A protective coating system includes a substrate that has an exterior surface exhibiting a degree of valley/hill surface irregularity including a plurality of hills and a plurality of valleys and a first coating layer formed directly on to the exterior surface of the substrate and that conforms to the exterior surface of the substrate such that the first coating layer has a non-uniform coating thickness over the substrate. The protective coating system further includes a second coating layer formed directly on to the exterior surface of the first coating layer. The second coating layer includes a plurality of pores within the second coating layer. Still further, the protective coating system includes a third coating layer formed within at least some of the plurality of pores within the second coating layer.

A protective coating system includes a substrate that has an exterior surface exhibiting a degree of valley/hill surface irregularity including a plurality of hills and a plurality of valleys and a first coating layer formed directly on to the exterior surface of the substrate and that conforms to the exterior surface of the substrate such that the first coating layer has a non-uniform coating thickness over the substrate. The protective coating system further includes a second coating layer formed directly on to the exterior surface of the first coating layer. The second coating layer includes a plurality of pores within the second coating layer. Still further, the protective coating system includes a third coating layer formed within at least some of the plurality of pores within the second coating layer.

An improved ceramic heat shield for a gas turbine is provided. The ceramic heat shield has a porous ceramic body and according to the embodiments an infiltration coating that is provided in a surface layer of the porous ceramic body and contains an infiltration coating material designed to gas-tightly seal pores of the ceramic body.

An improved ceramic heat shield for a gas turbine is provided. The ceramic heat shield has a porous ceramic body and according to the embodiments an infiltration coating that is provided in a surface layer of the porous ceramic body and contains an infiltration coating material designed to gas-tightly seal pores of the ceramic body.

A ceramic heat shield for a gas turbine. The ceramic heat shield has a ceramic body containing aluminium oxide and has a surface layer of the ceramic body which contains yttrium aluminium garnet as reaction coating material. A gas turbine includes such a ceramic heat shield and a method produces such a ceramic heat shield.

A ceramic heat shield for a gas turbine. The ceramic heat shield has a ceramic body containing aluminium oxide and has a surface layer of the ceramic body which contains yttrium aluminium garnet as reaction coating material. A gas turbine includes such a ceramic heat shield and a method produces such a ceramic heat shield.

Disclosed is to provide a composite structure used as a member for a semiconductor manufacturing apparatus with which low-particle generation can be improved, as well as a semiconductor manufacturing apparatus including the same. A composite structure including a base material and a structure that is provided on the base material and has a surface, in which the structure comprises Y.sub.3Al.sub.5O.sub.12 as a main component, and has an indentation hardness being larger than 8.5 GPa features excellent low-particle generation and is suitably used as a member for a semiconductor apparatus.

Disclosed is to provide a composite structure used as a member for a semiconductor manufacturing apparatus with which low-particle generation can be improved, as well as a semiconductor manufacturing apparatus including the same. A composite structure including a base material and a structure that is provided on the base material and has a surface, in which the structure comprises Y.sub.3Al.sub.5O.sub.12 as a main component, and has an indentation hardness being larger than 8.5 GPa features excellent low-particle generation and is suitably used as a member for a semiconductor apparatus.

A Si-based composite bond coat for environmental barrier coatings on a Si-based ceramic matrix composite that protects the CMC from an oxidation environment by in-situ modifying a thermally grown oxide (TGO) using a TGO modifier to suppress cristobalite TGO cracking during thermal cycling in a gas turbine engine.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF.sub.3, Er.sub.4Al.sub.2O.sub.9, ErAlO.sub.3, and a ceramic compound comprising Y.sub.4Al.sub.2O.sub.9 and a solid-solution of Y.sub.2O.sub.3—ZrO.sub.2.