A pair of air cylinders that cause a valve plate to perform an opening/closing operation each include a head-side air cushion mechanism and a rod-side air cushion mechanism. Each head-side air cushion mechanism includes a head-side communication path and a head-side restricting flow path that connect a head-side pressure chamber and a head-side main flow path in parallel, and a blocking mechanism that blocks the head-side communication path when a piston approaches a retreat stroke end, and each rod-side air cushion mechanism includes a rod-side communication path and a rod-side restricting flow path that connect a rod-side pressure chamber and a rod-side main flow path in parallel, and a blocking mechanism that blocks the rod-side communication path when the piston approaches an advance stroke end.

A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

A dual gate valve includes two valve plates that open and close two openings of a valve box, a support bar that supports the two valve plates, a valve rod connected to the support bar, and an operation unit that performs an open and close operation of the two valve plates via the valve rod. The support bar and the valve plate linearly and elongatedly extend in a lateral direction perpendicular to a central axis of the valve rod. The valve rod is connected to a central portion in the long direction of the support bar, and one and the other of the two valve plates are tiltably attached to one end and the other end in the long direction of the support bar via elastic members, respectively.

A dual gate valve includes two valve plates that open and close two openings of a valve box, a support bar that supports the two valve plates, a valve rod connected to the support bar, and an operation unit that performs an open and close operation of the two valve plates via the valve rod. The support bar and the valve plate linearly and elongatedly extend in a lateral direction perpendicular to a central axis of the valve rod. The valve rod is connected to a central portion in the long direction of the support bar, and one and the other of the two valve plates are tiltably attached to one end and the other end in the long direction of the support bar via elastic members, respectively.

A stepper motor proportionally controlled bellows valve system comprising: a valve manifold; one or more stepper motors; and one or more bellows valves. The one or more bellows valves may comprise a bellows, a sealing washer, and a profile washer. The sealing washer is configured to removeably engage with a vacuum orifice rim. The profile washers are configured to stick into the valve orifice, such that the profile washer defines a flow through the valve.

A stepper motor proportionally controlled bellows valve system comprising: a valve manifold; one or more stepper motors; and one or more bellows valves. The one or more bellows valves may comprise a bellows, a sealing washer, and a profile washer. The sealing washer is configured to removeably engage with a vacuum orifice rim. The profile washers are configured to stick into the valve orifice, such that the profile washer defines a flow through the valve.

A butterfly pressure control valve including a valve opening/closing mechanism (10) which includes: a valve body (11) rotatable in a direction perpendicular to a channel (4) in a body; a sheet ring (12) which can move a valve-seat sealing part toward and away from the valve body by making reciprocating movements in a direction of the channel; a cam mechanism (13) which separates the sheet ring (12) from the valve body (11) and rotates the valve body; and a reciprocating movement mechanism (14) which causes the sheet ring (12) to make reciprocating movements in a direction of the valve body, wherein the valve opening/closing mechanism (10) is an opening/closing mechanism which controls pressure in the channel (4) by rotating the valve body (11) without sliding with the sheet ring (12).

A butterfly pressure control valve including a valve opening/closing mechanism (10) which includes: a valve body (11) rotatable in a direction perpendicular to a channel (4) in a body; a sheet ring (12) which can move a valve-seat sealing part toward and away from the valve body by making reciprocating movements in a direction of the channel; a cam mechanism (13) which separates the sheet ring (12) from the valve body (11) and rotates the valve body; and a reciprocating movement mechanism (14) which causes the sheet ring (12) to make reciprocating movements in a direction of the valve body, wherein the valve opening/closing mechanism (10) is an opening/closing mechanism which controls pressure in the channel (4) by rotating the valve body (11) without sliding with the sheet ring (12).

A valve having a closure member which is pressed against a valve seat in a closed position and closes an opening, and having a first valve drive for moving the closure member along a first movement path back and/or forth between a maximum open position and an intermediate position, and having a second valve drive for moving the closure member along a second movement path back and/or forth between the intermediate position and the closed position. The first movement path and the second movement path are arranged in an angled manner with respect to one another. The valve additionally includes at least one locking device with at least one locking body which interacts with at least one inclined surface and/or comprises at least one inclined surface, wherein the locking body is movable relative to the closure member along a third movement path between a locking position and a releasing position.