An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

A burner operating with flameless combustion, comprising a system for sucking the recycling flue gases directly from the combustion chamber by means of an ejector fed with the comburent, a heat exchange system positioned between the recycling flue gases and the comburent, a system for injecting the fuel directly into the recycling flue gases, the latter comprising or not comprising the comburent with formation of a mixture of fuel-recycling flue gases-comburent in the zone around the outlet of the comburent ejector and following introduction of the mixture into the combustion chamber.

A power generator for use to generate power for metrology hardware like gas meters and flow measuring devices. The power generator may use flame-less combustion that creates heat from fuel gas. The heat causes a temperature differential. The power generator may include a thermal electric generator that generates an electrical signal in response to the temperature differential.

A burner system includes at least one radiant heating tube (22) and a first regenerator (48) disposed at a first end (24) of the tube. A second regenerator (50) is disposed at a second end (26) of the radiant heating tube (22). The first regenerator (48) and the second regenerator (50) are connected to a valve system (54) having first and second operating states for alternately supplying the radiant heating tube (22) with combustion air via one regenerator (48, 50) and for discharging exhaust gases via the other regenerator (48, 50). At least one inner tube (34) is disposed inside and extending along the radiant heating tube (22) at least in sections. The inner tube (34) is connected to a fuel supply line (76) and has outlet openings (46) provided along the longitudinal extension of the inner tube (34).

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

Oxycombustion process wherein a combustor is fed with a fuel, a comburent and compounds under the form of coherent aggregates having Young modulus 10.sup.4 MPa, the combustor being isothermal and flameless.

Industrial furnace (1) which can be used for example for treating semi-finished and siderurgical products, metal and inorganic materials, comprising a) a hot chamber (3) in which a combustion takes place and the hot gases generated by the combustion come in direct contact with the materials to be treated (p) in the furnace itself; B) a combustion stabilizing system in turn comprising b1) an injection system in turn comprising at least a mixer (11) arranged to mix a fuel and a diluent before injecting them into the hot chamber (3). The diluent has the effect of reducing the amount of nitrogen oxides in the combustion products. It considerably reduces the consumption of required diluent and the Nox emissions in the fumes.

A recuperative burner (10) fires a furnace chamber (11) in a substoichiometric manner. The recuperative burner is arranged in a radiant tube (26) which is open towards and protrudes into the furnace chamber. Together with the recuperator (18) or a protrusion (21), the radiant tube (26) forms an exhaust gas channel (19) into which burn-out air is introduced by an air conducting device (23). The post-combustion which occurs in the exhaust gas channel (19) heats the radiant tube (26). The furnace chamber (11) is heated partly directly by fuel and air and partly indirectly by the radiant tube (26). An excessive level of CO emission is prevented by the post-combustion in the exhaust gas channel (19). By using the resulting heat from the radiant tube (26), excessively high exhaust gas temperatures are prevented and the thermal use of the fuel is optimized.

A method for oxidizing a waste stream having hydrogen therein includes flowing the waste stream with hydrogen into an oxidant stream for mixing the streams in a proportion for providing a mixture below lower flammability limits (LFL), including the LFL of hydrogen; and introducing the mixed streams into a ceramic matrix bed of a flameless thermal oxidizer maintained at a temperature above auto-ignition temperature of the mixture. A related apparatus is also provided.