C23C18/1245

Film forming method, method of manufacturing semiconductor device, and film forming device
10854447 · 2020-12-01 · ·

A film forming method of forming a film on a substrate includes: annealing the substrate; and supplying mist of a raw material solution of the film to a surface of the substrate after the annealing while heating the substrate at a temperature lower than a temperature of the substrate during the annealing.

TUNGSTEN BRONZE THIN FILMS AND METHOD OF MAKING THE SAME

The present disclosure relates to tungsten bronze thin films and method of making the same. Specifically, the present disclosure relates to a thin, homogeneous, highly conducting cubic tungsten bronze film with densely packed micron size particles and the process of making the film.

Method for manufacturing a light extraction structure for a UV lamp
10838112 · 2020-11-17 · ·

A method for forming a light extraction layer including nanostructures, the method including: providing a substrate, the substrate being at least partially transparent to UV light; forming a non-aqueous precursor solution comprising fluorine and an alkaline earth metal to form alkaline earth metal difluoride particles; applying the precursor solution on at least a first side of the substrate; drying the substrate at a first temperature for a first period of time; and baking the substrate at a second temperature, higher than the first temperature, for a second period of time, thereby forming a light extraction nanostructure layer comprising alkaline earth metal difluoride nanostructures on the substrate. Also, a light extraction structure and to a UV lamp including such an extraction structure.

SPIN-ON INORGANIC OXIDE CONTAINING COMPOSITION USEFUL AS HARD MASKS AND FILLING MATERIALS WITH IMPROVED THERMAL STABILITY
20200356006 · 2020-11-12 ·

The present invention relates to a composition comprising; components a. c. and d; and optional component b. wherein, component a. is a metal compound having the structure (I), optional component b., is a polyol additive, having structure (VI), component c. is a high performance polymer additive, and component d. is a solvent. The present invention further relates to using this compositions in methods for manufacturing electronic devices through either the formation of a patterned films of high K material comprised of a metal oxide on a semiconductor substrate, or through the formation of patterned metal oxide comprised layer overlaying a semiconductor substrate which may be used to selectively etch the semiconductor substrate with a fluorine plasma.

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PROCESS FOR DEPOSITING A COATING ON SHORT FIBRES BY CALEFACTION
20200331808 · 2020-10-22 ·

A process for depositing a coating on short fibres of carbon or silicon carbide from a coating precursor, the short fibres having a length of between 50 m and 5 mm, the process including at least heating the short fibres by placing a mixture including the fibres and a liquid phase of the coating precursor in a microwave field so as to bring the surface of the fibres to a temperature allowing the coating on the fibres from the coating precursor to be formed by calefaction.

INORGANIC COATING AND COMPOSITION
20200288722 · 2020-09-17 ·

This disclosure relates to basic inorganic compositions. Methods of providing antifungal/antibacterial resistance and/or hydrophobicity and/or corrosion resistance by coating surfaces with the basic inorganic compositions are provided. In another aspect, a silicate composition comprising at least one alkali earth metal; and a Group IV element of silicon, germanium, tin, or lead having at least one hydrocarbon moiety covalently bonded thereto is provided.

Solution deposition method for forming metal oxide or metal hydroxide layer

A solution deposition method includes: applying a liquid precursor solution to a substrate, the precursor solution including an oxide of a first metal, a hydroxide of the first metal, or a combination thereof, dissolved in an aqueous ammonia solution; evaporating the precursor solution to directly form a solid seed layer on the substrate, the seed layer including an oxide of the first metal, a hydroxide of the first metal, or a combination thereof, the seed layer being substantially free of organic compounds; and growing a bulk layer on the substrate, using the seed layer as a growth site or a nucleation site.

Manufacturing method for carbonfiber grown metal oxide

A method for manufacturing metal oxide-grown carbon fibers including immersing carbon fibers in a solution for forming a metal oxide seed layer and electrodepositing a metal oxide seed on the surfaces of carbon fibers, or irradiating microwave thereto to form a metal oxide seed layer, and irradiating microwave to the metal oxide seed layer-formed carbon fibers to grow metal oxide. The method for manufacturing metal oxide-grown carbon fibers can reduce process time, and improve process energy efficiency and production efficiency. The method for manufacturing metal oxide-grown carbon fibers can offer metal oxide-grown carbon fibers with improved interfacial shear stress.

METHOD FOR PRODUCING FIBERS AND FOAMS CONTAINING SILICON CARBIDE, AND USE THEREOF

The present invention relates to a method for producing silicon carbide-containing fibers or silicon carbide-containing nano- and/or micro-structured foams, and to the use thereof, in particular as anode materials for lithium-ion storage batteries.

Conformal coating on three-dimensional substrates

The disclosure relates to a method for forming a conformal coating on a substrate having a topography presenting a relief. One method of the disclosure includes setting the temperature of the substrate within the range 140-275 C., and coating an aqueous solution including a sol-gel precursor on said substrate. The disclosure also relates to a method for fabricating a battery, a capacitor, a catalyst, a photovoltaic cell or a sensor using such a method, and to an aqueous solution for use in such a method.