A compact valve block for a chemical container wherein the coaxial valve block has a housing that can accommodate three valve control mechanisms thus allowing for quick and effective purging without the need for an additional external conduit, valves, and coaxial injector. The advantage is a greatly reduced amount of wetted surface area inside the valve block leading to a significant decrease in the time it takes to purge a system thus allowing for quicker times to change chemical containers.

An apparatus comprises a mounting panel including a top plate having multiple vias and multiple orifices. An internal face of the top plate includes a first cut-out region and channels through which to flow a process fluid. The first cut-out region can be a reservoir in which to contain the process fluid. The multiple vias are adapted for passing the process fluid through the top plate. The multiple orifices are adapted for attaching a plurality of process fluid control components to the mounting panel. An inner plate also has multiple additional vias. The apparatus includes a bottom plate, where the inner plate is compacted between the top plate and the bottom plate to form an integral metallic body in which to contain and flow the process fluid.

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on large numbers of fitting assemblies. Fitting assemblies often require tight tolerances, requiring expensive manufacturing processes. Fitting assemblies formed as multiple components can reduce manufacturing costs. Fitting assemblies may be formed of a housing having an insert receiving cavity and an insert having a port, a seal cavity, and a tube stub. A flow path extends from the port to the tube stub to enable flow of fluid therebetween.

An actuator sub for generating hydraulic pressure having a sub housing which includes (i) an outer surface, (ii) a main flow passage extending though the sub housing, and (iii) a wall space formed between the main flow passage and the housing outer surface. At least a first hydraulic tube is position in the wall space and an equalization port is configured to transmit pressure in the main flow passage to the first hydraulic tube. A drive motor driving an bi-directional hydraulic motor, are positioned in the first hydraulic tube, with the hydraulic motor being configured to output fluid to a fluid outlet of the first hydraulic tube, and the hydraulic motor, when not under power, allowing the reverse flow of fluid through the hydraulic motor. The actuator sub includes the absence of a check valve along a path carrying fluid between the hydraulic motor and the outlet of the second hydraulic tube.

An embodiment of the present disclosure relates to an industrial rechargeable wireless solenoid valve system, and a technical problem to be solved is to provide an industrial rechargeable wireless solenoid valve system which is controlled by a wireless control signal and receives power supplied from a rechargeable battery. To this end, the present disclosure provides an industrial rechargeable wireless solenoid valve system comprising: a wireless communication unit for receiving a command from a factory control unit; a solenoid valve control unit which receives input of the command from the wireless communication unit to output an operation signal corresponding to the command; an output unit which receives input of the operation signal from the solenoid valve control unit to drive a solenoid valve; and a power supply unit for supplying power to the wireless communication unit, the solenoid valve control unit, and the output unit, respectively.

The invention relates to a fluid flow device comprising a plurality of fluid flow functional modules each fastened on a respective individual base comprising: two parallel lateral faces via which the bases are adapted to be placed against one another in such a manner that when the bases are placed against one another, two of the bases each have one lateral face that is free; a primary fluid transport channel passing through the base to open out in its two lateral faces in identical positions; and a front face along which the module extends so as to couple an inlet channel of said module with a secondary channel extending in the base from the front face and opening out in the primary channel.

According to the invention, the device includes fastener means for fastening the bases to one another and leaktight coupling means for coupling the end of the primary channel opening out in one of the lateral faces to a source of fluid under pressure for feeding the modules.

A housing block includes channels formed in an interior of the housing block with at least one of the channels having a slot or flat-channel geometry at least in portions. A method is disclosed for producing the housing block. A sand core is disclosed to be used with the method for producing the housing block.

The present invention includes a lateral support member for a server computer constructed to permit advantageous airflow. The present invention can be operated to shunt organized airflow into multiple computer cases and/or organized airflow from multiple computer cases to a dedicated heat reservoir.

A first valve of a manifold for a fluid distribution system may regulate a fluid flow to a first fluid handling device (“FHD”). A second valve of the manifold may communicate with a second FHD, a reservoir, or a recirculation line. A target flow condition for the manifold may be determined by a manifold control system (“MCS”) based on a device setting received for the first FHD. The MCS may determine a fluid distribution system operation for obtaining the target flow condition based on the target flow condition, a flowrate of the fluid flow, and an operational state of a supply device. The operation may include the MCS controlling at least one of the supply device, the first valve, and the second valve to change the flowrate. The MCS may continuously operate at least one manifold valve to maintain the target flow condition once exhibited by the manifold.

A valve module (1) for mounting on a valve module carrier (2), the valve module (1) being of plate-shaped design, extending in a longitudinal direction (x), and being subdivided into a plurality of longitudinal sections adjoining one another in the longitudinal direction (x), the valve module having, as a first longitudinal section, a main valve section (8) with a first main valve (9), and, as a second longitudinal section adjoining the main valve section (8) in the longitudinal direction (x), a pilot section (10) with a pilot valve (11) for actuating the first main valve (9), the valve module (1) further having, as a third longitudinal section adjoining the pilot section (10) in the longitudinal direction (x), a pressure sensor section (12) with a pressure sensor (13) for detecting a fluid pressure of the valve module (1).