Coating systems are provided for positioning on a surface of a substrate, along with the resulting coated components and methods of their formation. The coating system may include a layer having a compound of the formula: A.sub.1bB.sub.bZ.sub.1dD.sub.dMO.sub.6 where: A is Al, Ga, In, Sc, Y, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Fe, Cr, Co, Mn, Bi, or a mixture thereof; b is 0 to about 0.5; Z is Hf, Ti, or a mixture thereof; D is Zr, Ce, Ge, Si, or a mixture thereof; d is 0 to about 0.5; and M is Ta, Nb, or a mixture thereof.

A method for forming a high temperature coating includes forming a pre-sintered ceramic coating on a ceramic composite substrate. The pre-sintered ceramic coating includes a plurality of ceramic particles. The method further includes sintering at least a portion of the pre-sintered ceramic coating by heating the portion of the pre-sintered ceramic coating to a sintering temperature of the plurality of ceramic particles using joule heating. The sintering temperature is greater than about 1000 degrees Celsius (? C.).

An outer peripheral coating member contains first particles containing titanium oxide, second particles containing zirconium oxide, third particles containing niobium oxide or aluminum oxide, and a dispersion medium. It is preferable for the first particles to have at least two peak values R1 in a distribution of particle sizes of the first particles. One of the peak values R1 is within a range of 1 to 50 nm, and the other peak value R1 is within a range of 100 to 500 nm.

An outer peripheral coating member contains first particles containing titanium oxide, second particles containing zirconium oxide, third particles containing niobium oxide or aluminum oxide, and a dispersion medium. It is preferable for the first particles to have at least two peak values R1 in a distribution of particle sizes of the first particles. One of the peak values R1 is within a range of 1 to 50 nm, and the other peak value R1 is within a range of 100 to 500 nm.

A method for manufacturing a corrosion resistant member that includes a substrate including a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas. The corrosion resistant film contains yttria as a main component and further contains at least one of tantalum and niobium in an amount of 0.02 mol % to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film. The method includes mixing a raw material powder of yttria with a raw material powder of at least one of a tantalum oxide and a niobium oxide, followed by granulating the raw material powders to obtain a granulated powder.

A method for manufacturing a corrosion resistant member that includes a substrate including a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas. The corrosion resistant film contains yttria as a main component and further contains at least one of tantalum and niobium in an amount of 0.02 mol % to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film. The method includes mixing a raw material powder of yttria with a raw material powder of at least one of a tantalum oxide and a niobium oxide, followed by granulating the raw material powders to obtain a granulated powder.