This system or process has managed to produce unique parts in order to universalise the process so that in this way we can simplify the construction processes to only manufacture of a few products, so that our house models or other models can be obtained, with one and two storeys.

This simplification in the manufacturing process results in a simplification of the infrastructure of our installed plant capacity.

Load distribution structures are provided for a raised floor tile(s) of a raised floor data center. The load distribution structure, which resides adjacent to an opening in the raised floor tile(s), such as a cutout in the raised floor tile(s), to facilitate supporting a frame load, includes a frame load distributor and an edging bracket. The frame load distributor resides on the raised floor tile adjacent to the opening in the raised floor tile(s), and distributes, at least in part, the frame load on the raised floor tile(s). The edging bracket couples to the frame load distributor to, at least in part, hold the frame load distributor in fixed position on the raised floor tile(s). The edging bracket extends, at least in part, into the opening in the raised floor tile to secure the frame load distributor in fixed position relative to the opening in the raised floor tile(s).

A free access floor structure to install a manufacturing apparatus such as a semiconductor manufacturing apparatus, in a short time, and a manufacturing apparatus and a carrier apparatus adapted for the floor structure. An embodiment of the manufacturing apparatus includes an apparatus-side connector which is provided, facing downward, to a bottom plate of a manufacturing apparatus. A floor structure of an embodiment includes a floor plate to be worked into a floor surface. The floor structure includes a floor-side connector which is provided, facing upward, to the floor plate so as to be connected with the apparatus-side connector according to a lowering operation of the manufacturing apparatus. An installation step (mounting step, piping/wiring step) of the manufacturing apparatus may thereby be performed in one step. As a result, the labor and the time required to install the manufacturing apparatus may be saved.

The invention relates to a raised ventilation flooring structure (105,106) comprising a first and a second transverse support beam (107,108) extending substantially parallel in a transverse direction T at a predetermined mutual distance W.

The support beams (107, 108) are interconnected via connection profiles (109, 110) to form a grid structure. Carrier profiles with side walls having a number of apertures, are supported with their ends on the support beams (107, 108). A panel with a closed surface is supported on each carrier profile with side edges of adjacent panels being spaced apart to form a ventilation gap (55).

The support beams (107, 108) form elongate collection members that extends along and/or below the side walls of the carrier profiles in the length direction L, below the ventilation gap, to form collection channels (70,100).

An air flow path extends from a space between the side walls of the carrier profiles (50,51), via the apertures (42,44) to the collection channel (70,100) and to the ventilation gap (55) between the adjacent panels (46,48).

A processing facility for manufacturing integrated circuits on semiconductor wafers is provided with at least one radiation generator that generates an EUV (extreme ultraviolet) radiation that is supplied to at least one lithography machine, housed in a factory building, for exposure of the semiconductor wafers. The radiation generator is housed in a building or a building section separate from the factory building. At least one beam guide extends from the building or the building section to the factory building, wherein the EUV radiation is supplied from the building or the building section through the at least one beam guide to the factory building. At least one supply line branches off at an obtuse angle from the at least one beam guide inside the factory building, wherein at least a portion of the EUV radiation is supplied through the at least one supply line to the lithography machine.

An elevated flooring system includes floor modules each having first and second module surfaces and module ribs. First module surfaces may be solid or include holes for drainage. Module ribs provide structural support and define at least one module receiving space accessible from the second module surface. Block(s) include extensions protruding from a first block surface and are dimensioned to fit within a corresponding module receiving space. Each block includes block ribs providing support and defining at least one block receiving space accessible from a second block surface. Interfacing member(s) include a body correspondingly dimensioned to fit within a block receiving space and leg(s) extending from the body and dimensioned to fit within a hole on a first module surface. Floor modules may be joined adjacently and interfacing members, blocks and floor modules are stackable to provide a modular and customizable flooring system of different and varying heights.

Load distribution structures are provided for a raised floor tile(s) of a raised floor data center. The load distribution structure, which resides adjacent to an opening in the raised floor tile(s), such as a cutout in the raised floor tile(s), to facilitate supporting a frame load, includes a frame load distributor and an edging bracket. The frame load distributor resides on the raised floor tile adjacent to the opening in the raised floor tile(s), and distributes, at least in part, the frame load on the raised floor tile(s). The edging bracket couples to the frame load distributor to, at least in part, hold the frame load distributor in fixed position on the raised floor tile(s). The edging bracket extends, at least in part, into the opening in the raised floor tile to secure the frame load distributor in fixed position relative to the opening in the raised floor tile(s).

A wall cladding panel comprising a substantially planar front face, a rear face comprising a plurality of drainage channels and a plurality of spacer sections disposed between the drainage channels, and an edge member disposed contiguously between the front face and the rear face. The wall cladding panel is locally thinner at the drainage channels than at the spacer sections. Each drainage channel is configured to form a liquid flow path and/or an air gap when a substantially planar building surface is placed adjacent to the rear face. A plurality of wall cladding panels with drainage channels may be arranged in series to cover at least a portion of a building.

Load distribution structures are provided for a raised floor tile(s) of a raised floor data center. The load distribution structure, which resides adjacent to an opening in the raised floor tile(s), such as a cutout in the raised floor tile(s), to facilitate supporting a frame load, includes a frame load distributor and an edging bracket. The frame load distributor resides on the raised floor tile adjacent to the opening in the raised floor tile(s), and distributes, at least in part, the frame load on the raised floor tile(s). The edging bracket couples to the frame load distributor to, at least in part, hold the frame load distributor in fixed position on the raised floor tile(s). The edging bracket extends, at least in part, into the opening in the raised floor tile to secure the frame load distributor in fixed position relative to the opening in the raised floor tile(s).

Load distribution structures are provided for a raised floor tile(s) of a raised floor data center. The load distribution structure, which resides adjacent to an opening in the raised floor tile(s), such as a cutout in the raised floor tile(s), to facilitate supporting a frame load, includes a frame load distributor and an edging bracket. The frame load distributor resides on the raised floor tile adjacent to the opening in the raised floor tile(s), and distributes, at least in part, the frame load on the raised floor tile(s). The edging bracket couples to the frame load distributor to, at least in part, hold the frame load distributor in fixed position on the raised floor tile(s). The edging bracket extends, at least in part, into the opening in the raised floor tile to secure the frame load distributor in fixed position relative to the opening in the raised floor tile(s).