A multi-stage vacuum pump comprising a stator defining multiple pumping chambers is discussed. The stator comprises a plurality of transfer channels for providing a fluid passage from an outlet port of one of the plurality of pumping chambers to an inlet port of a subsequent pumping chamber. Some of the transfer channels comprise two side channel sections on opposing sides of the stator. One of the transfer channels comprises a single side channel section on one side of the stator. The vacuum pump further comprises a gas ballast inlet channel arranged on an other side of the stator to the one side of the stator.

An enclosure system may be formed of a lightweight panel with a thin non-porous membrane that enables the extraction and leak detection of hazardous gases from housing equipment such as vacuum pumps, valves, abatement equipment and the like. Additionally, the enclosure system includes a one or multiple layers of wire mesh which prevent projectiles with a high kinetic energy from escaping from the housing equipment thereby minimising the risk of an explosion causing parts or panels to be ejected from the enclosure system.

An enclosure system may be formed of a lightweight panel with a thin non-porous membrane that enables the extraction and leak detection of hazardous gases from housing equipment such as vacuum pumps, valves, abatement equipment and the like. Additionally, the enclosure system includes a one or multiple layers of wire mesh which prevent projectiles with a high kinetic energy from escaping from the housing equipment thereby minimising the risk of an explosion causing parts or panels to be ejected from the enclosure system.

A control system comprising: a suction line; an exhaust line; an operating liquid line; a liquid ring pump comprising a suction input coupled to the suction line, an exhaust output coupled to the exhaust line, and a liquid input coupled to the operating liquid line; a motor configured to drive the liquid ring pump; a first sensor configured to measure a first parameter of an exhaust fluid of the liquid ring pump; a second sensor configured to measure a second parameter of a gas being received by the liquid ring pump via the suction line; and a controller operatively coupled to the first sensor, the second sensor, and the motor, and configured to control the motor based on sensor measurements of the first sensor and the second sensor.

A control system comprising: a suction line; an exhaust line; an operating liquid line; a liquid ring pump comprising a suction input coupled to the suction line, an exhaust output coupled to the exhaust line, and a liquid input coupled to the operating liquid line; a motor configured to drive the liquid ring pump; a first sensor configured to measure a first parameter of an exhaust fluid of the liquid ring pump; a second sensor configured to measure a second parameter of a gas being received by the liquid ring pump via the suction line; and a controller operatively coupled to the first sensor, the second sensor, and the motor, and configured to control the motor based on sensor measurements of the first sensor and the second sensor.

A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.

A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.

A system is provided for generating vacuum in a vehicle. The system includes a vacuum pump, an engagement clutch, an actuator, and a torque limiting clutch. The engagement clutch operatively connects a camshaft to the rotor. The actuator controls the clutch. The actuator is movable, based on air pressure in a vacuum conduit, between a low-pressure position in which the actuator causes the clutch to operatively disconnect the camshaft from the rotor, and a high-pressure position in which the actuator causes the clutch to operatively connect the camshaft to the rotor. The torque limiting clutch limits torque transfer to the rotor when the engagement clutch operatively connects the camshaft to the rotor. The system also provides control for hysteresis.

A system is provided for generating vacuum in a vehicle. The system includes a vacuum pump, an engagement clutch, an actuator, and a torque limiting clutch. The engagement clutch operatively connects a camshaft to the rotor. The actuator controls the clutch. The actuator is movable, based on air pressure in a vacuum conduit, between a low-pressure position in which the actuator causes the clutch to operatively disconnect the camshaft from the rotor, and a high-pressure position in which the actuator causes the clutch to operatively connect the camshaft to the rotor. The torque limiting clutch limits torque transfer to the rotor when the engagement clutch operatively connects the camshaft to the rotor. The system also provides control for hysteresis.

The present invention concerns a dry vacuum pump comprising: a drive device (1) comprising a drive shaft (3) at one end of which is fixed at least one drive wheel (4) provided to set in motion at least one belt (5); at least two parallel rotors (7, 8) each having a shaft (9, 10) provided with a rotor element (11, 12), this shaft (9, 10) being able to be driven in rotation by the belt (5) and being equipped at one of its axial ends with a toothed wheel (13, 14), this pump having the special features that: the drive wheel (4) and the belt (5) are smooth; each shaft (9, 10) of the rotor (7, 8) comprises at least one smooth section (16, 17) arranged to co-operate with the belt (5), and the toothed wheels (13, 14) of the shafts (9, 10) of the rotor (7, 8) are dimensioned and arranged to mesh with one another.