In an embodiment a method for producing a substrate includes forming a green sheet stack including first green sheets and second green sheets, wherein each of the first green sheets and the second green sheets contains a ceramic material as a main component, and wherein the second green sheets further contain a sintering aid in addition to the ceramic material.

A process can be used for the preparation of an up-conversion phosphor of the general formula (I):

A.sub.1-x-y-zB*.sub.yB.sub.2SiO.sub.4:Ln.sup.1.sub.x,Ln.sup.2.sub.z,   (I).

The process involves preparing a mixture, introducing the mixture into a reaction chamber of a thermal apparatus, heating the mixture until a thermal treatment temperature is reached with a heating ramp, thermally treating the heated mixture for a holding time of at least 0.02 h, cooling the thermally treated material to room temperature while maintaining a cooling ramp, and obtaining a silicate-based lanthanoid ion-doped phosphor according to formula (I).

Described are coatings that contain of fluorinated yttrium oxide and a metal oxide; methods of preparing these coatings; substrates, surfaces, equipment, and components of equipment that include a coating that contains a combination of fluorinated yttrium oxide and a metal oxide; and methods of preparing and using the coatings and coated substrates.

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

The invention discloses high-strength glass-ceramic-based lightweight aggregates and the preparation method thereof. The mass ratio of raw material components is 50-70 parts of engineering muck, 20-40 parts of glass, 3-7 parts of calcium carbonate, 3-7 parts of magnesium oxide, and 2-10 parts of a nucleating agent; the nucleating agent is at least one of calcium fluoride, titanium dioxide, and chromium oxide. After crushing, mixing, and granulating, spherical particles with a particle size of 10-12 mm are formed; and then the product can be obtained after drying, sintering, and cooling. The obtained lightweight aggregate from the invention has a diopside matrix which provides high strength and a low water absorption rate at low densities. Moreover, waste glass and engineering muck could be utilized with high value.

A dry substance mixture for a batch, preferably a refractory batch, for the production of a coarse ceramic, refractory, non-basic, shaped or unshaped product, such a refractory batch, such a product as well as a method for its production and a lining of an industrial furnace for the aluminum industry, and such an industrial furnace as well as a lining of a launder transport system or a mobile transport vessel for the aluminum industry, and such a launder transport system and such a transport vessel.

A sintered body includes a crystal grain containing silicon nitride, and a grain boundary phase. If dielectric losses of the sintered body are measured while applying an alternating voltage to the sintered body and continuously changing a frequency of the alternating voltage from 50 Hz to 1 MHz, an average value ε.sub.A of dielectric losses of the sintered body in a frequency band from 800 kHz to 1 MHz and an average value ε.sub.B of dielectric losses of the sintered body in a frequency band from 100 Hz to 200 Hz satisfy an expression |ε.sub.A−ε.sub.B|≤0.1.

The present invention discloses a dielectric ceramic formula enabling one to obtain a multilayer ceramic capacitor by alternatively stacking the ceramic dielectric layers and base metal internal electrodes. The dielectric ceramic composition comprises a primary ingredient:
[(Na.sub.1-xK.sub.x).sub.sA.sub.1-s].sub.m[(Nb.sub.1-yTa.sub.y).sub.uB1.sub.vB2.sub.w)]O.sub.3 wherein: A, B1, B2, x, y, s, u, v, w and m are defined.

A member for a semiconductor manufacturing apparatus includes a ceramic plate having an upper surface serving as a wafer mounting surface and incorporating an electrode, a ceramic dense plug disposed adjacent to a lower surface side of the ceramic plate and ceramic-bonded to the ceramic plate by a ring-shaped joint portion, a metal cooling plate joined to the lower surface of the ceramic plate in a portion other than the ring-shaped joint portion, and a gas flow channel. The gas flow channel includes a gas discharge hole that passes completely through the ceramic plate in the thickness direction of the ceramic plate and an internal gas flow channel that passes from the upper surface to the lower surface of the dense plug while winding through the dense plug. The gas flow channel passes inside of an inner periphery of the joint portion.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF.sub.3, Er.sub.4Al.sub.2O.sub.9, ErAlO.sub.3, and a ceramic compound comprising Y.sub.4Al.sub.2O.sub.9 and a solid-solution of Y.sub.2O.sub.3—ZrO.sub.2.