A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.

In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.

An electrochemical system includes a hydrogen diffusion barrier physically separating the system into a hydrogen rich zone and a hydrogen poor zone, an electronic component located in the hydrogen poor zone and exposed to hydrogen diffusing from the hydrogen rich zone, a hydrogen pump, located in the hydrogen rich zone and the hydrogen poor zone, including: a cathode, an anode, an electrolyte separating the cathode and the anode, an anode encapsulation contacting the anode and a portion of the electrolyte, and an external electrical circuit biased to drive H+ current from the anode to the cathode to pump hydrogen diffusing from the hydrogen rich zone into the hydrogen poor zone back into the hydrogen rich zone.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.

An apparatus for forming a vacuum in a sealed enclosure through an electrochemical reaction includes an electrochemical cell comprising a cathode and an anode supported on a solid electrolyte. The solid electrolyte is a Li-ion non-volatile electrolyte containing a dissolved metal salt. The cathode is constructed of a material with which lithium is known to form alloys. The anode is constructed of a lithium-ion containing material. The cell is operable to expose lithium metal on the cathode.

An apparatus for forming a vacuum in a sealed enclosure through an electrochemical reaction includes an electrochemical cell comprising a cathode and an anode supported on a solid electrolyte. The solid electrolyte is a Li-ion non-volatile electrolyte containing a dissolved metal salt. The cathode is constructed of a material with which lithium is known to form alloys. The anode is constructed of a lithium-ion containing material. The cell is operable to expose lithium metal on the cathode.