Patent classifications
C04B2235/9692
CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a corrosion-resistant non-porous layer associated with the ceramic insulating substrate, the corrosion-resistant non-porous layer having a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, the corrosion-resistant non-porous layer characterized by a microstructure substantially devoid of microcracks and fissures, and having an average grain size of at least about 100 nm and at most about 100 m. Assemblies including corrosion-resistant components and methods of making are also disclosed.
CORROSION RESISTANT MEMBER AND METHOD FOR MANUFACTURING THE SAME
A method for manufacturing a corrosion resistant member that includes a substrate including a ceramic or a metal, and at least one layer of a corrosion resistant film formed on a surface of at least a region of the substrate to be exposed to plasma or a corrosive gas. The corrosion resistant film contains yttria as a main component and further contains at least one of tantalum and niobium in an amount of 0.02 mol % to 10 mol % in terms of pentoxide relative to the yttria, and a non-melted portion is not present in the corrosion resistant film. The method includes mixing a raw material powder of yttria with a raw material powder of at least one of a tantalum oxide and a niobium oxide, followed by granulating the raw material powders to obtain a granulated powder.
Composites of sintered Mullite reinforced corundum granules and method for its preparation
The present disclosure relates to a composite of sintered mullite reinforced corundum granules and a method for its preparation. The composite comprises mullite and corundum in an interlocking microstructure. The process for preparing the composite involves the steps of admixing the raw materials followed by sintering to obtain the composite comprising sintered mullite reinforced corundum granules.
Method of manufacturing a feeder channel for molten glass
Feeder channel for molten glass including an infrastructure including a block self-cast and sintered in situ. Furthermore, a method for manufacturing a block of such an infrastructure and a supply channel for a glassmaking furnace are claimed.
Salt separation and destruction of PFAS utilizing reverse osmosis and salt separation
Per- and polyfluoroalkyl substances (PFAS) are destroyed by oxidation in supercritical conditions. PFAS in water is concentrated in a reverse osmosis step and salt from the resulting solution is removed in supercritical conditions prior to destruction of PFAS in supercritical conditions.
FLUORINE RESISTANT COMPOSITIONS
The present disclosure generally provides a fluorine resistant ceramic composition. The fluorine resistant ceramic composition includes about 80 mol % to about 99.9 mol % of a first metal composition including an aluminum based composition selected from the group consisting of a nitride, oxynitride, oxide, and oxy-fluoride. The fluorine resistant ceramic composition includes about 0.1 mol % to about 20 mol % of a second metal composition including an alkaline-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride.
Inorganic membrane filtration articles and methods thereof
An inorganic membrane filtration article and methods for making the same. The membrane filtration article includes a sintered flow-through ceramic honeycomb with a plurality of partition walls defining a plurality of open channels from an inlet end of the honeycomb to an outlet end of the honeycomb. The honeycomb is formed from a cordierite composition with low-sodium and/or low-potassium content for enhanced filtration performance.
Salt Separation and Destruction of PFAS Utilizing Reverse Osmosis and Salt Separation
Per-and polyfluoroalkyl substances (PFAS) are destroyed by oxidation in supercritical conditions. PFAS in water is concentrated in a reverse osmosis step and salt from the resulting solution is removed in supercritical conditions prior to destruction of PFAS in supercritical conditions.
Seal coat
A coating for an article includes a seal coat comprising self-healing particles disposed in a seal coat matrix and a bond coat disposed on the seal coat. The bond coat includes a matrix, diffusive particles disposed in the matrix, and gettering particles disposed in the matrix. A coating for an article and a method of applying a coating to an article are also disclosed.
Corrosion-resistant components
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 m, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.