Provided is a phosphor which emits near-infrared light upon irradiation of visible light or ultraviolet light. A phosphor in an embodiment of the present invention includes an inorganic substance which contains at least an Eu element, an M[3] element (M[3] is at least one selected from the group consisting of Al, Y, La and Gd.), a Si element and nitrogen element, and also contains, if necessary, at least one element selected from the group consisting of M[1] element (M[1] is Li element.), an M[2] element (M[2] is at least one element selected from the group consisting of Mg, Ca, Ba and Sr.) and an oxygen element, while the phosphor has a maximum value of an emission peak at a wavelength in the range of 760 nm or more and 850 nm and less upon irradiation by an excitation source.

Provided is a nitride phosphor having two or more maximum absorption points in a range of 3,200 to 3,300 cm.sup.−1 in an infrared absorption (FT-IR) spectrum. The nitride phosphor of the present invention has excellent emission characteristics and is highly reliable when used in devices.

Provided are a transparent fluorescent sialon ceramic having fluorescence and optical transparency; and a method of producing the same. Such a transparent fluorescent sialon ceramic includes a sialon phosphor which contains a matrix formed of a silicon nitride compound represented by the formula M.sub.x(Si,Al).sub.y(N,O).sub.z (here, M represents at least one selected from the group consisting of Li, alkaline earth metals, and rare earth metals, 0≤x/z<3, and 0<y/z<1) and a luminescent center element.

Phosphors include a CaAlSiN.sub.3 family crystal phase, wherein the CaAlSiN.sub.3 family crystal phase comprises at least one element selected from the group consisting of Mn, Ce, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, and Yb.

A processing apparatus includes a chuck table having a holding surface for holding a workpiece; a horizontal moving mechanism that moves the chuck table in a horizontal direction and is supplied with a first oil; and a vertical moving mechanism that moves a processing unit in a vertical direction and is supplied with a second oil. Before mounting the workpiece on the holding surface, the holding surface is imaged by a camera while being irradiated with light, and it is examined whether or not the picked-up image is emitting light. If there is a light-emitting part in the picked-up image, it is determined that oil is adhered to the light-emitting part.

The present invention belongs to the technical field of inorganic luminescent materials, particularly relates to a nitride fluorescent material, and further discloses a light-emitting device containing such a fluorescent material. The nitride fluorescent material contains a compound with a structure like M.sub.mAl.sub.xSi.sub.yN.sub.3: aR, bEu, cCe. The fluorescent material has very high physical stability and chemical stability, and the fluorescent material is better in crystallization, and thus has relatively high external quantum efficiency. When being applied to a light-emitting device, the fluorescent material can fully exert the advantages of good stability and high external quantum efficiency, and the light-emitting efficiency and stability of the light-emitting device can be further improved.

Provided is a nitride phosphor having two or more maximum absorption points in a range of 3,200 to 3,300 cm.sup.1 in an infrared absorption (FT-IR) spectrum. The nitride phosphor of the present invention has excellent emission characteristics and is highly reliable when used in devices.

Provided is a phosphor which emits near-infrared light upon irradiation of visible light or ultraviolet light. A phosphor in an embodiment of the present invention includes an inorganic substance which contains at least an Eu element, an M[3] element (M[3] is at least one selected from the group consisting of Al, Y, La and Gd.), a Si element and nitrogen element, and also contains, if necessary, at least one element selected from the group consisting of M[1] element (M[1] is Li element.), an M[2] element (M[2] is at least one element selected from the group consisting of Mg, Ca, Ba and Sr.) and an oxygen element, while the phosphor has a maximum value of an emission peak at a wavelength in the range of 760 nm or more and 850 nm and less upon irradiation by an excitation source.

A phosphor powder containing a phosphor represented by General Formula (I) below. In General Formula (I), M1 includes at least La and optionally further includes one or more elements selected from the group made of lanthanoid elements other than Y and La, M2 includes at least Ba and optionally further includes one or more elements selected from the group made of Mg, Ca, and Sr, x is equal to or more than 0.005 and equal to or less than 0.2, y is equal to or more than 0 and equal to or less than 0.1, and z is more than 0.44 and equal to or less than 0.99: (Eu.sub.(1-x)(1-z)M1.sub.xM2.sub.(1-x)z).sub.2(Si.sub.1-yAl.sub.y).sub.5N.sub.8 . . . (I).

Phosphors include a CaAlSiN.sub.3 family crystal phase, wherein the CaAlSiN.sub.3 family crystal phase comprises at least one element selected from the group consisting of Mn, Ce, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, and Yb.