The present invention provides a method for cleaning a component for use in an ultra-high vacuum. The method may comprise the steps of placing the component to be cleaned in a vacuum furnace chamber; plasma cleaning the component at a temperature of greater than about 80° C.; and evacuating the chamber to a pressure of less than about 10E-5 mbar. Apparatus for performing such methods and kits comprising said components are also provided.

A leak detector is provided for leak-testing objects that are to be tested by spraying tracer gas, the leak detector including: a detection inlet configured to be connected to an object that is to be tested; a pumping device including a vacuum line connected to the detection inlet, a rough-vacuum pump connected to the vacuum line, and a turbomolecular vacuum pump connected to the vacuum line, a delivery of which is connected to the rough-vacuum pump; and a gas detector connected to the turbomolecular vacuum pump, the pumping device further including an ancillary pump connected to the rough-vacuum pump and being configured to lower an ultimate-vacuum pressure of tracer gas in the rough-vacuum pump. A leak detection method for leak-testing objects that are to be tested by spraying tracer gas is also provided.

A leak detector is provided for leak-testing objects that are to be tested by spraying tracer gas, the leak detector including: a detection inlet configured to be connected to an object that is to be tested; a pumping device including a vacuum line connected to the detection inlet, a rough-vacuum pump connected to the vacuum line, and a turbomolecular vacuum pump connected to the vacuum line, a delivery of which is connected to the rough-vacuum pump; and a gas detector connected to the turbomolecular vacuum pump, the pumping device further including an ancillary pump connected to the rough-vacuum pump and being configured to lower an ultimate-vacuum pressure of tracer gas in the rough-vacuum pump. A leak detection method for leak-testing objects that are to be tested by spraying tracer gas is also provided.

A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.

A module for a vacuum pumping and/or abatement system. The module comprises a frame defining a space, a plurality of facilities inputs configured to receive facilities from a facilities supply, a plurality of facilities outputs configured to output the received facilities out of the module, and a plurality of facilities connection lines located at least partially within the space defined by the frame. The plurality of facilities connection lines connect the facilities inputs to the facilities outputs. The module further comprises a controller configured to control supply of facilities received at the facilities inputs out of the facilities outputs; and control operation of one or more vacuum pumping and/or abatement apparatuses remote from the module.

A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

A sensor assembly for use in an apparatus comprising at least one moving part and at least one stationary part is provided. The assembly comprises a probe and means for mounting the sensor to a stationary part of the apparatus. The probe comprises a portion of an incomplete circuit which, when completed, produces a signal. In use, when the probe is engaged by a moving part of the apparatus, a signal is produced. A vacuum pump or a compressor pump comprising the sensor and a method for preventing failure of an apparatus are also provided.

A sensor assembly for use in an apparatus comprising at least one moving part and at least one stationary part is provided. The assembly comprises a probe and means for mounting the sensor to a stationary part of the apparatus. The probe comprises a portion of an incomplete circuit which, when completed, produces a signal. In use, when the probe is engaged by a moving part of the apparatus, a signal is produced. A vacuum pump or a compressor pump comprising the sensor and a method for preventing failure of an apparatus are also provided.

An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.