An electric compressor system for a vehicle includes: an electric motor having a rotor and a motor shaft which selectively rotate in a first rotation direction or a second rotation direction; an external rotation shaft extending from the motor shaft of the electric motor; a first compressor unit connected to the external rotation shaft and selectively compressing a first fluid according to the rotation direction of the external rotation shaft; and a second compressor unit connected to the external rotation shaft and selectively compressing a second fluid according to the rotation direction of the external rotation shaft, wherein the first compressor unit and the second compressor unit are sequentially arranged on the external rotation shaft, the first compressor unit is fluidly connected to a first fluid system, and the second compressor unit is fluidly connected to a second fluid system.

A pumping method in a pumping system comprises: a main vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the pumping system, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary vacuum pump connected in parallel to the non-return valve. The main vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port, simultaneously the auxiliary vacuum pump is activated and continues to operate all the while that the main vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main vacuum pump maintains a defined pressure in the vacuum chamber. Also included is a pumping system.

A pumping method in a pumping system comprises: a main vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the pumping system, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary vacuum pump connected in parallel to the non-return valve. The main vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port, simultaneously the auxiliary vacuum pump is activated and continues to operate all the while that the main vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main vacuum pump maintains a defined pressure in the vacuum chamber. Also included is a pumping system.

A vacuum pumping arrangement comprises a first pump which has a first inlet and a first outlet. The first inlet is fluidly connected to a first common pumping line. The first common pumping line includes a plurality of first pumping line inlets each of which is fluidly connectable to a least one process chamber within a group of process chambers that form a semiconductor fabrication tool. The vacuum pumping arrangement also includes a reserve pump which has a reserve inlet and a reserve outlet. The reserve inlet is selectively fluidly connectable to each process chamber within the group of process chambers that form the semiconductor fabrication tool. The vacuum pumping arrangement additionally includes a controller which is configured to selectively fluidly isolate the pump from one or more given process chambers and selectively fluidly connect the reserve pump with the said one or more given process chambers.

A method is provided for controlling and/or monitoring a compressor system comprising several components, namely one or more compressors, one or more peripheral devices, and also a control/monitoring unit, wherein the compressors and peripheral devices are arranged or connected in a certain configuration. The method distinguishes itself in that (a) in a measured-value-capture step, measured values are captured within the compressor system or the components; (b) in an allocation step, context information is allocated to the measured value or measured values in advance, simultaneously, or after the measured-value capture, in order to standardize the measured values; and (c) in an evaluation step, the measured value or measured values standardized by the context information are used in a control, monitoring, diagnostics, or evaluation routine.

A method is provided for controlling and/or monitoring a compressor system comprising several components, namely one or more compressors, one or more peripheral devices, and also a control/monitoring unit, wherein the compressors and peripheral devices are arranged or connected in a certain configuration. The method distinguishes itself in that (a) in a measured-value-capture step, measured values are captured within the compressor system or the components; (b) in an allocation step, context information is allocated to the measured value or measured values in advance, simultaneously, or after the measured-value capture, in order to standardize the measured values; and (c) in an evaluation step, the measured value or measured values standardized by the context information are used in a control, monitoring, diagnostics, or evaluation routine.

An oil-injected multi-stage compressor system that comprises at least a low-pressure stage compressor element (2) with an inlet (4a) and an outlet (5a) and a high-pressure stage compressor element (3) with an inlet (4b) and an outlet (5b), whereby the outlet (5a) of the low-pressure stage compressor element (2) is connected to the inlet (4b) of the high-pressure stage compressor element (3) through a pipeline (6), characterized in that the compressor elements (2, 3) are provided with their own drive in the form of an electric motor (2a, 3a), whereby the compressor elements (2, 3) are connected to the electric motor (2a, 3a) either directly or through a gearbox and that an intercooler (9) is provided in the aforementioned pipeline (6) between the low-pressure stage compressor element (2) and the high-pressure stage compressor element (3).

A method for evacuating a chamber employs a pump arrangement composed of a booster pump and of a downstream forepump is connected to the chamber. The booster pump is accelerated, gas from the chamber is introduced into the booster pump, such that from the booster pump there is temporarily extracted an excess power which exceeds the power provided by the drive of the booster pump. The gas is discharged through a bypass valve while the outlet pressure of the booster pump lies above a predefined threshold value, and the gas is directed to the forepump when the outlet pressure of the booster pump has fallen below the threshold value. The gas supplied by the booster pump is compressed by means of the forepump.

A method for evacuating a chamber employs a pump arrangement composed of a booster pump and of a downstream forepump is connected to the chamber. The booster pump is accelerated, gas from the chamber is introduced into the booster pump, such that from the booster pump there is temporarily extracted an excess power which exceeds the power provided by the drive of the booster pump. The gas is discharged through a bypass valve while the outlet pressure of the booster pump lies above a predefined threshold value, and the gas is directed to the forepump when the outlet pressure of the booster pump has fallen below the threshold value. The gas supplied by the booster pump is compressed by means of the forepump.

Disclosed are a variable capacity compressor operation mode determination method and device, a variable capacity compressor and an air conditioner. The variable capacity compressor operation mode determination method includes: detecting a current value of a compressor at present as A1 before switching an operation mode of the compressor; detecting the current value of the compressor at present as A2 after switching the operation mode of the compressor and reaching a preset time; comparing A1 and A2, determining that the switching of the operation mode of the compressor is successful when a ratio relationship between A1 and A2 satisfies a preset condition, and determining that switching of the operation mode of the compressor is failed when the ratio relationship between A1 and A2 dissatisfies a preset condition.