An execution system (100) for a fluid micro-injection device have a base body (110), a movable member (120), an executor, an adjusting member (130) and a plurality of clearance sheets. The movable member (120) is movably disposed on the base body (110). The executor and the adjusting member (130) are disposed in the base body (110). The plurality of clearance sheets are disposed between the base body (110) and the adjusting member (130) to adjust a pre-tightening force of the executor.

In an invention including: a piezoelectric element (13) which generates, as a displacement, a driving force necessary for an operation of a valve body (12) which is an operating body; a displacement enlarging mechanism (14) including at least a spring element so as to enlarge a displacement of the piezoelectric element (13) which acts on the valve body (12); and a driving device (15) which operates the valve body (12) by applying a voltage to the piezoelectric element (13) to extend the piezoelectric element (13), the driving device (15) includes a first filter processing unit (15x) having an inverse function characteristic of a mechanical resonance frequency when operating the displacement enlarging mechanism (14), and is configured to apply, a voltage which reduces the mechanical resonance, to the piezoelectric element (13) through this resonance suppression processing unit (15x).

In a diaphragm valve comprising a tubular valve seat, a primary side passage located outside the valve seat, a secondary side passage located inside the valve seat, and pressing member which presses the diaphragm to a seating surface to change a valve opening, a supporting member which contacts with the diaphragm in a valve opening range that is at least one part of an entire opening range from a fully opened state to a fully closed state to obstruct deformation of the diaphragm to the secondary side passage side is disposed in a region between the seating surface and a center of the seating surface. Thereby, even when a pressure difference between both sides of the diaphragm is large, a reduction of a gap at the seating surface can be prevented, and gas can be flowed at a large flow rate.

A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

In order to provide a piezo valve in which it is possible to accurately predict the remaining lifespan of a piezo actuator, there are provided a valve seat, a valve body that is able to move between a fully closed position in contact with the valve seat and a fully open position, a piezo actuator that drives the valve body, a drive circuit that receives an input signal, and outputs to the piezo actuator a corresponding drive voltage, and a leakage current detector that, when the drive circuit outputs a voltage equal to or greater than a maximum rated voltage that drives the valve body to the fully closed/open position, detects leakage current from the piezo actuator. When the leakage current is detected or in a state immediately prior to detection, a fluid is flowing between the valve seat and the valve body.

Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.

A metering valve has a closing member and a valve seat. The closing member is movable between a closed position on the valve seat sealing a material outlet, and an open position raised above the valve seat leaving the outlet clear. An actuating element rigidly connected to the closing member is arranged between first and second piezo-actuators at a distance from the first piezo-actuator in the closed position less than the maximum length change of the first piezo-actuator, or lies loosely thereon and at a distance from the second piezo-actuator longer than the maximum length change of the first piezo-actuator. The actuating element in the open position is arranged at a distance from the second piezo-actuator less than the maximum length change of the second piezo-actuator, or lies loosely thereon and at a distance from the first piezo-actuator greater than the maximum length change of the second piezo-actuator.

A servovalve includes: a fluid transfer valve assembly comprising a supply port and a control port; a moveable valve spool arranged to regulate flow of fluid from the supply port to the control port in response to a control signal; and a drive assembly configured to axially move the valve spool relative to the fluid transfer assembly in response to the control signal to regulate the fluid flow. The drive assembly comprises a piezoelectric actuator configured to vary the flow of fluid to respective ends of the valve spool in response to the control signal.

A valve arrangement for controlling gas flow. A gas block includes a gas inlet, a gas outlet, and a gas cavity fluidly connecting the gas inlet to the gas outlet. A diaphragm is configured for controlling gas flow between the gas inlet and the gas outlet. An actuator is configured to vary the position of the diaphragm so as to control the gas flow. The actuator comprises a tubular housing; a plunger positioned inside the housing and having an actuating extension extending outside of the housing and coupled to the diaphragm, the plunger configured to be slidable inside the housing; a piezoelectric body positioned inside the plunger; and a pre-loader applying force to the plunger so as to press the plunger against the piezoelectric body.

A fuel injection device has a valve body, a drive portion, a nozzle needle, and a control valve body. The valve body defines a control chamber, a valve chamber and a low pressure communication passage. The nozzle needle is displaced due to a fuel pressure variation in the control chamber to open/close an injection port. When the control valve body sits on an upper seat surface, a low pressure communication passage is closed so that the valve chamber is fluidly disconnected from the low pressure chamber. The control valve body defines a gap restriction on the upper seat surface. A flow passage area of a sub orifice provided to the low pressure communication passage is smaller than a flow passage area of the gap restriction.