Microscale valves for use in, e.g., micropump devices, may be formed of a slitted diaphragm bonded o the interior of a valve tube. A bump in the diaphragm and/or a backward-leakage stopper may increase the breakdown pressure of the valve. A push-rod may be used to pre-load the valve membrane to thereby increase the cracking pressure.

A valve includes a valve seat having a hole configured as a flow path, a valve body configured to open/close the flow path due to relative movement with respect to the valve seat, an opening member having a first surface fixed to one of the valve seat and the valve body, a second surface configured to separate away and abut the other one of the valve seat and the valve body, a third surface which intersects the first and second surfaces, and an opening penetrating the first and second surfaces, a fixing member that fixes the first surface to the one of the valve seat and the valve body, and an inclined portion, which makes an interval between the one of the valve seat and the valve body and the first surface long in a direction from the opening to the third surface.

A fluid control apparatus includes a piezoelectric pump and valve. The valve includes a second valve housing, second seal member, diaphragm, first seal member, and first valve housing and has a structure in which they are laminated in sequence. The first valve housing includes a second vent and third vent, has a valve seat, and includes six cavities. The second valve housing has a first vent and first vent and includes a valve seat and six first protrusions. The second valve housing further includes six second protrusions nearer the outer edges than the six first protrusions, as seen in the x-axis direction in plan view.

A fluidic device includes a valve configured to adjust a fluid flow in a first direction of a flow path. The fluidic device includes: a diaphragm of the valve; a first substrate having a groove that constitutes the flow path and a protrusion part at a position facing the diaphragm in the groove; and a second substrate to which the diaphragm is fixed at a first fixation part and a second fixation part, wherein a length from a first end part of the protrusion part to a second end part of the protrusion part seen in the first direction is greater than a length from the first fixation part to the second fixation part.