Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device.

A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve seat along a rotating shaft direction. And the inner stator includes a through hole along the rotating shaft direction of the vacuum pump portion, and at least a part of a supporting member which supports the valve body is disposed in the through hole.

A system and method for a high flow valve includes a seal rod, an armature configured to be connected to and move the seal rod, a valve seal configured to be connected to the seal rod, an exhaust seal seat and a diaphragm. The valve seal is configured to be positioned on the exhaust seal seat and exert an exhaust seal pressure force. The diaphragm is configured to exert a diaphragm force opposite the exhaust seat pressure force to balance the exhaust seal pressure force.

A system and method for a high flow valve includes a seal rod, an armature configured to be connected to and move the seal rod, a valve seal configured to be connected to the seal rod, an exhaust seal seat and a diaphragm. The valve seal is configured to be positioned on the exhaust seal seat and exert an exhaust seal pressure force. The diaphragm is configured to exert a diaphragm force opposite the exhaust seat pressure force to balance the exhaust seal pressure force.

A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

An expansion valve includes: a main body portion having a valve chamber and a valve seat; a case fixed to the main body portion; and a screw shaft that is driven by driving force of rotation obtained by reducing a rotational movement of a rotor due to the excitation of an excitation portion by a speed reduction mechanism to move a valve body forward and backward. A bellows configured to seal a gap between the inside of the case and the valve chamber is arranged in the valve chamber to be externally fitted onto the valve body, and the rotation of the valve body relative to the main body portion is restricted by a rotation restrictor.

A diaphragm assembly for a mass flow controller is disclosed. The diaphragm assembly includes an aperture, side walls extending from the aperture and disposed about a central axis, the side walls including multiple convolutions, and a poppet including an interior surface facing the aperture and exterior sealing surface. At least a portion of the diaphragm assembly moveable extends and retracts within a control valve cavity of the mass flow controller. A push rod extending from the interior surface of the poppet moves, responsive to an actuator of the mass flow controller, to enable the exterior sealing surface of the poppet to open and close a flow path through the control valve cavity.

A diaphragm assembly for a mass flow controller is disclosed. The diaphragm assembly includes an aperture, side walls extending from the aperture and disposed about a central axis, the side walls including multiple convolutions, and a poppet including an interior surface facing the aperture and exterior sealing surface. At least a portion of the diaphragm assembly moveable extends and retracts within a control valve cavity of the mass flow controller. A push rod extending from the interior surface of the poppet moves, responsive to an actuator of the mass flow controller, to enable the exterior sealing surface of the poppet to open and close a flow path through the control valve cavity.

A valve includes a valve body with an inlet and an outlet coupled to a tubular conduit operable to circulate a flow of a process fluid, an actuator with an interior volume divided by a valve diaphragm into a first volume portion that encloses a working fluid and a second volume portion, and a plug coupled to the valve diaphragm and operable to move toward an open position or a closed position based on movement of the valve diaphragm relative to a pressure of the working fluid. A seal isolator is coupled to the tubular conduit and includes an isolator diaphragm having a first side exposed to the flow of the fluid and a second side fluidly coupled to the first volume portion through the working fluid. The isolator diaphragm is configured to transmit a pressure of the flow of the process fluid to the pressure of the working fluid.

A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.