A multi-axis flexure device can include a first support base, a second support base, and a central coupler. The multi-axis flexure device can also include a first flexure device rotatably coupling the first support base and the central coupler to one another to facilitate rotation about a first axis, and a second flexure device rotatably coupling the second support base and the central coupler to one another to facilitate rotation about a second axis. Each flexure device can include a first flexure, a second flexure, and a flexure coupler coupled to the first and second flexures. The first flexure of the first flexure device can be coupled to the first support base to facilitate relative rotation between the first support base and the flexure coupler of the first flexure device about the first axis. The second flexure of the first flexure device can be coupled to the central coupler to facilitate relative rotation between the central coupler and the flexure coupler of the first flexure device about the first axis. The first flexure of the second flexure device can be coupled to the second support base to facilitate relative rotation between the second support base and the flexure coupler of the second flexure device about the second axis. The second flexure of the second flexure device can be coupled to the central coupler to facilitate relative rotation between the central coupler and the flexure coupler of the second flexure device about the second axis.

The present disclosure relates to optical systems and related devices, specifically those related to light detection and ranging (LIDAR) systems. An example optical system includes a housing, a shaft defining a rotational axis, and a rotatable optical component coupled to the shaft. The optical system also includes a first rotary bearing having an inner race, an outer race, and a plurality of rolling elements configured to roll between the inner race and the outer race. The inner race is coupled to the shaft and the outer race is coupled to the housing. The optical system also includes a preload mechanism having a spring coupled to the housing and a preload distributor coupled to the spring and the outer race. The spring is configured to apply an axial preload force to the outer race through the preload distributor.

A positioning device for positioning an optical component that includes a body having a threaded bore extending through a top surface, a pin chamber extending into a front surface and a ball bearing channel being in communication with the threaded bore and the pin chamber. The device further includes a plurality of ball bearings positioned within the ball bearing channel and a screw threaded into the threaded bore and being coupled to a top one of the ball bearings. The device also includes a positioning pin positioned within the pin chamber, where the positioning pin is coupled to a bottom one of the ball bearings, and where threading the screw into the bore causes the screw to push downward on the ball bearings which causes the ball bearings to push on the positioning pin and extend it out of the body.

Flexural pivot structures and methods are provided. A flexural pivot as disclosed allows for rotation of a pivoted member relative to a base member about a central axis, while inhibiting or preventing movement of the pivoted member relative to the base member in any other direction. Base and pivoted sections of the flexural pivot structure are connected to one another by a set of resilient blades or flexural members. A thickness of the blades varies with the distance from the central axis. The components of the flexural pivot can comprise a monolithic structure that is formed from a single piece of material.

A visor mountable eye wear. The eyewear includes a clip for mounting onto a visor or brim of a headgear, such as a cap. The eyewear has articulating support arms to permit the eyewear to be attached to the visor of a cap and worn over the eyes of the wearer. The eyewear may be readily elevated to be repositioned atop the visor of the cap. At least one lens is carried by a frame assembly. The frame assembly may include a left and a right frame segment releasably joined by a magnet carried in a corresponding left and right bridge members.

The disclosure relates to an assembly in a microlithographic projection exposure apparatus, with an optical element and at least one weight compensating device, which includes at least one magnetic circuit. A magnetic field generated by this magnetic circuit brings about a force for compensating at least partially for the force of the weight acting on the optical element. The apparatus also includes a coil arrangement with a plurality of coils. The arrangement is energizable with electrical current to generate a compensating force acting on the optical element. This compensating force compensates at least partially for a parasitic force that is exerted by the magnetic circuit when there is movement of the optical element and does not contribute to the compensation for the force of the weight acting on the optical element.

A preload guide system guides, in a horizontal plane, movement of a rotation structure having journals rotating around a rotation axis having a horizontal rotation shaft. At right-side surfaces of the journals, guide bearing components press predetermined positions on the same side with respect to an axial-direction reference plane and rotatably support the journals. At left-side surfaces of the journals, guide bearing components press positions corresponding to the guide bearing components at the right side surfaces, and rotatably support the journals. The support systems adjust displacement amounts of the guide bearing components such that a sum of the displacement amounts becomes zero.

A positioning device for positioning an optical component that includes a body having a threaded bore extending through a top surface, a pin chamber extending into a front surface and a ball bearing channel being in communication with the threaded bore and the pin chamber. The device further includes a plurality of ball bearings positioned within the ball bearing channel and a screw threaded into the threaded bore and being coupled to a top one of the ball bearings. The device also includes a positioning pin positioned within the pin chamber, where the positioning pin is coupled to a bottom one of the ball bearings, and where threading the screw into the bore causes the screw to push downward on the ball bearings which causes the ball bearings to push on the positioning pin and extend it out of the body.

The current invention relates to an electrically actuated device for orientating an optical element around a rotational axis comprising a rotor and a stator, said rotor comprising said axis, said axis comprising an optical end and an electronic end, the stator comprising a means for generating a magnetic field; the device further comprising a first axial rotation bearing associated with said optical end and a second axial rotation bearing associated with said electronic end, each bearing comprising an inner part and an outer part; said device further comprising electronic actuation means for providing a charged particle having a velocity v moving through a conductor provided on said rotor, wherein the axis is able to perform a rotational movement over less than 180, and whereby the orientation of said axis is controlled by a Lorentz force resulting from said charged particle moving in said magnetic field; wherein said device comprises axis-related clamping means configured to exert an axial force on the inner parts of the bearings toward each other for axially clamping said axis, thereby radially fixating said axis with respect to each of the inner parts of the bearings.

The disclosure relates to an assembly in a microlithographic projection exposure apparatus, with an optical element and at least one weight compensating device, which includes at least one magnetic circuit. A magnetic field generated by this magnetic circuit brings about a force for compensating at least partially for the force of the weight acting on the optical element. The apparatus also includes a coil arrangement with a plurality of coils. The arrangement is energizable with electrical current to generate a compensating force acting on the optical element. This compensating force compensates at least partially for a parasitic force that is exerted by the magnetic circuit when there is movement of the optical element and does not contribute to the compensation for the force of the weight acting on the optical element.