A thermal energy storage system comprising a working fluid to store and transfer thermal energy between a heat source and a thermal load and a vessel to store the working fluid. The vessel has an interior region and a floating separator piston in the interior region to separate a hot portion from a cold portion of the working fluid. There is a first manifold thermally coupled to an output of the heat source and to an input of the thermal load and fluidly coupled to the interior region of the vessel and a second manifold thermally coupled to an input of the heat source and an output of the thermal load and fluidly coupled to the interior region of the vessel. There is a controller configured to maintain the working fluid in a liquid state.

An axial piston machine has a displacement volume that is adjustable by a double-acting control cylinder, which is connected to an auxiliary pump via a fluid flow path that includes a first, a second, and a third control assembly. The transfer point is the point of the fluid flow path at which the plate-like housing part contacts the pot-like housing part. The receiving bore of the first, second, and third control assemblies are each arranged directly in the pot-like housing part. The part of the fluid flow path which is arranged downstream of the transfer point extends over its entire length directly in the pot-like housing part.

A method for forming a pellicle for an extreme ultraviolet lithography is provided. The method includes forming a pellicle membrane over a filter membrane and transferring the pellicle membrane from the filter membrane to a membrane border. Forming the pellicle membrane includes growing carbon nanotubes (CNTs) from in-situ formed metal catalyst particles in a first reaction zone of a reactor, each of the CNTs including a metal catalyst particle at a growing tip thereof, promoting formation of bundles of nanotubes from the individual CNTs in a second zone of the reactor downstream of the first reaction zone. The bundled CNTs are then collected on the filter membrane.

A hydrostatic radial piston unit of the cam-lobe type of construction including a shaft defining a rotational axis of the hydrostatic radial piston unit. The shaft extends with a front end region from a non-rotary, stationary rear casing to a front casing. Within the front casing a cylinder block is housed and fixed in a torque-proof connection to the front end region of the shaft. In the cylinder block radially reciprocating working pistons are disposed in radially oriented cylinder bores to and from which cylinder bores hydraulic fluid can be conducted by means of a distributor. The distributor is arranged rotationally fixed with respect to the front casing and rotationally free relative to the shaft. A circumferential cam-lobe surface with which the working pistons can interact, is formed integrally with the front casing on its radial inner side.