A stepper motor proportionally controlled bellows valve system comprising: a valve manifold; one or more stepper motors; and one or more bellows valves. The one or more bellows valves may comprise a bellows, a sealing washer, and a profile washer. The sealing washer is configured to removeably engage with a vacuum orifice rim. The profile washers are configured to stick into the valve orifice, such that the profile washer defines a flow through the valve.

A valve device includes: a valve device body including a valve seat; a diaphragm that is provided to cover a valve chamber; a stem; and a valve body portion that is inserted into a central portion of the diaphragm, and that is configured to open and close the fluid passage by approaching the valve seat and separating from the valve seat. The diaphragm includes a main diaphragm, and a support diaphragm positioned on an opposite side of the main diaphragm to the valve chamber side and provided in contact with the main diaphragm. A first terminal end portion on an inner peripheral side of the main diaphragm is fixed to the valve body portion. A second terminal end portion on an inner peripheral side of the support diaphragm is separated from the first terminal end portion on the inner peripheral side of the main diaphragm.

An apparatus for controlling flow through a flow body comprising an intake opening and an output opening in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger with the cross-sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion forms an orifice with cavity portion, and a rod coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.

A diaphragm valve includes: a valve main body having formed therein a valve chamber, and an inflow passage and an outflow passage being in communication with the valve chamber; an annular valve seat formed in the valve chamber; a diaphragm contacting and separating from the valve seat; and a drive unit driving the diaphragm. The drive unit has a drive unit housing attached to the valve main body so that an outer peripheral edge portion of the diaphragm is sandwiched between the valve main body and the drive unit housing, and the drive unit housing is formed of an electroconductive fluorine resin material.

A poppet including a single-piece, unitary body defining a plurality of discrete sealing surfaces and a mechanical attachment configured to engage the body with a piston of a valve assembly.

A poppet including a single-piece, unitary body defining a plurality of discrete sealing surfaces and a mechanical attachment configured to engage the body with a piston of a valve assembly.

A system and method for a high flow valve includes a seal rod, an armature configured to be connected to and move the seal rod, a valve seal configured to be connected to the seal rod, an exhaust seal seat and a diaphragm. The valve seal is configured to be positioned on the exhaust seal seat and exert an exhaust seal pressure force. The diaphragm is configured to exert a diaphragm force opposite the exhaust seal pressure force to balance the exhaust seal pressure force.

A system and method for a high flow valve includes a seal rod, an armature configured to be connected to and move the seal rod, a valve seal configured to be connected to the seal rod, an exhaust seal seat and a diaphragm. The valve seal is configured to be positioned on the exhaust seal seat and exert an exhaust seal pressure force. The diaphragm is configured to exert a diaphragm force opposite the exhaust seal pressure force to balance the exhaust seal pressure force.

A valve includes a valve body with an inlet and an outlet coupled to a tubular conduit operable to circulate a flow of a process fluid, an actuator with an interior volume divided by a valve diaphragm into a first volume portion that encloses a working fluid and a second volume portion, and a plug coupled to the valve diaphragm and operable to move toward an open position or a closed position based on movement of the valve diaphragm relative to a pressure of the working fluid. A seal isolator is coupled to the tubular conduit and includes an isolator diaphragm having a first side exposed to the flow of the fluid and a second side fluidly coupled to the first volume portion through the working fluid. The isolator diaphragm is configured to transmit a pressure of the flow of the process fluid to the pressure of the working fluid.

A cryogenic globe valve that prevents a high sealing property and safety from being lost even through a large number of times of opening and closing for a cryogenic fluid and is easily maintained, although it has a simple structure. The cryogenic globe valve has an axial cylindrical portion as a long-neck structure extended to its body, in which a resin-made valve disk having a conical surface having a reduced-diameter tapered shape is attached to a lower end of an elongated stem such that the resin-made valve disk is three-dimensionally operable with respect to the stem even under an extremely low-temperature condition.