Provided is a new heat source device that utilizes the catalytic reaction heat as a heat source for industries. The heat source device 100 utilizing the catalytic reaction heat of silver zeolite 1 includes an accommodation container 10 for accommodating the silver zeolite 1 while ensuring air permeability, wherein the accommodation container 10 is configured to be ventilated with a mixed gas G containing hydrogen, steam, and air. The mixed gas has a hydrogen concentration of 1 to 20% by volume, a steam concentration of 1 to 95% by volume, an air concentration of 1 to 95% by volume, and a temperature of 100 C. or higher.

A burner for producing a stabilized flame with an inertisation front upstream from the stabilized flame includes a swirl generator and an inlet device with a passage therethrough. The swirl generator swirls an inert process medium about a swirl axis in a flow direction and one or more openings in the inlet device provide one or more partial mass flows containing combustion educts. The inert process medium inhibits combustion of the combustion educts through the inertisation front to displace the stabilized flame from the one or more openings.

Provided is a combustion system, and in particular a thermal decomposition system and plasma melting system, with which superheated steam is generated in an energy-efficient manner and the combustion structure has an improved combustion efficiency. A combustion system for making hot water coming from a boiler (11) into superheated steam with a superheated steam generation device (20) and supplying the superheated steam to a combustion structure (50) is provided with the following: the combustion structure (50) which combusts a fuel and a carbonaceous solid at 350 to 1,000 C.; a heat storage device (70) for storing waste heat from the combustion structure; and a heat exchange water tank (12) that is connected so as to allow heat exchange, through a heat transport medium, with heat from the heat storage device (70), and that heats water that is supplied to the boiler (11). The combustion system is provided with an oxyhydrogen gas supply structure (40) for heating the water supplied to the boiler (11) and also supplying an oxygen/hydrogen mixed gas, and a mixer (30) for mixing the superheated steam generated with the superheated steam generation device (20) and the oxygen/hydrogen mixed gas from the oxyhydrogen gas supply structure (40). The superheated steam is mixed with the oxyhydrogen gas and supplied to the combustion structure (50).

A control device of a hydrogen gas burner device sets a target flow rate of a hydrogen gas such that a flow rate of the hydrogen gas decreases as a temperature of the hydrogen gas becomes higher, based on the temperature of the hydrogen gas and a needed quantity of heat of the hydrogen gas during the combustion, sets a target flow speed such that the flow speed of the hydrogen gas released from a combustion nozzle via a flow speed regulator becomes a flow speed based on the target flow rate and the flow speed of the hydrogen gas increases as a value of the target flow rate decreases, controls the flow rate regulator such that the flow rate of the hydrogen gas reaches the target flow rate, and controls the flow speed regulator such that the flow speed of the hydrogen gas reaches the target flow speed.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

A burner sub-system, a furnace comprising the same, a fuel combustion process and steam cracking process carried out in the furnace. The burner sub-system comprises a barrier wall segment between the burner tip and the flue-gas recirculation (FGR) duct, effectively blocking direct gas flow between the burner tip and the FGR duct opening, but without encircling the whole burner tip. The presence of the partial barrier wall has the advantage of preventing the temperature inside the FGR duct from becoming too high, while achieving low NOx emissions from the combustion process without overheating the burner tip because of reduced amount of heat reflection to the burner tip compared to an annular barrier wall. The invention is particularly useful in furnaces where hydrogen-rich fuel gas is combusted.

A swirl preburner having a first swirl core defining a first swirl chamber having a first swirl chamber first end and a first swirl chamber second end. The swirl preburner further includes a second swirl core defining a second swirl chamber having a second swirl chamber first end and a second swirl chamber second end. The swirl preburner also includes a mixing element defining a mixing chamber, the mixing chamber surrounding a portion of the first and second chamber at least including the first chamber second end and the second chamber second end.

A burner including a first pulverized coal entrained fluid flow conduit; an inner hydrogen conduit; and a hydrogen oxidant conduit positioned between the first pulverized coal entrained fluid flow conduit and the inner hydrogen conduit; an outlet of the inner hydrogen conduit positioned a first distance from an outlet of the hydrogen oxidant conduit such that hydrogen output from the outlet of the inner hydrogen conduit passes through a portion of the hydrogen oxidant conduit to the outlet of the hydrogen oxidant conduit; and the outlet of the hydrogen oxidant conduit being a second distance from an outlet of the first pulverized coal entrained fluid flow conduit such that the hydrogen and the hydrogen oxidant output from the outlet of the hydrogen oxidant conduit passes through a portion of the first pulverized coal entrained fluid flow conduit for being output from the burner.

The present disclosure provides a nozzle structure for a hydrogen gas burner apparatus, capable of reducing an amount of generated NOx. A nozzle structure for a hydrogen gas burner apparatus, includes an outer pipe, an inner pipe disposed concentrically with the outer pipe, and a stabilizer configured to throttle a space between the outer pipe and the inner pipe. The inner pipe includes an inner pipe end part with an axial opening hole and a circumferential opening hole formed therein, the axial opening hole penetrating in an axial direction of the inner pipe, the circumferential opening hole penetrating in a radial direction of the inner pipe. A hydrogen gas flows through the inner pipe. The circumferential opening hole lets the hydrogen gas flow out from the inner pipe in the radial direction of the inner pipe.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.