A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y.sub.2O.sub.3—ZrO.sub.2 powder consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y.sub.2O.sub.3—ZrO.sub.2, the sintered ceramic body consisting essentially of 55-65 mol % Y.sub.2O.sub.3 and 35-45 mol % ZrO.sub.2.

A composite ceramic including: a lithium garnet major phase; and a grain growth inhibitor minor phase, as defined herein. Also disclosed is a method of making composite ceramic, pellets and tapes thereof, a solid electrolyte, and an electrochemical device including the solid electrolyte, as defined herein.

diboride-silicon carbide (SiC) multiphase ceramic, including: (S1) mixing a transition metal oxide mixed powder, nano carbon black and a silicon hexaboride (SiB.sub.6) powder to obtain a precursor powder; and (S2) subjecting the precursor powder to pressureless sintering to obtain the high-entropy carbide-high-entropy diboride-SiC multiphase ceramic with a relative density of 96% or more.

The present invention provides a method for making a high strength, small grain size ceramic having a trans-granular fracture mode by rapid densification of a green body and subsequent cooling of the densified ceramic. The ceramic may include dislocations, defects, dopants, and/or secondary phases that are formed as a result of the process and resulting in stress fields capable of redirecting or arresting cracks within the material. This ceramic can maintain transparency from ultraviolet to mid-wave infrared.

A method of making polycrystalline diamond material includes providing a fraction of diamond particles or grains and a sintering additive, the sintering additive comprising a carbon source of nano-sized particles or grains, forming the diamond particles and sintering additive into an aggregated mass, consolidating the aggregated mass and a binder material to form a green body, and subjecting the green body to conditions of pressure and temperature at which diamond is more thermodynamically stable than graphite and for a time sufficient to consume the sintering additive, sintering it and forming polycrystalline diamond material that is thermodynamically and crystallographically stable and is substantially devoid of any nano-structures.

A sintered material is provided having a phase of a compound at least containing a rare earth element and fluorine, the sintered material having an L* value of 70 or more in the L*a*b* color space. The crystal grains of the sintered material preferably has an average grain size of 10 μm or less. The sintered material preferably has a relative density of 95% or more. The sintered material preferably has a three-point flexural strength of 100 MPa or more. The sintered material preferably contains no oxygen, or preferably has an oxygen content of 13% by mass or less when containing oxygen. The compound is preferably rare earth element fluoride or oxyfluoride.

The present invention provides a niobium oxide sintered compact having a composition of NbO.sub.x (2<x<2.5), and specifically provides a niobium oxide sintered compact which can be applied to a sputtering target for forming a high-quality resistance change layer for use in ReRAM. In particular, the present invention aims to provide a high-density niobium oxide sintered compact suitable for stabilizing the sputtering process.

An aluminium oxide ceramic material containing the following components:

TABLE-US-00001 component wt.-% Al.sub.2O.sub.3  95.0 to 99.989 MgO 0.001 to 0.1 Eu, calculated as Eu.sub.2O.sub.3  0.01 to 1.0.

Particular aspects of the present disclosure provide bio-resorbable and biocompatible compositions for bioengineering, restoring, or regenerating tissue or bone. In one embodiment, a biocompatible composition includes a three-dimensional porous or non-porous scaffold material comprising a calcium phosphate-based ceramic having at least one dopant therein selected from metal ion dopants or metal oxide dopants. The composition is sufficiently biocompatible to provide for a cell or tissue scaffold, and resorbable at a controlled resorption rate for controlled strength loss under body, body fluid or simulated body fluid conditions.

Provided are a sintered material having high corrosion resistance, a method of manufacturing the sintered material, a member for a semiconductor manufacturing apparatus, a method of manufacturing a member for a semiconductor manufacturing apparatus, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor manufacturing apparatus. The sintered material according to an embodiment includes 50 mass% or more of yttrium oxyfluoride, has a relative density of 97.0% or more, and has a Vickers hardness of 5.0 GPa or more. The method of manufacturing a sintered material according to an embodiment includes forming a molded body including yttrium oxyfluoride powder having a particle size of 0.3 .Math.m or less, and sintering the molded body under an atmospheric pressure at a temperature of 800° C. or less.