Modular mechanically driven diaphragm pump features are presented herein. Such a diaphragm pump can include a motor, a drive mechanism, and a coupling mounted on a wheeled frame. A diaphragm pump can be mounted to the coupling by forming mechanical static and dynamic connections to brace a housing of the diaphragm pump relative to a drive rod which is moved by the drive mechanism to operate the pump. These mechanical static and dynamic connections can be broken to dismount the pump for replacement or servicing. In some cases, a gas charge can be introduced on the non-working fluid side of the diaphragm to boost performance and/or a dampener can be integrated into the housing of the diaphragm pump and mounted/dismounted with the diaphragm pump.

A fluid control device includes a fluid conveying element formed by a pump and a valve, and an outer housing containing the fluid conveying element. The outer housing includes a first outer wall forming an internal space closer to the pump, and a second outer wall forming an internal space closer to the valve. The second outer wall includes an outer-wall main plate having a part overlapping, in plan view, a through hole that is a discharge hole of the valve. A thermal conductivity of the part of the outer-wall main plate overlapping the discharge hole is higher than a thermal conductivity of the first outer wall.

A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

Discloses is a micro-pump that includes a pump body having a compartmentalized pump chamber, with plural inlet and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body. Also discloses are applications of the micro-pump including as a heat remover and a self-contained continuous positive airway pressure breathing device.

A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.

A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.

A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows, the first channel and the second channel are placed in series, as seen from the stacking direction, the first pressing part overlaps the second pressing part, and a buffer chamber holding the fluid is provided between the first channel and the second channel.

A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows, the first channel and the second channel are placed in series, as seen from the stacking direction, the first pressing part overlaps the second pressing part, and a buffer chamber holding the fluid is provided between the first channel and the second channel.

A high-pressure compressor and a system with a high-pressure compressor are described. I one example, the high-pressure compressor has a housing that surrounds at least one compressor chamber and a media chamber, wherein the compressor chamber and the media chamber are separated from one another in the housing via a diaphragm. The housing has at least one first connection, which opens into the media chamber and via which a medium can be introduced into and/or discharged from the media chamber. The housing has at least one second connection, which opens into the compressor chamber and via which a gas or gas mixture can be introduced and/or discharged. The diaphragm comprises a polymer -based material and is deformable to compress a gas or gas mixture that can be introduced into the compressor chamber by introducing a medium into the media chamber.