Patent classifications
C23C16/278
MPCVD device capable of realizing effective doping
An MPCVD device capable of realizing effective doping comprises a reaction chamber and a gas input structure, wherein the gas input structure includes a first pipeline and a second pipeline for reaction gas, a first gas distributor connected with the first pipeline that uniformly transports gas as a first reactant into the reaction chamber through a gas outlet of the first pipeline located near the top of the reaction chamber, wherein the second pipeline uniformly inputs a doped reaction gas to a surface of a substrate through a second gas distributor in the form of a gas transport ring having a circular shape, wherein a height in the vertical direction of the gas transport ring connected with the second pipeline is substantially the same as that of a support for the substrate. The gas transport ring can be concentrically placed at a center position inside the support, or concentrically placed outside the support.
Diamond growth on composite substrate
A method includes inserting a composite substrate into a reactor, where the composite substrate has a transverse coefficient of thermal expansion matching the transverse coefficient of thermal expansion of diamond throughout the range of 20 to 600 deg. C.; growing a layer of diamond upon a composite substrate via microwave plasma chemical vapor deposition. The composite substrate includes a deposition layer embedded within a base layer that is at least 6,000 times thicker than the deposition layer.
ELEMENTARY ELECTRODE, ELECTRODE AND ELECTROCHEMICAL DETECTION DEVICE COMPRISING SUCH AN ELECTRODE
Elementary electrodes with at least two characteristic dimensions smaller than 1 m or 2.5 m, including a reactive surface, with characteristic dimensions smaller than 1 m or 2.5 m, a thin film of catalyst, part of the surface of which is comprised in the reactive surface, a thin film of carbon, in an allotropic form of carbon chosen from boron-doped diamond and nitrogen-doped amorphous non-hydrogenated carbon, in contact with the said thin film of catalyst and part of the surface of which is included in the reactive surface, a support, in contact with at least one of the thin films, enabling electrical measurements.
Electrolytic cell equipped with microelectrodes
An electrolytic cell equipped with microelectrodes for the generation of un-separated products and the method for obtaining it. The cell and the microelectrodes are obtained using a technology for the production of microelectromechanical systems (MEMS). The anodic and cathodic microelectrodes have an electrocatalytic coating and are mutually intercalated at an interelectrodic gap lower than 300 micrometres.