Described is a method of manufacturing a gate-all-around electronic device. The method includes forming a thermal oxide layer though an enhanced in situ steam generation process in combination with atomic layer deposition of a low-κ layer. The thin thermal oxide layer passivates the interface between the silicon layer and the dielectric layer of the GAA. A passivation process after the deposition of the low-κ layer reduces the bulk trap and enhances the breakdown performance of the GAA transistor.

Described is a method of manufacturing a gate-all-around electronic device. The method includes forming a thermal oxide layer though an enhanced in situ steam generation process in combination with atomic layer deposition of a low-κ layer. The thin thermal oxide layer passivates the interface between the silicon layer and the dielectric layer of the GAA. A passivation process after the deposition of the low-κ layer reduces the bulk trap and enhances the breakdown performance of the GAA transistor.

A method of forming a semiconductor structure includes pre-cleaning a surface of a substrate, forming an interfacial layer on the pre-cleaned surface of the substrate, depositing a high- dielectric layer on the interfacial layer, performing a plasma nitridation process to insert nitrogen atoms in the deposited high- dielectric layer, and performing a post-nitridation anneal process to passivate chemical bonds in the plasma nitridated high- dielectric layer.

The present invention relates to a case hardened component of a titanium alloy, the component having a diffusion zone of a thickness of at least 50 ll, as calculated from the surface of the component, the diffusion zone comprising oxygen and carbon in solid solution and having a distinct phase of a carbo-oxide compound having the composition TiO.sub.xC.sub.1-x, wherein x is a number in the range of 0.01 to 0.99, which diffusion zone has a microhardness of at least 800 HV0.025 and which carbo-oxide compound has a microhardness of at least 1200 HV0.025. In another aspect the invention relates to a method of producing the case hardened component. In a further aspect the invention relates to a method of oxidising a component of a Group IV metal.

The present invention relates to a case hardened component of a titanium alloy, the component having a diffusion zone of a thickness of at least 50 ll, as calculated from the surface of the component, the diffusion zone comprising oxygen and carbon in solid solution and having a distinct phase of a carbo-oxide compound having the composition TiO.sub.xC.sub.1-x, wherein x is a number in the range of 0.01 to 0.99, which diffusion zone has a microhardness of at least 800 HV0.025 and which carbo-oxide compound has a microhardness of at least 1200 HV0.025. In another aspect the invention relates to a method of producing the case hardened component. In a further aspect the invention relates to a method of oxidising a component of a Group IV metal.

A method for patinating zinc surfaces of a structural element. The method includes disposing a structural element with a zinc surface in a container. Disposing an atmosphere around the zinc surface in the container, wherein said atmosphere comprises a carbon-based gas and a relative humidity. Heating the zinc surface for at least one hour to provide a patinated zinc surface. Heating of the zinc surface occurs by disposing the atmosphere at a heating state. The heating state the atmosphere comprises a temperature of at least 50 degrees Celsius, relative humidity of at least 70%, and at least 5% volume of a carbon-based gas.

Methods and systems for preparing a hole having an accurately controlled area in an orifice plate for a mass flow controller are provided. Methods involve forming an initial hole in the orifice plate. The initial hole has an opening having an initial area. The orifice plate comprises a material that can react to form a coating on the orifice plate. The coating occupies a greater volume than the material consumed to form the coating. The material of the orifice plate is reacted with a reactant to produce the coating and thereby produce a reduced area hole having an opening with a reduced area that is smaller than the initial area. The reduced area hole is measured. A determined amount of the coating is removed from at least the reduced area hole to produce a final hole in the orifice plate, wherein the reduced area is smaller than an opening area of the final hole.

There is provided a method for manufacturing a soft magnetic member where a coating formed of an -Fe.sub.2O.sub.3 single phase having a high electrical resistivity is formed on a soft magnetic alloy substrate. A soft magnetic alloy substrate is heated in an atmosphere containing water vapor and inert gas to form a coating on the soft magnetic alloy substrate. The atmosphere has an oxygen partial pressure in a range of 0 to 1.5 kPa. A soft magnetic member including the soft magnetic alloy substrate and the coating formed on its surface can be obtained.

The purpose of the present invention is to provides a method for manufacturing a black plated steel sheet that is capable of more evenly blackening the area of the plated steel sheet to be blackened. The present invention relates to a method for manufacturing a black plated steel sheet by bringing a plated steel sheet with an Al- and Mg-containing hot-dip galvanized layer into contact with water vapor inside a sealed vessel. This method performs, in the following order: a first step for heating a plated steel sheet disposed inside a sealed vessel in the presence of a gas, the dew point of which is always less than the plated steel sheet temperature; a second step for evacuating the heated ambient gas inside the sealed vessel to make the pressure of the gas inside the sealed vessel to be 70 kPa or less; and a third step for introducing water vapor inside the sealed vessel in which the pressure of the gas therein has been reduced to 70 kPa or less to blacken the galvanized layer.

The purpose of the present invention is to provides a method for manufacturing a black plated steel sheet that is capable of more evenly blackening the area of the plated steel sheet to be blackened. The present invention relates to a method for manufacturing a black plated steel sheet by bringing a plated steel sheet with an Al- and Mg-containing hot-dip galvanized layer into contact with water vapor inside a sealed vessel. This method performs, in the following order: a first step for heating a plated steel sheet disposed inside a sealed vessel in the presence of a gas, the dew point of which is always less than the plated steel sheet temperature; a second step for evacuating the heated ambient gas inside the sealed vessel to make the pressure of the gas inside the sealed vessel to be 70 kPa or less; and a third step for introducing water vapor inside the sealed vessel in which the pressure of the gas therein has been reduced to 70 kPa or less to blacken the galvanized layer.