A gas delivery system for a substrate processing system includes first and second valves, a first gas channel, and a cylinder. The first valve includes a first inlet and a first outlet. The first outlet is in fluid communication with a processing chamber of the substrate processing system. The second valve includes a second inlet and a second outlet. The cylinder defines a second gas channel having a first end and a second end. The cylinder is at least partially disposed within the first gas channel such that the cylinder and the first gas channel collectively define a flow channel. The flow channel is in fluid communication with the first end of the second gas channel and with the first inlet. A third gas channel is in fluid communication with the second end of the second gas channel and with the second inlet.

An actuatable flow media for the control of a flow rate of a liquid through the flow media, the actuatable flow media comprising a base having at least one cavity formed therein, at least one aperture formed in the cavity defining a liquid flow path for the entry of liquid into or exit of liquid from the flow media; a flexible membrane arranged in spaced relation with the base and defining a liquid flow path through the flow media; and an elastically deformable element arranged in the cavity and extending between the base and the flexible membrane for actuation between at least a first configuration in which the element is substantially undeformed and the liquid flow path through the at least one aperture is open and a second configuration in which the element is substantially deformed and the liquid flow path through the at least one aperture is closed.

An apparatus and a method for selectively sealing a conduit. The apparatus includes a housing, a selectively actuatable seal assembly, a seal assembly carrier for conveying and actuating the seal assembly, and a selectively actuatable connection between the seal assembly and the seal assembly carrier. The method includes providing the apparatus, connecting the housing with a fitting, advancing the seal assembly carrier to position the seal assembly in a conduit, actuating the seal assembly to seal the conduit, actuating the actuatable connection to disconnect the seal assembly from the seal assembly carrier, and retracting the seal assembly carrier. The method may further include advancing the seal assembly carrier to engage the seal assembly, actuating the actuatable connection to connect the seal assembly with the seal assembly carrier, actuating the seal assembly to unseal the conduit, and retracting the seal assembly carrier and the seal assembly from the conduit.

An apparatus and a method for selectively sealing a conduit. The apparatus includes a housing, a selectively actuatable seal assembly, a seal assembly carrier for conveying and actuating the seal assembly, and a selectively actuatable connection between the seal assembly and the seal assembly carrier. The method includes providing the apparatus, connecting the housing with a fitting, advancing the seal assembly carrier to position the seal assembly in a conduit, actuating the seal assembly to seal the conduit, actuating the actuatable connection to disconnect the seal assembly from the seal assembly carrier, and retracting the seal assembly carrier. The method may further include advancing the seal assembly carrier to engage the seal assembly, actuating the actuatable connection to connect the seal assembly with the seal assembly carrier, actuating the seal assembly to unseal the conduit, and retracting the seal assembly carrier and the seal assembly from the conduit.

This inventions relates to a plugging machine and a rigid tube provided with a stationary disc integral with the bottom of the tube and oriented almost orthogonal to the tube, with a movable disc paired with the stationary disc. A sealing ring of a resilient material is located between the discs and compressed when the movable disc is pressed against the stationary disc to adhere to an inner surface of the pipeline. The sealing ring is coaxial with respect to the pipeline. The movement of the movable disc is determined by raising or lowering a control rod within the tube by means of sloping sliders made in the lower portion of the rod which engage in respective grooves, likewise sloping, made in an axial shank associated with the movable disc and sliding inside an axial opening of the stationary disc. A component of a force is generated which is parallel to the axis of the discs. The axis is raised or lowered by rotation of a threaded ring engaging in a threading mate at the top of the rod.

This inventions relates to a plugging machine and a rigid tube provided with a stationary disc integral with the bottom of the tube and oriented almost orthogonal to the tube, with a movable disc paired with the stationary disc. A sealing ring of a resilient material is located between the discs and compressed when the movable disc is pressed against the stationary disc to adhere to an inner surface of the pipeline. The sealing ring is coaxial with respect to the pipeline. The movement of the movable disc is determined by raising or lowering a control rod within the tube by means of sloping sliders made in the lower portion of the rod which engage in respective grooves, likewise sloping, made in an axial shank associated with the movable disc and sliding inside an axial opening of the stationary disc. A component of a force is generated which is parallel to the axis of the discs. The axis is raised or lowered by rotation of a threaded ring engaging in a threading mate at the top of the rod.

This inventions relates to a plugging machine and a rigid tube provided with a stationary disc integral with the bottom of the tube and oriented almost orthogonal to the tube, with a movable disc paired with the stationary disc. A sealing ring of a resilient material is located between the discs and compressed when the movable disc is pressed against the stationary disc to adhere to an inner surface of the pipeline. The sealing ring is coaxial with respect to the pipeline. The movement of the movable disc is determined by raising or lowering a control rod within the tube by means of sloping sliders made in the lower portion of the rod which engage in respective grooves, likewise sloping, made in an axial shank associated with the movable disc and sliding inside an axial opening of the stationary disc. A component of a force is generated which is parallel to the axis of the discs. The axis is raised or lowered by rotation of a threaded ring engaging in a threading mate at the top of the rod.

This inventions relates to a plugging machine and a rigid tube provided with a stationary disc integral with the bottom of the tube and oriented almost orthogonal to the tube, with a movable disc paired with the stationary disc. A sealing ring of a resilient material is located between the discs and compressed when the movable disc is pressed against the stationary disc to adhere to an inner surface of the pipeline. The sealing ring is coaxial with respect to the pipeline. The movement of the movable disc is determined by raising or lowering a control rod within the tube by means of sloping sliders made in the lower portion of the rod which engage in respective grooves, likewise sloping, made in an axial shank associated with the movable disc and sliding inside an axial opening of the stationary disc. A component of a force is generated which is parallel to the axis of the discs. The axis is raised or lowered by rotation of a threaded ring engaging in a threading mate at the top of the rod.