A piezoelectric driving device includes a vibrating plate, a first electrode, a piezoelectric layer, a second electrode layer provided above the vibrating plate. An active section is formed in a portion where the first electrode layer, the piezoelectric layer, and the second electrode layer overlap one another. The active section has a longitudinal direction and a latitudinal direction in plan view. At both ends in the latitudinal direction, ends of the first electrode layer are disposed in the same positions as ends of the wiring layer or further on the outer side than the ends, ends of the second electrode layer are disposed in the same positions as the ends of the wiring layer or further on the inner side than the ends, and the ends of the first electrode layer are disposed further on the outer side than the ends of the second electrode layer.

A fluid control device includes a piezoelectric pump, an inhaler, and a valve. The piezoelectric pump has a gas suction hole and a gas discharge hole. The inhaler has a container, an inhalation port, and a connection hole. The valve has a first ventilation hole, a second ventilation hole, a third ventilation hole, a first valve housing, a second valve housing, and a valve body. The first ventilation hole of the valve is connected to the connection hole of the inhaler. The second ventilation hole of the valve is connected to the suction hole of the piezoelectric pump. The third ventilation hole of the valve is opened to the atmosphere. The valve body is held between the first valve housing and the second valve housing, and configures a first region and a second region.

A piezoelectric cooling chamber and method for providing the cooling system are described. The cooling chamber includes a piezoelectric cooling element, an array of orifices and a valve. A vibrational motion of the piezoelectric cooling element causes an increase or decrease in a chamber volume as the piezoelectric cooling element is deformed. The array of orifices is distributed on at least one surface of the chamber. The orifices allow escape of fluid from within the chamber during the decrease in the chamber volume in response to the vibration of the piezoelectric element. The valve is configured to admit fluid into the chamber when the chamber volume increases and to substantially prevent fluid from exiting the chamber through the valve when the chamber volume decreases.

A cooling system and method for using the cooling system are described. The cooling system includes a plurality of individual piezoelectric cooling elements spatially arranged in an array extending in at least two dimensions, a communications interface and driving circuitry. The communications interface is associated with the individual piezoelectric cooling elements such that selected individual piezoelectric cooling elements within the array can be activated based at least in part on heat energy generated in the vicinity of the selected individual piezoelectric cooling elements. The driving circuitry is associated with the individual piezoelectric cooling elements and is configured to drive the selected individual piezoelectric cooling elements.

A piezoelectric cooling system and method for driving the cooling system are described. The piezoelectric cooling system includes a first piezoelectric cooling element and a second piezoelectric cooling element. The first piezoelectric cooling element is configured to direct a fluid toward a surface of a heat-generating structure. The second piezoelectric cooling element is configured to direct the fluid to an outlet area after heat has been transferred to the fluid by the heat-generating structure.

A cooling system and method for using the cooling system are described. The cooling system includes an array of cooling elements and a controller. The array of cooling elements corresponds to regions of the heat-generating structure where heat is generated in response to operation of the semiconductor. The controller is configured to activate portions of the array of cooling elements based on a determination that operation of the heat-generating structure is likely to generate heat in a given region of the heat-generating structure.

An active cooling system and method for using the active cooling system are described. The active cooling system includes a cooling element having a first side and a second side. The first side of the cooling element is distal to a heat-generating structure and in communication with a fluid. The second side of the cooling element is proximal to the heat-generating structure. The cooling element is configured to direct the fluid using a vibrational motion from the first side of the cooling element to the second side such that the fluid moves in a direction that is incident on a surface of the heat-generating structure at a substantially perpendicular angle and then is deflected to move along the surface of the heat-generating structure to extract heat from the heat-generating structure.

A system for cooling a mobile phone and method for using the system are described. The system includes an active piezoelectric cooling system, a controller and an interface. The active piezoelectric cooling system is configured to be disposed in a rear portion of the mobile phone distal from a front screen of the mobile phone. The controller is configured to activate the active piezoelectric cooling system in response to heat generated by heat-generating structures of the mobile phone. The interface is configured to receive power from a mobile phone power source when the active piezoelectric cooling system is activated.

A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

A peristaltic pump comprises a tube to transport a material in a transport direction and one or more piezoelements, which are configured to cause a squeezing of the tube. Furthermore, a method of transporting material comprises the step of successively actuating the piezoelements along the transport direction of the material and thereby causing a squeezing of the tube.