A surface treatment layer for a titanium-containing substrate includes a disordered metal oxide lattice having metal nitride compounds doped in the disordered metal oxide lattice. A method of surface treating a metal substrate includes introducing oxygen to a titanium-containing substrate to thereby form an oxide layer within the titanium-containing substrate, and, after the step of introducing oxygen, introducing nitrogen to the titanium-containing substrate to thereby modify the oxide layer to form a surface treatment layer.

Described is a method of manufacturing a gate-all-around electronic device. The method includes forming a thermal oxide layer though an enhanced in situ steam generation process in combination with atomic layer deposition of a low-κ layer. The thin thermal oxide layer passivates the interface between the silicon layer and the dielectric layer of the GAA. A passivation process after the deposition of the low-κ layer reduces the bulk trap and enhances the breakdown performance of the GAA transistor.

Described is a method of manufacturing a gate-all-around electronic device. The method includes forming a thermal oxide layer though an enhanced in situ steam generation process in combination with atomic layer deposition of a low-κ layer. The thin thermal oxide layer passivates the interface between the silicon layer and the dielectric layer of the GAA. A passivation process after the deposition of the low-κ layer reduces the bulk trap and enhances the breakdown performance of the GAA transistor.

A hydrogen gas sensor with a substrate and a zinc oxide nanostructured thin film deposited on the substrate, wherein the zinc oxide nanostructured thin film has a lattice structure with a weight ratio of low binding energy O.sup.2− ions to medium binding energy oxygen vacancies in a range of 0.1 to 1.0, and a method of fabricating a gas sensor by thermally oxidizing a metal thin film under low oxygen partial pressure. Various combinations of embodiments of the hydrogen gas sensor and the method of fabricating the gas sensor are provided.

A hydrogen gas sensor with a substrate and a zinc oxide nanostructured thin film deposited on the substrate, wherein the zinc oxide nanostructured thin film has a lattice structure with a weight ratio of low binding energy O.sup.2− ions to medium binding energy oxygen vacancies in a range of 0.1 to 1.0, and a method of fabricating a gas sensor by thermally oxidizing a metal thin film under low oxygen partial pressure. Various combinations of embodiments of the hydrogen gas sensor and the method of fabricating the gas sensor are provided.

A method of manufacturing a casing of a turbocharger includes: a steam treatment step of subjecting at least one of a turbine housing and a bearing housing to a steam treatment to form an oxide film on the at least one of the turbine housing and the bearing housing before assembling the turbine housing, the bearing housing and a compressor housing; and an assembling step of assembling the turbine housing, the bearing housing and the compressor housing.

A method of manufacturing a casing of a turbocharger includes: a steam treatment step of subjecting at least one of a turbine housing and a bearing housing to a steam treatment to form an oxide film on the at least one of the turbine housing and the bearing housing before assembling the turbine housing, the bearing housing and a compressor housing; and an assembling step of assembling the turbine housing, the bearing housing and the compressor housing.

The present invention relates to a Group IV metal or alloy component having a protective oxide surface layer, the Group IV metal or alloy component having a core hardness, a diffusion zone having oxygen in solid solution in the range of a level providing a hardness of 120% of the hardness of the material core to the saturation level of the Group IV metal or alloy, and a Group IV metal oxide layer at the surface of the component, the diffusion zone being between the Group IV metal oxide layer and the material core. In another aspect, the invention relates to a method of producing a protective oxide surface layer on a Group IV metal or alloy comprising: providing a workpiece of a Group IV metal or alloy, oxidising the Group IV metal or alloy in a first and a second oxidation step.

The present invention relates to a Group IV metal or alloy component having a protective oxide surface layer, the Group IV metal or alloy component having a core hardness, a diffusion zone having oxygen in solid solution in the range of a level providing a hardness of 120% of the hardness of the material core to the saturation level of the Group IV metal or alloy, and a Group IV metal oxide layer at the surface of the component, the diffusion zone being between the Group IV metal oxide layer and the material core. In another aspect, the invention relates to a method of producing a protective oxide surface layer on a Group IV metal or alloy comprising: providing a workpiece of a Group IV metal or alloy, oxidising the Group IV metal or alloy in a first and a second oxidation step.

Embodiments of the present invention provide a technique for forming a film having a high added value appearance quality and excellent hardness on the surface of a steel sheet in a short time.