The invention relates to the improvement of synthesis by chemical vapour deposition, particularly diamond synthesis. It is proposed to reduce the time required for the deposition of diamond layers by compressing the plasma near the deposition substrate in order to increase the chances of collision between active species.

Implementations of the present disclosure generally relate to the fabrication of integrated circuits. More particularly, the implementations described herein provide techniques for deposition of high-density films for patterning applications. In one implementation, a method of processing a substrate is provided. The method includes flowing a hydrocarbon-containing gas mixture into a processing volume of a process chamber having a substrate positioned on an electrostatic chuck. The substrate is maintained at a pressure between about 0.5 mTorr and about 10 Torr. The method further includes generating a plasma at the substrate level by applying a first RF bias to the electrostatic chuck to deposit a diamond-like carbon film on the substrate. The diamond-like carbon film has a density greater than 1.8 g/cc and a stress less than −500 MPa.

A self-supporting ultra-fine nanocrystalline diamond thick film, the thickness being 100-3000 microns, wherein 1 nanometer≤diamond grain size≤20 nanometers. A method for using chemical vapor deposition to grow ultra-fine nanocrystalline diamond on a silicon substrate, and separating the silicon substrate and the diamond to acquire the self-supporting ultra-fine nanocrystalline diamond thick film. The chemical vapor deposition method is simple and effective, and prepares a high-quality ultra-fine nanocrystalline diamond thick film.

A moissanite ornament, wherein the surface of the moissanite is coated with a diamond film. A method for coating a diamond film on a surface of a moissanite, including: Step 1: performing ultrasonic grinding pretreatment on the moissanite ornament in the nano-diamond powder suspension; Step 2: taking the moissanite ornament out from the nano-diamond powder suspension, and washing clean; Step 3: pressing the moissanite ornament into a preset shape-preserving sample platform to maintain; Step 4: placing, the moissanite ornament together with the shape-preserving sample platform into a diamond film deposition furnace to perform a plasma treatment; Step 5: introducing methane to conduct in-situ diamond film deposition. The moissanite coated with the diamond film on the surface provided by the present disclosure can greatly improve the surface hardness while maintaining the optical properties of the moissanite, thereby improving the scratch resistance performance of the moissanite.

An ultra-fine nanocrystalline diamond precision cutting tool and a manufacturing method therefor. A diamond cutter is made of a thick self-supporting film of ultra-fine nanocrystalline diamond, the thick film having a thickness of 100-3000 microns, where 1 nanometer diamond grain size 520 nanometers. In the manufacturing method, the growth of ultra-fine nanocrystalline diamond on a silicon substrate is accomplished by means of two steps of direct current hot cathode glow discharge chemical vapor deposition and hot filament chemical vapor deposition, then the silicon substrate is separated from the diamond to obtain a thick self-supporting film of ultra-fine nanocrystalline diamond, the thick self-supporting film of ultra-fine nanocrystalline diamond is laser cut and then welded to a cutter body, and then by means of edging, rough grinding and fine grinding, an ultra-fine nanocrystalline diamond precision cutting tool is obtained.

A system includes a structure including an upper chamber linked to a lower chamber, the upper chamber including a gas inlet configured to enable a gas to enter the upper chamber, the lower chamber including a plasma outlet, a microwave generator configured to deliver a microwave to the upper chamber causing atoms in the gas to ionize to generate a charged particle microwave plasma, a hollow cathode centrally positioned within the lower chamber and an anode surrounding an interior wall of the lower chamber, and a power source for generating power, the power flowing between the anode and the hollow cathode causing atoms in the gas to ionize to generate a charged particle hollow cathode plasma.

An electrode is provided. The electrode includes a contact pad composed of boron-doped polycrystalline diamond (BDD); a fiber core composed of BDD extending longitudinally from the contact pad from a first end that is in direct contact with the contact pad to an opposing second end; and a polycrystalline diamond (PCD) cladding that coats and hermetically seals the contact pad and the fiber core. A first portion of the contact pad and a second portion at or near the second end of the fiber core are not coated and hermetically scaled by the PCD cladding. A method of fabricating the electrode is also provided.

A plasma processing apparatus includes a toroidal-shape plasma vessel comprising a process chamber. A magnetic core surrounds a portion of the toroidal-shape plasma vessel. An RF power supply having an output that is electrically connected to the magnetic core energizes the magnetic core, thereby forming a toroidal plasma loop discharge in the plasma chamber. A workpiece holder is positioned in the toroidal-shape plasma vessel and includes at least one face. A plasma guiding structure is shaped and dimensioned so as to constrain a section of plasma in the toroidal plasma loop to travel substantially perpendicular to a normal to the at least one face.

Multispectral optical interference coatings and methods. In one example, an optical element includes a substrate having a first surface and a second surface disposed opposite the first surface, a first multi-layer dielectric film disposed on the first surface of the substrate and constructed and arranged to transmit light in a first band of wavelengths, a second multi-layer dielectric film disposed on the second surface of the substrate and constructed and arranged to transmit light in a second band of wavelengths, the first and the second bands of wavelengths at least partially overlapping, and a bilayer diamond-like carbon (DLC) coating disposed on the first multi-layer dielectric film, the bilayer DLC coating including a first layer and a second layer, the first layer having a modulus of elasticity of a first value, and the second layer disposed on the first layer and having a modulus of elasticity of a second value that is greater than the first value.

A barrier film for use in laminated packaging materials for liquid food products, comprising a polymer film substrate and coated onto a first side of the polymer film substrate, by plasma-enhanced chemical vapor deposition (PECVD) in a vacuum process, a first coating layer of silicon oxide having the general composition formula SiOxCy, wherein x is from 1.5 to 2.2, and y is from 0.15 to 0.8, and a second coating layer of an amorphous diamond-like carbon (DLC), which is directly adjacent and contacting the first coating layer, the barrier film providing gas and water vapor barrier properties and mechanical durability in a packaging material and packages made thereof.