A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.

A pump station arrangement for removing harmful fluids from wastewater and a method for removing harmful fluids from wastewater in such a pump station arrangement. The pump station arrangement includes a pre-chamber, a pump sump, a recirculation channel extending from the pump sump to the pre-chamber, and a gas sensor arranged in the pump sump and configured to measure the content of harmful fluids in the form of gas in the pump sump. The pump station arrangement is configured to recirculate the wastewater via the recirculation channel from the pump sump to the pre-chamber if the measured content of harmful fluids in the form of gas in the pump sump exceed a predetermined value. Also disclosed is.

This compressor system is provided with: a driving machine having a rotary-driven first output shaft and a second shaft that is rotary driven so as to reach the same speed as the first output shaft; a working-fluid-compressing first compressor to which the rotation of the first output shaft is transmitted; a working-fluid-compressing second compressor to which the rotation of the second output shaft is transmitted; a variable-speed step-up gear for increasing the speed of the first output shaft and transmitting the increased speed to the first compressor, said step-up gear being capable of varying the increased speed; and a constant-speed step-up gear for increasing the speed of the second output shaft and transmitting the increased speed to the second compressor, said step-up gear keeping the increased speed constant.

There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.

The subject matter described herein relates to a spin pump that includes a combination of a compressor and a vacuum pump on respective pistons extending from a common crankshaft in a rotating housing. Related methods, apparatuses, systems, techniques and articles are also described.

The subject matter described herein relates to a spin pump that includes a combination of a compressor and a vacuum pump on respective pistons extending from a common crankshaft in a rotating housing. Related methods, apparatuses, systems, techniques and articles are also described.

A tire inflation apparatuses is provided for maintaining a predetermined inflation pressure of a pair of tires mounted on a dual wheel unit of a vehicle. The apparatus includes a first and a second pump unit that are connected to a housing that includes a mounting structure for engaging a complementary mounting structure of the dual wheel unit. The first and second pump include first and second pump rods configured to translate in response to rotation of the dual wheel unit. A gearset and an eccentric drive mechanism are arranged to reciprocate the first and second pump rods.

A tire inflation apparatuses is provided for maintaining a predetermined inflation pressure of a pair of tires mounted on a dual wheel unit of a vehicle. The apparatus includes a first and a second pump unit that are connected to a housing that includes a mounting structure for engaging a complementary mounting structure of the dual wheel unit. The first and second pump include first and second pump rods configured to translate in response to rotation of the dual wheel unit. A gearset and an eccentric drive mechanism are arranged to reciprocate the first and second pump rods.

A compressor includes a shell assembly and a compression mechanism disposed within the shell assembly. The shell assembly includes first and second end caps. A suction chamber is disposed within the shell assembly between the first end cap and the second end cap. A discharge chamber and oil sump may be disposed within the shell assembly. The shell assembly includes at least one suction opening into the suction chamber. A distributor is in communication with one of the suction openings. Plugs may sealingly engage another one of the suction openings. The distributor includes an inlet path and first and second outlet paths. A suction line is coupled to the inlet path. The suction line includes at least first and second portions. A first plane bisecting the second portion along a length of the second portion is perpendicular to a second plane that bisects the first and second outlet paths.

A multistage compressor including: at least a first compressor main body and a second compressor main body configured to suck compressed gas discharged from the first compressor main body to discharge the compressed gas with higher pressure; a first driving source configured to drive the first compressor main body; a second driving source configured to drive the second compressor main body; an intermediate pipe configured to connect a discharge side of the first compressor main body and a suction side of the second compressor main body; a low-pressure side discharge piping system branched from the intermediate pipe; an on-off valve disposed in the low-pressure side discharge piping system and configured to switch permission and prohibition of a flow of compressed gas discharged from the first compressor main body; and a control unit configured to control driving of the first driving source and the second driving source.