A door for closing a chamber opening (4) in a chamber wall of a vacuum chamber (3) in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged in a surrounding space, a closing member (5) arranged in the surrounding space, and a rod (10), to which the closing member (5) is connected, wherein a first movement of the rod (10), through which the closing member (5) is displaced from an open position into an intermediate position, occurring in the form of a displacement of the rod (10) in the direction of the longitudinal axis thereof, wherein a second movement of the rod (10) subsequent thereto occurs in the form of a displacement of the rod (10) in a direction at an angle to the longitudinal axis thereof and/or in the form of a pivoting of the rod (10) about a pivot axis which is perpendicular to the longitudinal axis thereof, wherein the closing member is displaced from the intermediate position into a closed position via said second movement of the rod. The rod (10) is mounted in a moveable manner via the bearing elements, via the first movement thereof and via the second movement thereof in relation to the door housing, wherein the bearing elements are arranged in an inner space (30) of the door housing, which inner space is sealed with respect to the surrounding space or is connected to the surrounding space via a passage (41) extending through a housing wall (40) of the door housing, in which passage a particle filter is arranged. The rod (10) is guided out of the inner space (30) of the door housing into the surrounding space in a sealed manner.

Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.

A valve apparatus comprises a housing, a solenoid operable to receive electrical current flow, and an enclosure, the enclosure housing the solenoid, a magnet coupled to the enclosure, a plunger comprising a stopper and a conductive portion, and a spring coupled to the plunger. When the solenoid receives a first current, the solenoid applies a first magnetic force onto the plunger causing the stopper to disengage from the housing outlet, the conductive portion of the plunger magnetically connects with the magnet, and the stopper remains disengaged from the housing outlet after the first period of time expires. When the conductive portion is magnetically connected to the magnet and the solenoid receives a second current, the solenoid applies a second magnetic force onto the plunger causing the conductive portion of the plunger to disconnect from the magnet so that the stopper engages with the housing outlet.

A valve apparatus comprises a housing, a solenoid operable to receive electrical current flow, and an enclosure, the enclosure housing the solenoid, a magnet coupled to the enclosure, a plunger comprising a stopper and a conductive portion, and a spring coupled to the plunger. When the solenoid receives a first current, the solenoid applies a first magnetic force onto the plunger causing the stopper to disengage from the housing outlet, the conductive portion of the plunger magnetically connects with the magnet, and the stopper remains disengaged from the housing outlet after the first period of time expires. When the conductive portion is magnetically connected to the magnet and the solenoid receives a second current, the solenoid applies a second magnetic force onto the plunger causing the conductive portion of the plunger to disconnect from the magnet so that the stopper engages with the housing outlet.

A substrate processing apparatus includes a chamber in which a first processing space, a second processing space, a connecting space connecting the first processing space and the second processing space, a first hole connecting with the connecting space and a second hole connecting with the connecting space are formed, a first gate valve having a first valve element and closing the first hole, the first valve element sliding in the first hole, opening and closing the connecting space, and a second gate valve having a second valve element and closing the second hole, the second valve element sliding in the second hole, opening and closing the connecting space, wherein a region in which the first hole and the connecting space connect with each other and a region in which the second hole and the connecting space connect with each other are one common region.

Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a shaft, a first gate and a second gate coupled to the shaft at opposite sides thereof, and an actuator coupled to the shaft. The actuator is configured to tilt together the shaft, the first gate, and the second gate to a first sealed gate position or to a second sealed gate position. The actuator can be operated using a pneumatic mechanism, an electro-magnetic mechanism, or a cam follower mechanism.

A valve (10) for selectively opening and closing a flow passageway (12) includes (i) a valve body (14) that defines a body passageway (16); (ii) a first valve surface (18) that defines a first valve opening (18A); (iii) an expandable barrier (22); and (iv) an actuation system (24). The expandable barrier (22) is movable in the body passageway (16) between an open configuration (30) in which the barrier (22) is retracted and does not engage the first valve surface (18); and a closed configuration (28) in which the barrier (22) is expanded, engages the first valve surface (18), and blocks the first valve opening (18A). The actuation system (24) selectively moves the barrier (22) between the configurations (28) (30).

A valve (10) for selectively opening and closing a flow passageway (12) includes (i) a valve body (14) that defines a body passageway (16); (ii) a first valve surface (18) that defines a first valve opening (18A); (iii) an expandable barrier (22); and (iv) an actuation system (24). The expandable barrier (22) is movable in the body passageway (16) between an open configuration (30) in which the barrier (22) is retracted and does not engage the first valve surface (18); and a closed configuration (28) in which the barrier (22) is expanded, engages the first valve surface (18), and blocks the first valve opening (18A). The actuation system (24) selectively moves the barrier (22) between the configurations (28) (30).

A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.

A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.