Patent classifications
F04C19/001
Abatement system
Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
Pump assembly and method for evacuating a vapor-filled chamber
The invention relates to an assembly comprising a vacuum pump and a chamber, wherein a suction tract extends between the chamber and the vacuum pump. The vacuum pump is a liquid ring machine. According to the invention, a liquid outlet is arranged in the suction tract in order to add liquid to gas sucked in from the chamber. The invention further relates to a method for evacuating a chamber filled with vapor. According to the invention, the vapor is condensed by introducing additional liquid into the suction tract, thus by co-condensation. By supplying liquid selectively only when liquid is required for the condensation of the vapor, water is saved.
ABATEMENT SYSTEM
Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
ABATEMENT SYSTEM
Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.
APPARATUS FOR EVACUATING A CORROSIVE EFFLUENT GAS STREAM FROM A PROCESSING CHAMBER
Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.
Control of operating liquid flow into a liquid ring pump
A control system comprising: a suction line; an exhaust line; an operating liquid line; a liquid ring pump coupled to the suction, exhaust, and operating liquid lines; a regulating device configured to control flow of operating liquid into the liquid ring pump; a pressure sensor configured to measure a pressure of an input fluid to the liquid ring pump via the suction line; a first temperature sensor configured to measure temperature of an exhaust fluid output by the liquid ring pump via the exhaust line; a second temperature sensor configured to measure temperature of an operating liquid received by the liquid ring pump via the operating liquid line; and a controller configured to: using the sensor measurements control the one or more regulating devices.
IMPELLER-TYPE LIQUID RING COMPRESSOR
An impeller-type liquid ring compressor having a particular bearing configuration. Such a bearing arrangement may completely support the impeller as it rotates, eliminating many of the problems inherent in the prior art designs without changing the general overhung impeller design. This may allow the impeller-type liquid ring compressor to be easily retrofitted in existing use environments, such as, for example, oil and gas processing facilities, oil refineries, and petrochemical processing facilities. In some exemplary embodiments, a thrust bearing may be located on the front face of the impeller, or radial bearings may be disposed between the vanes of the impeller. A radial bearing and thrust bearing may further be disposed on the shaft side of the impeller close to the impeller itself. The compressor may be configured so that the process fluid carries heat away from each of these bearings.
Fuel system with liquid ring pump with centrifugal air/fuel separator
A fuel system incorporating a boost pump unit, a boost pump unit and method of pumping fuel are provided. The fuel system and boost pump unit are preferably self-priming and do not utilize an airframe mounted pump for supplying fuel for an aircraft combustor. The boost pump unit includes a liquid ring pump and an air/fuel separator. The air/fuel separator has an inlet and first and second outlet ports. The inlet is operably fluidly coupled to an outlet of the liquid ring pump. The air/fuel separator has an arcuate flow path. The first outlet port is in fluid communication with a radially outer portion of the arcuate flow path and the second outlet port is in fluid communication with a radially inner portion of the arcuate flow path. A return line connected to the first outlet port is configured to return fuel to the liquid ring pump.