A system includes a split gate valve with first and second gate sections coupled together and configured to move together within a cavity of the split gate valve between an open position and a closed position. The split gate valve includes a rolling actuator to reduce friction and to convert a rotational input into a linear motion to move the first and second gate sections between the open and closed positions. The split gate valve also includes at least one expansion bar configured to bias the first and second gate sections from one another to seal against opposite seats of the split gate valve, wherein each expansion bar includes a spring mechanism configured to compress upon moving the first and second gate sections into and beyond the closed position to prevent buckling of the expansion bar.

A transport module for loading and unloading a process module of a semiconductor production device includes a housing, which has a chamber that can be evacuated. The chamber has an opening that can be closed in a gas-tight manner by a closure device, which opens out into a first coupling duct associated with the transport module. The first coupling duct is connected with a flange plate using an elastic intermediate element, wherein the flange plate can be seated in a plane parallel, sealing manner on a flange plate of a second coupling duct associated with the process module. After opening the closure device, an evacuated loading and unloading duct to the process module is created. An inner and outer mounting section of the intermediate element is spaced apart from one another in the radial direction, with respect to the axis of the first coupling duct, by a deformation zone.

Valves having a sprung gate of various constructions are disclosed. In one embodiment, the sprung gate includes a first endless elastic band having an inner perimeter defining an open space sandwiched between a first gate member and a second gate member that each define an opening therethrough in an open position portion thereof. The first endless elastic band is sandwiched therebetween with its open space oriented for alignment with the opening in both of the first and second gate members, which are aligned with one another to form a passage through the sprung gate. In one aspect, the first endless elastic band in positioned inward a distance from the outer sides of the first and second gate members and spaces the first gate member a distance apart from the second gate member thereby defining a channel having a bottom defined by the first endless elastic band.

A valve for preventing water hammer includes a speed reduction device for reducing a speed at which the valve may be closed. A method of preventing water hammer includes closing a valve at a fire hydrant after extracting water from the fire hydrant, in which the valve comprising a speed reduction device that increases an amount of time needed for closing the valve, and operating the valve to close the valve comprises operating the speed reduction device.

A capacity control valve includes a valve housing. A main valve including a valve body is driven by a solenoid, and a main valve seat which is provided between a discharge port and a control port and with which the valve body 51 is allowed to contact. A pressure sensitive valve member forming a pressure sensitive valve with a pressure sensitive body is disposed in a pressure sensitive chamber. The control port and a suction port communicate through an intermediate communication passage by opening the pressure sensitive valve. A slide valve body slides relative to the pressure sensitive valve member to open and close a through-hole communicating with the intermediate communication passage. The slide valve body partitions the pressure sensitive chamber into a Pd side space and a Pc side space, and a Pd-Pc flow passage providing communication between two spaces and is formed in the slide valve body.

An adjustable orifice valve system is disclosed which comprises an iris valve to control flow rate through the system, and a slide valve to prevent leaks through the system. Both valves can be adjusted through a gear train manually via a handle and/or automatically via a motor. When the iris valve is in a minimally open configuration, the gear train engages the slide valve to permit or disallow flow through the slide valve. When the iris valve is in a partially or maximally open configuration, an opening in the slide valve is aligned with the flow axis of the system to permit uninhibited flow through the slide valve. The position of the handle can indicate aperture size of the iris valve and/or position of the slide valve. In some embodiments, a pressure transducer and/or gear position sensor can provide determination of flow rate through the valve system.

A multi-orifice plate flow valve system is disclosed which comprises a flow control valve including a multi-orifice plate and a plurality of gear wheels. The flow rate through the valve system can be adjusted through a gear train manually via a handle and/or automatically via a motor. Orifices having different size apertures can be rotated into the transport path within the same flow control valve. The multi-orifice plate can include setting indicators, which visually communicates to a user the size of orifice aperture in the transport path. In some embodiments, a pressure transducer and/or gear position sensor can provide determination of flow rate through the valve system.

A valve actuator assembly having an actuator housing coupled to a bonnet and a housing lid. A hydraulic cylinder is positioned within the actuator housing and directly coupled to the bonnet. A piston is positioned within the hydraulic cylinder and coupled to a spring lifter assembly and a spring is positioned within the actuator housing and having a first end and a second end, the first end being coupled to a lower surface of the housing lid, and the second end being coupled to the spring lifter assembly. An operating stem is coupled to the piston and positioned in a channel extending through the bonnet to a valve body assembly.

A ceramic valve unit for a beverage machine including a housing, a water inlet pipe for receiving hot water, an outflow opening, and first and second ceramic elements within the housing. The first and second ceramic elements each have mutually abutting surfaces and are relatively movable in a plane common to the abutting surfaces. The plane common to the abutting surfaces is downstream of the water inlet pipe and the first ceramic element, but upstream of the second ceramic element and the outflow opening. The first ceramic element has at least differently sized first and second openings for allowing a liquid flow there through. The second ceramic element has only a single liquid flow opening permanently aligned with the outflow opening. The first ceramic element is selectively slidable between at least first and second different positions preferably in a path of movement about a centre of rotation beyond the boundaries of the first ceramic element.

To avoid formation of surface sag formed when an internal flow path of a valve element is processed and to ensure a maximum flow rate in a fluid control valve where a seating surface of the valve element is formed of a resin layer, in a fluid control valve that includes a valve seat, and a valve element including resin layers provided in concave grooves formed on a facing surface facing the valve seat, the valve element further includes internal flow paths whose inflow ports are opened in a back surface facing away from the facing surface and whose outflow ports are opened in portions around the concave grooves on the facing surface, and counterbored portions are formed on sides of the inflow ports of the internal flow paths.