An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

The present disclosure relates to an yttrium-based granular powder for thermal spraying. More particularly, the yttrium-based granular powder is a mixture including one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO.sub.2) powder. A Y—Si—O intermediate phase is included therein in a content of less than 10 wt %. The thermal spray coating manufactured using the same has a low porosity, and forms a very dense thin film, thus ensuring excellent plasma resistance.

The present invention relates to a method of preparation of a garnet-type inorganic material. It also relates to the garnet-type inorganic material itself. The process comprises the following steps: (1) bringing an aqueous solution S comprising (i) a salt of zirconium, (ii) a salt of lanthanum and (iii) a salt of the element A or a precursor of an oxide of element A into contact with an aqueous solution of a basic compound, as a result of which a precipitate suspended in the reaction medium is obtained; (2) stirring the reaction medium obtained at the end of step (1) for at least 30 min; (3) bringing the precipitate obtained at the end of step (2) into contact with an additive selected in the group consisting of: anionic surfactants; nonionic surfactants; polyethylene glycols; carboxylic acids and their salts; and surfactants of the carboxymethylated fatty alcohol ethoxylate type; (4) calcining in air the precipitate recovered at the end of the previous step at a temperature which is at least 400° C.; (5) bringing into contact the product obtained at the end of step (4) with a salt of lithium; (6) calcining in air the product obtained at the end of step (5) at a temperature between 700° C. and 1100° C.; 20 the inorganic compound M comprising or consisting essentially of a garnet oxide or garnet-type oxide containing, as constituent elements, the elements Li, La, Zr and at least one element A selected in the group consisting of Al, Ga, Nb, Fe, W, Ta, or a mixture thereof.

A method for manufacturing a wavelength conversion member that offers a high emission intensity and a high light conversion efficiency is provided. The method for manufacturing a wavelength conversion member includes providing a green body containing an yttrium-aluminum-garnet phosphor with a composition represented by Formula (I) below and alumina particles with an alumina purity of 99.0% by mass or more, primary-sintering the green body to obtain a first sintered body, and secondary-sintering the first sintered body by applying a hot isostatic pressing (HIP) treatment to obtain a second sintered body.
(Y.sub.1-a-bGd.sub.aCe.sub.b).sub.3Al.sub.5O.sub.12  (I)
wherein a and b satisfy 0≤a≤0.3 and 0≤b≤0.022.

A base plate containing a having a top and a bottom and comprising a beryllium oxide composition containing at least 95 wt % beryllium oxide and optionally fluorine/fluoride ion. The base plate demonstrates a clamping pressure of at least 133 kPa at a temperature of at least 600° C. and a bulk resistivity greater than 1×10.sup.5 ohm-m at 800° C.

An electrolyte according to the present disclosure contains a lithium composite metal oxide represented by the following compositional formula.
Li.sub.7-xLa.sub.3(Zr.sub.2-xA.sub.x)O.sub.12-yF.sub.y
In the formula, 0.1≤x≤1.0, 0.0<y≤1.0, and A represents two or more types of Ta, Nb, and Sb.

A method is disclosed for forming a blended phosphor composition. The method includes the steps of firing precursor compositions that include europium and nitrides of at least calcium, strontium and aluminum, in a refractory metal crucible and in the presence of a gas that precludes the formation of nitride compositions between the nitride starting materials and the refractory metal that forms the crucible. The resulting compositions can include phosphors that convert frequencies in the blue portion of the visible spectrum into frequencies in the red portion of the visible spectrum.

Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.

A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.

Electrostatic chucks and methods of forming electrostatic chucks are disclosed. Exemplary electrostatic chucks include a ceramic body, a device embedded within the ceramic body, and an interface layer formed overlying the device. Exemplary methods include providing ceramic precursor material within a mold, providing a device, coating the device with an interface material to form a coated device, placing the coated device on or within the ceramic precursor material, and sintering the ceramic precursor material to form the electrostatic chuck and an interface layer between the device and ceramic material formed during the step of sintering.