An alignment system for a workpiece printing machine comprises a stencil support and a workpiece support, and a planarity control mechanism having at least two actuators arranged to effect relative rotation of the stencil support and workpiece support about both the horizontal axes.

A slide actuator includes a fixed member, a movable member capable of reciprocating in a predetermined direction with respect to the fixed member, a plurality of balls interposed between the fixed member and the movable member and configured to movably support the movable member, a retainer interposed between the respective balls and configured to keep an interval between the respective balls constant and reciprocate in a predetermined stroke range, a wall portion of the fixed member provided in a moving direction of the retainer, and a retainer spring configured to couple the wall portion and the retainer. The retainer spring is disposed to suppress displacement of the retainer in the moving direction. A spring constant of the retainer spring is set to a value for causing sliding friction in the balls and pushing back the retainer in a range in which the retainer moves beyond the predetermined stroke range.

The measurement apparatus includes an outer cylinder, a shaft body longitudinally movable on the inner surface side of the outer cylinder, a plurality of bearing balls disposed between an inner surface of the outer cylinder and an outer surface of the shaft body, and a measurement part that measures a relative position between the outer cylinder and the shaft body, and a first density of the bearing balls in a first area having a first length shorter than a total length of the outer cylinder in a longitudinal direction from one end of the outer cylinder is larger than a second density of the bearing balls in a second area having a second length shorter than the total length of the outer cylinder centered on a center position in the longitudinal direction of the outer cylinder.

A slide actuator includes a fixed member, a movable member capable of reciprocating in a predetermined direction with respect to the fixed member, a plurality of balls interposed between the fixed member and the movable member and configured to movably support the movable member, a retainer interposed between the respective balls and configured to keep an interval between the respective balls constant and reciprocate in a predetermined stroke range, a wall portion of the fixed member provided in a moving direction of the retainer, and a retainer spring configured to couple the wall portion and the retainer. The retainer spring is disposed to suppress displacement of the retainer in the moving direction. A spring constant of the retainer spring is set to a value for causing sliding friction in the balls and pushing back the retainer in a range in which the retainer moves beyond the predetermined stroke range.

A slide includes a carriage, a guide, and interposed pads allowing the carriage to be moved in translation in a longitudinal direction by relative sliding of the pads on contact surfaces distributed symmetrically on both sides of two planes: a horizontal plane parallel to the longitudinal direction and the transverse direction and a median plane parallel to the longitudinal direction and the vertical direction. The contact surfaces are oriented so as to form with the horizontal plane an angle between 30 and 70 inclusive.

A switch system for a moveable platform includes a track including an upper portion and a lower portion. A platform transition switch is connected within the track. The platform transition switch is configured to receive a wheel connected to a platform, and to transition the wheel between the upper portion and the lower portion.

A motion guide device is formed of: a track member including a base portion extending along a longitudinal direction, and a pair of wall portions erected from both edges of the base portion in a width direction, and having rolling element rolling grooves formed along a longitudinal direction; and a moving member which is assembled in a movable manner along the longitudinal direction between the wall portions, and to which a pair of guide members are assembled, load rolling element rolling grooves which correspond to the rolling element rolling grooves being formed in the guide members, wherein at least either one of the guide members is equipped with a biasing member on a surface of the guide member on a side opposite to a surface of the guide member on which the load rolling element rolling groove is formed.

Disclosed is an LM guide assembling method using half division, and a computer readable recording medium having a program for executing the same. The method includes: disposing an LM rail on a base; fastening a first hole and a (2.sup.n+1)-th hole; installing an angle measuring device; fastening a (2.sup.n-1+1)-th hole at step S130; respectively disposing the LM blocks on the first hole and the (2.sup.n-1+1)-th hole; disposing the auxiliary shelf on the LM blocks; setting an angle of the auxiliary shelf to a zero angle; moving the two LM blocks to be on a (2.sup.n-1+1)-th hole and a (2.sup.n+1)-th hole, and measuring an angle of the auxiliary shelf; calculating a straightness correction amount; and moving a position of the (2.sup.n-1+1)-th hole by the straightness correction amount, and fastening the hole, wherein, the steps are repeated until n becomes 1.

An assembly including an inner member; an outer member; and a bearing including a bearing sidewall including a flat portion, a first convex axial end, and a second convex axial end, where at least one of the inner member or the outer member is adapted to axially translate relative to the bearing, and where at least one of the first convex axial end or the second convex axial end is adapted to induce formation of a film on the bearing sidewall during the axial translation of at least one of the inner member or the outer member.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.