A rolling-element bearing includes an inner bearing ring and an outer bearing ring. The inner bearing ring and the outer bearing ring define an axial direction and a circumferential direction. The rolling-element bearing includes a plurality of rolling elements. The rolling elements are configured to roll circumferentially between the inner bearing ring and the outer bearing ring. The rolling-element bearing includes at least one oil chamber. The oil chamber is between the inner bearing ring and the outer bearing ring. Each oil chamber is defined by the inner bearing ring, the outer bearing ring and an oil chamber housing. The oil chamber housing is fixed to one of the inner bearing ring and the outer bearing ring. The rolling-element bearing includes at least one duct corresponding to each oil chamber. The at least one duct is for a supply of oil to the corresponding oil chamber. Each duct extends through the bearing ring to which the oil chamber housing is fixed.

A rolling-element bearing includes an inner bearing ring and an outer bearing ring. The inner bearing ring and the outer bearing ring define an axial direction and a circumferential direction. The rolling-element bearing includes a plurality of rolling elements. The rolling elements are configured to roll circumferentially between the inner bearing ring and the outer bearing ring. The rolling-element bearing includes at least one oil chamber. The oil chamber is between the inner bearing ring and the outer bearing ring. Each oil chamber is defined by the inner bearing ring, the outer bearing ring and an oil chamber housing. The oil chamber housing is fixed to one of the inner bearing ring and the outer bearing ring. The rolling-element bearing includes at least one duct corresponding to each oil chamber. The at least one duct is for a supply of oil to the corresponding oil chamber. Each duct extends through the bearing ring to which the oil chamber housing is fixed.

In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.

In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device move on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy.

A gas bearing assembly includes a snap joint for attaching an externally pressurized porous gas bearing to a bearing cartridge. The gas bearing assembly has an adjustment screw which supplies a gas to an end of the adjustment screw via a through bore. The externally pressurized porous gas bearing has a housing portion with a washer and a snap ring. The gas bearing assembly additionally includes an air transfer tube positioned in the end of the adjustment screw and the housing portion. The washer and the snap ring retain the housing portion on the end of the adjustment screw to removably retain the bearing on the bearing cartridge.

A gas bearing assembly includes a snap joint for attaching an externally pressurized porous gas bearing to a bearing cartridge. The gas bearing assembly has an adjustment screw which supplies a gas to an end of the adjustment screw via a through bore. The externally pressurized porous gas bearing has a housing portion with a washer and a snap ring. The gas bearing assembly additionally includes an air transfer tube positioned in the end of the adjustment screw and the housing portion. The washer and the snap ring retain the housing portion on the end of the adjustment screw to removably retain the bearing on the bearing cartridge.

A turbocharger system can include a housing that includes a bore defined at least in part by a bore wall; a rolling element bearing unit that includes an outer race; and a mixed-element damper assembly disposed at least in part between the outer race and the bore wall where the mixed-element damper assembly includes a lobed-spring element and a squeeze film damper element.

A turbocharger system can include a housing that includes a bore defined at least in part by a bore wall; a rolling element bearing unit that includes an outer race; and a mixed-element damper assembly disposed at least in part between the outer race and the bore wall where the mixed-element damper assembly includes a lobed-spring element and a squeeze film damper element.

A bearing arrangement includes: first and second thrust bearings, arranged on a shaft and including respective first and second pressure faces; and a hydraulic connection, connecting the first and second thrust bearings and having a non-compressible fluid. Applying a shaft thrust load axially moves the first thrust bearing so that the first pressure face displaces the non-compressible fluid from the first thrust bearing to the second thrust bearing so as to apply a reaction force to the second pressure face, in order that the thrust load is shared between the first and second thrust bearings.

A bearing arrangement includes: first and second thrust bearings, arranged on a shaft and including respective first and second pressure faces; and a hydraulic connection, connecting the first and second thrust bearings and having a non-compressible fluid. Applying a shaft thrust load axially moves the first thrust bearing so that the first pressure face displaces the non-compressible fluid from the first thrust bearing to the second thrust bearing so as to apply a reaction force to the second pressure face, in order that the thrust load is shared between the first and second thrust bearings.