Patent classifications
F16K31/004
FLUID-FLOW CONTROL DEVICE
A process fluid-flow control device comprising: an inlet, an outlet, an actuation mechanism and a diaphragm; wherein: the diaphragm is in direct operational communication with the outlet and/or the inlet; the mechanism comprises a driving piezoelectric component, and the device is configured to allow: employing the driving piezoelectric component to adjust force exerted on the diaphragm and thereby regulating flow of the process fluid through the device within a first rate range.
Fluid micro-injection device and flow channel assembly thereof
An execution system (100) for a fluid micro-injection device have a base body (110), a movable member (120), an executor, an adjusting member (130) and a plurality of clearance sheets. The movable member (120) is movably disposed on the base body (110). The executor and the adjusting member (130) are disposed in the base body (110). The plurality of clearance sheets are disposed between the base body (110) and the adjusting member (130) to adjust a pre-tightening force of the executor.
Self-diagnosis method for flow rate control device
A self-diagnosis method of a flow rate control device includes: a step (a) for measuring a pressure drop characteristic after a pressure control valve (6) has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve (8) is larger than a restriction part; a step (b) for measuring the pressure drop characteristic after the pressure control valve has been changed to the closed state from a state where the fluid flows from the upstream side of the flow rate control valve to the downstream side with the opening of the flow rate control valve is smaller than the restriction part; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (a) with a corresponding reference pressure drop characteristic; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (b) with a corresponding reference pressure drop characteristic; and a step (e) for determining that there is an abnormality in the flow rate control valve when it is determined that there is an abnormality only in the step (d).
System and method for attaching a poppet to an electromechanical actuator apparatus
An assembly having a coupling component and a poppet is disclosed. The coupling component has a first end. The first end has an opening extending into the coupling component, such that the coupling component has a sidewall extending around and defining the opening, the sidewall at least partially constructed of a ductile material. The poppet is positioned within the opening. The poppet has a first end outside of the opening, a second end within the opening, and an outer surface extending between the first end and the second end. The poppet has a recess positioned between the first end and the second end, the recess being defined by at least one sidewall and a bottom. At least a portion of the ductile material of the sidewall is positioned within the recess to secure the poppet into the opening.
Print head having a temperature-control device
The disclosure relates to an application device for applying an application medium onto a component, preferably for application of a coating onto a motor vehicle body component. The application device includes a print head for preferably serial and/or permanent application of the application medium, wherein the print head has: a nozzle plate, at least one nozzle in the nozzle plate in order to discharge the application medium, at least one valve element, which is movable relative to the nozzle plate, for control of the application medium discharge through the at least one nozzle, wherein the at least one movable valve element closes the at least one nozzle in a closing position and releases it in an opening position, and at least one drive for moving the at least one valve element. The application device is characterised in particular in that it includes at least one temperature control apparatus for reducing heating of the at least one drive during application of the application medium.
VALVE DEVICE, FLOW CONTROL METHOD, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS
A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.
PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.
Flow rate control method and flow rate control device
A flow rate control method performed using a flow rate control device 100 comprising a first control valve 6 provided in a flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising steps of: (a) closing the opening of the first control valve from a state in which, while controlling the opening of the first control valve based on an output of the pressure sensor so as to be the first flow rate, maintaining the opening of the second control valve in an open state, and flowing a fluid at the first flow rate; and (b) based on the output of the pressure sensor, the pressure remaining downstream of the first control valve is controlled by adjusting the opening of the second control valve, and flowing the fluid at the second flow rate downstream of the second control valve.
Diaphragm valve and mass flow controller using the same
In a diaphragm valve comprising a tubular valve seat, a primary side passage located outside the valve seat, a secondary side passage located inside the valve seat, and pressing member which presses the diaphragm to a seating surface to change a valve opening, a supporting member which contacts with the diaphragm in a valve opening range that is at least one part of an entire opening range from a fully opened state to a fully closed state to obstruct deformation of the diaphragm to the secondary side passage side is disposed in a region between the seating surface and a center of the seating surface. Thereby, even when a pressure difference between both sides of the diaphragm is large, a reduction of a gap at the seating surface can be prevented, and gas can be flowed at a large flow rate.
Fluid control device, method for controlling fluid control device, and fluid control system
The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.