A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y.sub.2O.sub.3—ZrO.sub.2 powder consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2, and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y.sub.2O.sub.3—ZrO.sub.2, the sintered ceramic body consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.

The ceramic sintered body contains Zr, Al, Y, and Mg. A Zr content is 7.5 mass % or more and 23.5 mass % or less in terms of ZrO.sub.2. An Al content is 74.9 mass % or more and 91.8 mass % or less in terms of Al.sub.2O.sub.3. A Y content is 0.41 mass % or more and 1.58 mass % or less in terms of Y.sub.2O.sub.3. A Mg content is 0.10 mass % or more and 0.80 mass % or less in terms of MgO. A ZrO.sub.2 crystal phase as a crystal phase has a monoclinic phase and a tetragonal phase as crystal structures. When a thermal aging treatment is performed for 100 hours in an environment of 180 degrees C., a ratio of a peak intensity of the monoclinic phase to a sum of peak intensities of the monoclinic phase and the tetragonal phase is 15% or less in the X-ray diffraction pattern.

Provided are a ceramic complex having high light emission intensity and a method for producing the same. Proposed is a ceramic complex, including a rare earth aluminate fluorescent material having a composition represented by the following formula (I) and an aluminum oxide, wherein the content of the aluminum oxide is 70% by mass or more, the content of Na is 7 ppm by mass or less, the content of Si is 5 ppm by mass or less, the content of Fe is 3 ppm by mass or less, and the content of Ga is 5 pm by mass or less, relative to the total amount of the rare earth aluminate fluorescent material having a composition represented by the following formula (I) and the aluminum oxide.
(Ln.sub.1-aCe.sub.a).sub.3Al.sub.5O.sub.12   (I) wherein Ln represents at least one element selected from the group consisting of Y, Gd, Lu, and Tb; and a satisfies 0<a≤0.022.

Disclosed herein is a doped perovskite barium stannate material, which has a chemical general formula of BaA.sub.xB.sub.xSn.sub.1-2xO.sub.3, where A is at least one of In, Y, Bi and La; B is at least one of Nb and Ta, and 0<x≤0.025. The doped perovskite barium stannate material disclosed in the invention has a high dielectric constant, low dielectric loss and good temperature-stability, and it can be used not only as low-frequency ceramic capacitor dielectrics, but also as microwave dielectric ceramics because of its excellent microwave dielectric properties, implying the potential application in the field of microwave communication. What's more, disclosed is a method to prepare the doped perovskite barium stannate material and the application of the doped perovskite barium stannate material in a low-frequency ceramic capacitor or microwave communication dielectric ceramics.

Provided is a dielectric composition which includes, as a main component, a complex oxide represented by a general formula A.sub.aB.sub.bC.sub.4O.sub.15+α and having a tungsten bronze structure, wherein “A” includes at least Ba, “B” includes at least Zr, “C” includes at least Nb, “a” is 3.05 or higher, and “b” is 1.01 or higher. In the dielectric composition, when the total number of atoms occupying M2 sites in the tungsten bronze structure is set to 1, the proportion of “B” is 0.250 or higher. In addition, in the dielectric composition, an X-ray diffraction peak of a (410) plane of the tungsten bronze structure is splitted into two, and an integrated intensity ratio of an integrated intensity of a high-angle side peak of the X-ray diffraction peak with respect to an integrated intensity of a low-angle side peak of the X-ray diffraction peak is 0.125 or higher.

Described herein are cold-sintered ceramic polymer composites and processes for making them from ceramic precursor materials and monomers and/or oligomers. The cold sintering process and wide variety of monomers permit the incorporation of diverse polymeric materials into the ceramic.

A polycrystalline YAG sintered body, wherein, when dimensions of a smallest rectangular solid surrounding a YAG sintered body are A mm×B mm×C mm, a maximum value (A, B, C) is 150 mm or less, a minimum value (A, B, C) is more than 20 mm and 40 mm or less, and an optical loss coefficient when light of a wavelength of 300 to 1500 nm (excluding wavelengths which result in absorption of light by an additive element) is transmitted therethrough is 0.002 cm.sup.−1 or less. Moreover, a polycrystalline YAG sintered body, wherein, when dimensions of a smallest rectangular solid surrounding a YAG sintered body are A mm×B mm×C mm, a maximum value (A, B, C) is more than 150 mm and 300 mm or less, a minimum value (A, B, C) is more than 5 mm and 40 mm or less, and an optical loss coefficient when light of a wavelength of 300 to 1500 nm (excluding wavelengths which result in absorption of light by an additive element) is transmitted therethrough is 0.002 cm.sup.−1 or less. An object of an embodiment of the present invention is to provide a large and transparent polycrystalline YAG sintered body and its production method.

A dielectric ceramic composition includes a main component of a perovskite type compound represented by a general formula of ABO.sub.3, in which A is an element in an A-site, B is an element in a B-site, and O is an oxygen element. A includes Ba. B includes Ti and Zr. A sintered-body lattice volume obtained by X-ray diffraction method is 64.50 Å.sup.3 or above.

A ceramic lithium indium diselenide or like radiation detector device formed as a pressed material that exhibits scintillation properties substantially identical to a corresponding single crystal growth radiation detector device, exhibiting the intrinsic property of the chemical compound, with an acceptable decrease in light output, but at a markedly lower cost due to the time savings associated with pressing versus single crystal growth.

A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y.sub.2O.sub.3—ZrO.sub.2. The ceramic material consists essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.