Provided are a composition for depositing a silicon-containing thin film containing a bis(aminosilyl)alkylamine compound and a method for manufacturing a silicon-containing thin film using the same, and more particularly, a composition for depositing a silicon-containing thin film, containing the bis(aminosilyl)alkylamine compound capable of being usefully used as a precursor of the silicon-containing thin film, and a method for manufacturing a silicon-containing thin film using the same.

The present disclosure provides a method for fabrication of a glass preform. The method includes production of soot particles in a combustion chamber using a precursor material. The heating of the precursor material produces the soot particles along with one or more impurities. In addition, the method includes agglomeration of the soot particles. Further, the method includes separation of the soot particles from the one or more impurities. Also, the separation of the soot particles is performed in a cyclone separator. Furthermore, the method includes collection of the soot particles. Also, the soot particles are compacted with facilitation of a preform compaction chamber. Also, the compacted preform is sintered with facilitation of a sintering furnace. The compaction of the soot particles followed by sintering results in formation of the glass preform.

Provided is a fumed silica for chemical-mechanical polishing with which post-polishing scratches occurring on a surface of an object to be polished can be significantly reduced, and which is important for miniaturization and multi-layering of a structure. The fumed silica according to the present invention has a BET specific surface area of 57-400 m.sup.2/g. In a liquid dispersion which is obtained by ultrasonically dispersing 6.25 mass % of this fumed silica in water at a vibration frequency of 20 kHz and an amplitude of 15-25 m for 3 minutes, the amount of residues on a sieve is 5 ppm or less as measured by wet sieving using an electroformed sieve having a mesh opening size of 5 m.

A reaction vessel and method for producing functionalised Silica using a mixing chamber for mixing a silane and an oxide such as carbon dioxide provided using a delivery system to mix the gases so that they react to form functionalised Silica and other products such as Hydrogen and Carbon or other oxides.

A process for production of silica having variable thickening wherein a) a product stream I containing at least a vaporous, hydrolysable and/or oxidizable silicon compound, b) a product stream II containing oxygen and c) a product stream III containing at least a combustible gas
are made to react, where d) a feed port in a pipepiece A, the pipepiece A containing one or more static mixing elements, is used to import product stream I into product stream II, or vice versa and thereby create product stream IV, then e) a feed port in a pipepiece B, the pipepiece B containing one or more static mixing elements, is used to import product stream III in product stream IV and thereby create product stream V, f) product stream V leaving pipepiece B is imported into a reaction chamber, ignited therein and reacted in a flame, and g) the resultant solid material is separated off.

Process for production of silica having variable thickening wherein a) a product stream I comprising at least a vaporous, hydrolysable and/or oxidizable silicon compound, b) a product stream II comprising oxygen and c) a product stream III comprising at least a combustible gas are made to react, characterized in that d) a feed port in a pipepiece A, said pipepiece A comprising one or more static mixing elements, is used to import product stream I into product stream II, or vice versa and thereby create product stream IV, then e) a feed port in a pipepiece B, said pipepiece B comprising one or more static mixing elements, is used to import product stream III in product stream IV and thereby create product stream V, f) product stream V leaving pipepiece B is imported into a reaction chamber, ignited therein and reacted in a flame, and g) the resultant solid material is separated off.

The invention relates to a process for the preparation of a quartz glass body comprising the process steps i.) Providing a silicon dioxide granulate, ii.) Making a glass melt out of silicon dioxide granulate in an oven and iii.) Making a quartz glass body out of at least part of the glass melt, wherein the oven comprises a standing sinter crucible. The invention further relates to a quartz glass body which is obtainable by this process. The invention further relates to a light guide, an illuminant and a formed body, which are each obtainable by further processing of the quartz glass body.

Combustion apparatuses (e.g., burners) and methods, such as those configured to encourage mixing of fluid, flame stability, and synthesis of materials (e.g., nano-particles), among other things.

A process for producing at least one pyrogenic compound can be performed. A burner suitable for use in said process has at least four concentric tubes, where a second tube is arranged around the central tube. A process for making the burner can be performed, and a production facility that has at least one burner can be made.

Method for producing a metal oxide powder in which a) a material stream I containing at least one vaporous hydrolysable metal compound, b) a material stream II containing oxygen and c) a material stream III containing at least one fuel gas are brought to reaction, wherein d) via a feed-in point provided in a pipe piece A, wherein the pipe piece A comprises one or more static mixer elements, the material stream I is introduced into the material stream II, or vice versa, and thereby generates the material stream IV, then e) via a feed-in point provided in a pipe piece B, wherein the pipe piece B comprises one or more static mixer elements, the material stream III is introduced into the material stream IV, and thereby generates the material stream V, f) the material stream V leaving the pipe piece B is introduced into a reaction chamber, ignited there and converted into a flame and g) the resultant solids are separated off.