This invention relates to an anionic-cationic-nonionic surfactant as substantially represented by the formula (I), production and use thereof in tertiary oil recovery. The anionic-cationic-nonionic surfactant of this invention exhibits significantly improved interfacial activity and stability as compared with the prior art. With the present anionic-cationic-nonionic surfactant, a flooding fluid composition for tertiary oil recovery with improved oil displacement efficiency and oil washing capability as compared with the prior art could be produced. ##STR00001## In the formula (I), each group is as defined in the specification.

A compound is represented by Formula 1 below:

##STR00001##

wherein R.sub.1 to R.sub.4 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a fluoro-substituted alkyl group having 1 to 6 carbon atoms, or a fluorine atom, wherein at least one among R.sub.1 to R.sub.4 is a fluorine atom, A is a divalent linking group, M.sub.1 and M.sub.2 are each independently potassium or sodium, and n and m are each independently an integer of 1 to 10.

A compound is represented by Formula 1 below:

##STR00001##

wherein R.sub.1 to R.sub.4 are each independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a fluoro-substituted alkyl group having 1 to 6 carbon atoms, or a fluorine atom, wherein at least one among R.sub.1 to R.sub.4 is a fluorine atom, A is a divalent linking group, M.sub.1 and M.sub.2 are each independently potassium or sodium, and n and m are each independently an integer of 1 to 10.

The present invention relates to sulfatized esteramines obtainable by a process comprising step a), wherein at least one alcohol containing at least two hydroxy groups (compound (A)) is reacted with at least one lactam (compound (B)) and with sulfuric acid (compound (C)). The present invention also relates to a process for preparing such sulfatized esteramines.

The present invention relates to sulfatized esteramines obtainable by a process comprising step a), wherein at least one alcohol containing at least two hydroxy groups (compound (A)) is reacted with at least one lactam (compound (B)) and with sulfuric acid (compound (C)). The present invention also relates to a process for preparing such sulfatized esteramines.

A sulfonic acid or carboxylic acid containing a carbonyl group, or a salt thereof represented by the following formula:
R.sup.1—C(═O)—(CR.sup.2.sub.2).sub.n—(OR.sup.3).sub.p—(CR.sup.4.sub.2).sub.q-L-A
wherein R.sup.1, R.sup.2, R.sup.3, R.sup.4, n, p, q, A and L are as defined herein.

A sulfonic acid or carboxylic acid containing a carbonyl group, or a salt thereof represented by the following formula:
R.sup.1—C(═O)—(CR.sup.2.sub.2).sub.n—(OR.sup.3).sub.p—(CR.sup.4.sub.2).sub.q-L-A
wherein R.sup.1, R.sup.2, R.sup.3, R.sup.4, n, p, q, A and L are as defined herein.

A salt represented by formula (I): ##STR00001## In formula (I), R.sup.1, R.sup.2, R.sup.3 and R.sup.4 each independently represent a halogen atom or a perfluoroalkyl group having 1 to 6 carbon atoms, R.sup.5, R.sup.6 and R.sup.7 each independently represent a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 12 carbon atoms, and —CH.sub.2— included in the alkyl group may be replaced by —O— or —CO—, m5 represents an integer of 0 to 3, m6 represents an integer of 0 to 3, m7 represents an integer of 0 to 3, R.sup.8 and R.sup.9 each independently represent a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, and —CH.sub.2— included in the alkyl group may be replaced by —O— or —CO—, and Al.sup.− represents an organic anion.

Novel photoacid generator compounds are provided. Compositions that include the novel photoacid generator compounds are also provided. The present disclosure further provides methods of making and using the photoacid generator compounds and compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.

Novel photoacid generator compounds are provided. Compositions that include the novel photoacid generator compounds are also provided. The present disclosure further provides methods of making and using the photoacid generator compounds and compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.