A process for preparing a reaction product including a halosilane includes: contacting an unsaturated hydrocarbyl halide and a ternary intermetallic compound at a temperature of 300 C. to 700 C. to form the reaction product. The ternary intermetallic compound includes copper, silicon and a transition metal. The halosilane in the reaction product has formula R1.sub.mR.sup.2.sub.nH.sub.oSiX.sub.(4mno)> where each R.sup.1 is independently a saturated monovalent hydrocarbyl group, each R.sup.2 is independently an unsaturated monovalent hydrocarbyl group; each X is independently a halogen atom; subscript m is 1, 2, or 3; subscript n is 0, 1, or 2; subscript o is 0, 1, or 2; and a quantity (m+n+o) is 1, 2, or 3. At least a portion of the unsaturated hydrocarbyl groups in the unsaturated hydrocarbyl halide are converted to saturated hydrocarbyl groups (R.sup.1) in the halosilane.

The present disclosure provides a method for processing a fluorine-containing aqueous solution. The method comprises a reaction step for mixing in a vertical direction the fluorine-containing aqueous solution and a disiloxane compound represented by a general formula R.sub.aR.sub.bR.sub.cSiOSiR.sub.dR.sub.eR.sub.f, wherein R.sub.a, R.sub.b, R.sub.c, R.sub.d, R.sub.e and R.sub.f are selected independently from each other from a group consisting of a phenyl group and an alkyl group comprising from 1 to 20 carbon atoms and hydrogen, to react a fluorine ion in the fluorine-containing aqueous solution with the disiloxane compound, obtaining a first reaction liquid containing a monofluorosilane compound represented by general formulas R.sub.aR.sub.bR.sub.cSiF and R.sub.dR.sub.eR.sub.fSiF.