub.2O.sub.5, HfO.sub.2, ZrO.sub.2, HfSiO.sub.4, ZrSiO.sub.4, HfTiO.sub.4, ZrTiO.sub.4, or mullite. The coating may provide thermal and/or environmental protection for the substrate, especially when the substrate is a component of a high-temperature mechanical system.
Coating including a rare earth silicate-based layer including a second phase
A coating including a bond layer deposited on a substrate. The bond layer includes a rare earth silicate and a second phase, the second phase including at least one of silicon, silicides, alkali metal oxides, alkali earth metal oxides, glass ceramics, Al.sub.2O.sub.3, TiO.sub.2, Ta.sub.2O.sub.5, HfO.sub.2, ZrO.sub.2, HfSiO.sub.4, ZrSiO.sub.4, HfTiO.sub.4, ZrTiO.sub.4, or mullite. The coating may provide thermal and/or environmental protection for the substrate, especially when the substrate is a component of a high-temperature mechanical system.