The invention can include a device and method for distributing a fluid in an industrial facility that comprises a fluid distribution pipe, a discharge pipe, a distribution valve that is positioned on the distribution pipe and controlling the distribution of fluid between an upstream area and a downstream area, a discharge valve positioned on the discharge pipe, and measuring means for measuring, in real time, a characteristic parameter of the distribution of the fluid within one of the pipes. A module is also included for calculating a sliding threshold value of the characteristic parameter and means configured to control the partial gradual opening or closing of the discharge valve depending on the result of the comparison of said sliding threshold value with an instantaneous value of the characteristic parameter, in order to improve reliability of the industrial facility.

The invention can include a device and method for distributing a fluid in an industrial facility that comprises a fluid distribution pipe, a discharge pipe, a distribution valve that is positioned on the distribution pipe and controlling the distribution of fluid between an upstream area and a downstream area, a discharge valve positioned on the discharge pipe, and measuring means for measuring, in real time, a characteristic parameter of the distribution of the fluid within one of the pipes. A module is also included for calculating a sliding threshold value of the characteristic parameter and means configured to control the partial gradual opening or closing of the discharge valve depending on the result of the comparison of said sliding threshold value with an instantaneous value of the characteristic parameter, in order to improve reliability of the industrial facility.

A valve device includes a body, a joint, a check valve, a valve seat fixation member having an outer peripheral surface on which an external thread is provided, and a sealing member. The body has an attachment hole that attaches the joint and the valve seat fixation member from an outside of the body in a sequence of the joint and the valve seat fixation member, and that has an inner peripheral surface in which an internal thread screwed to the external thread of the valve seat fixation member is provided. The sealing member is provided between the joint and the valve seat fixation member. An outer peripheral edge of the sealing member is located radially inward of a screwed region of the internal thread and the external thread.

Device for filling tanks with pressurized gas, in particular hydrogen gas tanks of motor vehicles, the device comprising at least one gas source, a transfer circuit comprising at least one upstream end connected to the source and at least one downstream end intended to be connected in removable fashion to a tank to be filled, the transfer circuit additionally comprising, between its upstream and downstream ends, a set of buffer storage container(s) which is (are) connected in parallel to the transfer circuit via a set of respective connecting valve(s), the transfer circuit comprising a portion of pipe(s) forming a loop, a plurality of the buffer storage container(s) being connected in parallel to the said loop, characterized in that the transfer circuit comprises a plurality of separate downstream ends each intended to be connected in removable fashion to a respective tank to be filled, the said downstream ends being connected in parallel to the said loop and comprising a set of respective linking valves, so that control of the connecting valves and of the linking valves makes it possible to bring at least one first buffer storage container into fluidic communication, via the loop, with a first downstream end and, simultaneously, to bring at least one second buffer storage container into fluidic communication, via the loop, with a second downstream end and/or to bring two separate buffer storage containers into fluidic communication.

Station for filling one or more tank(s) with pressurized gas, in particular pressurized hydrogen, comprising at least two pressurized gas source stores, a transfer pipe having an upstream end connected parallel to the source stores and a downstream end intended to be connected to a tank to be filled, the station comprising a valve assembly for controlling the transfer of gas between the sources and the tank to be filled and an electronic controller connected to the valve assembly and configured to control the valve assembly, the electronic controller being configured to implement successive transfers of gas between the source stores and the tank to be filled via successive pressure balancing sequences, the electronic controller being configured to determine the temperature attained by the gas in the source stores or by the source stores during transfers of gas and, when said attained temperature is below a determined threshold, to prevent or to interrupt this transfer of gas or to reduce the flow of gas transferred during said transfer.

Station for filling one or more tank(s) with pressurized gas, in particular pressurized hydrogen, comprising at least two pressurized gas source stores, a transfer pipe having an upstream end connected parallel to the source stores and a downstream end intended to be connected to a tank to be filled, the station comprising a valve assembly for controlling the transfer of gas between the sources and the tank to be filled and an electronic controller connected to the valve assembly and configured to control the valve assembly, the electronic controller being configured to implement successive transfers of gas between the source stores and the tank to be filled via successive pressure balancing sequences, the electronic controller being configured to determine the temperature attained by the gas in the source stores or by the source stores during transfers of gas and, when said attained temperature is below a determined threshold, to prevent or to interrupt this transfer of gas or to reduce the flow of gas transferred during said transfer.

The present disclosure describes a system and a method for providing a mixed gas to an ion implantation tool. The system includes a water supply, an electrical source, a gas generator. The gas generator is configured to generate a first gas from the water supply and the electrical source. The system also includes a first flow controller configured to control a first flow rate of the first gas, a gas container to provide a second gas, a second flow controller configured to control a second flow rate of the second gas, and a gas pipe configured to mix the first and second gases into a mixed gas. The mixed gas can be delivered to, for example, an ion source head of the ion implantation tool.

The present disclosure describes a system and a method for providing a mixed gas to an ion implantation tool. The system includes a water supply, an electrical source, a gas generator. The gas generator is configured to generate a first gas from the water supply and the electrical source. The system also includes a first flow controller configured to control a first flow rate of the first gas, a gas container to provide a second gas, a second flow controller configured to control a second flow rate of the second gas, and a gas pipe configured to mix the first and second gases into a mixed gas. The mixed gas can be delivered to, for example, an ion source head of the ion implantation tool.

Disclosed is a valve device for a high-pressure gas storage tank. A valve device for a high-pressure gas storage tank according to the present disclosure includes a plurality of gas storage tanks having nozzle parts through which a gas is discharged, a block fixing part that accommodates the plurality of nozzle parts and has a gas flow path part, through which the gas discharged from the nozzle parts flows, in an internal space thereof, and an opening/closing part that is connected to the block fixing part and adjusts external discharge of the gas discharged from the nozzle parts and flowing to the gas flow path part.

Disclosed is a valve device for a high-pressure gas storage tank. A valve device for a high-pressure gas storage tank according to the present disclosure includes a plurality of gas storage tanks having nozzle parts through which a gas is discharged, a block fixing part that accommodates the plurality of nozzle parts and has a gas flow path part, through which the gas discharged from the nozzle parts flows, in an internal space thereof, and an opening/closing part that is connected to the block fixing part and adjusts external discharge of the gas discharged from the nozzle parts and flowing to the gas flow path part.