A semiconductor manufacturing apparatus in this embodiment includes a reactor, a pump, an exhaust pipe and a mesh member. The reactor houses a semiconductor substrate to treat the semiconductor substrate. The pump exhausts a gas inside the reactor. The exhaust pipe connects between the reactor and the pump. The mesh member is located at a flow inlet of the pump for the gas or in the exhaust pipe and has a main plane having a plurality of meshes arranged thereon. The mesh member has a protrusion and/or protruding shape projecting upstream of the gas.

A method for improving effectiveness of a steam generator system includes providing air to an air preheater at a mass flow such that the air preheater has a cold end outlet temperature defined by the improved air preheater operating with increased heat recovery (HR) of at least 1% calculated according to the equation: HR=100%((TgiTgoAdvX)/(TgiTgoSTD)1). The method requires either reducing the amount of heat that flows into the air preheater from the flue gas and/or increasing the amount of heat extracted from the flue gas. The method includes mitigating SO.sub.3 in the flue gas which is discharged directly from the air preheater to a particulate removal system and then directly into a flue gas desulfurization system. The method includes extracting heat from the Flue gas to create equipment preheat and/or flue gas stack reheat air with the latter being fed to heat the flue gas prior to entering a discharge stack to raise the temperature of the flue gas to mitigate visible plume exiting and to mitigate corrosion in, the discharge stack.

The invention comprises: a) first comburent supplying means (18) connected to the lower part of the oxidation chamber, for introducing pressurized oxygenated gas in the oxidation chamber at a speed that comprises a tangential component; b) a particle recirculation system, which comprises: a particle separator (24) on the upper part of the oxidation chamber for trapping hot particles of ash and unburned material, and a transportation system (25) for transferring trapped particles from the particle separator (24) to the base of the oxidation chamber; and c) a gas recirculation system comprising: a sucker (26) for suctioning combustion gases from the upper part of the oxidation chamber, and pipes (27) for transferring the suctioned gases to the base of the oxidation chamber. It provides an optimized thermal transfer that reduces the emission of pollutants in waste recovery.

A system comprising a collocated thermal plant, water source, CO.sub.2 source and biomass growth module is disclosed. A method of improving the environment by utilizing the system is disclosed.

A system comprising a collocated thermal plant, water source, CO.sub.2 source and biomass growth module is disclosed. A method of improving the environment by utilizing the system is disclosed.

An optimized process and system for the production of a heat exchange fluid heated by means of combustion of a fuel are described, said process comprising the steps of: burning a fuel in a combustion chamber, thus generating a flow of exhaust gas, said flow comprising solid particulate matter and/or combusted or uncombusted particles; introducing said flow of exhaust gas into a unit suitable for the forced abatement of the solid particulate matter and/or combusted and uncombusted particles, thus obtaining a purified exhaust gas flow and a solid precipitate which comprises solid particulate matter; transferring the flow of purified gas to a generator of a heated heat exchange fluid, inside which a heat exchange fluid flows; carrying out an indirect heat exchange, thus obtaining a flow of cooled purified exhaust gas and a heated heat exchange fluid.

To provide a method with which it is possible to ascertain a gas concentration in a furnace rapidly, and to charge an amount of fuel and/or oxygen corresponding to the state within the furnace, and with which it is possible to reduce the device maintenance load. In order to solve the abovementioned problem, this method for analyzing components contained in flue exhaust gas of a furnace includes: a sampling step of collecting a portion of the flue exhaust gas from a flue; a dust removal step of using a centrifugal dust collecting device to separate out dust in the flue exhaust gas collected in the sampling step, to yield an analysis gas; a measuring step of measuring components in the analysis gas to obtain the concentration of carbon monoxide in the analysis gas; and an analysis gas discharging step of causing the analysis gas to be sucked by an ejector.

The invention discloses a method for preparing a chlorine adsorption material for use in waste incineration and application of the chlorine adsorption material. The chlorine adsorption material adsorptive for chlorine-based substances during the waste incineration is prepared by mixing raw materials which include natural iron ores and quartz stones, and modifying the iron ores and the quartz stones with CaO through an ultrasonic impregnation method. The prepared chlorine adsorption material has a large pore size, a high porosity and a stable structure, and shows higher adsorption efficiency and adsorption capacity for the chlorine-based substances during the waste incineration. The use of the low-cost natural iron ores and quartz stones can reduce the cost in processing the chlorine-based substances, make great use of resources and facilitate environment protection.

The invention discloses a method for preparing a chlorine adsorption material for use in waste incineration and application of the chlorine adsorption material. The chlorine adsorption material adsorptive for chlorine-based substances during the waste incineration is prepared by mixing raw materials which include natural iron ores and quartz stones, and modifying the iron ores and the quartz stones with CaO through an ultrasonic impregnation method. The prepared chlorine adsorption material has a large pore size, a high porosity and a stable structure, and shows higher adsorption efficiency and adsorption capacity for the chlorine-based substances during the waste incineration. The use of the low-cost natural iron ores and quartz stones can reduce the cost in processing the chlorine-based substances, make great use of resources and facilitate environment protection.

This invention provides a system or method that includes combustion of mixed content solid waste to produce flue gases and separation of carbon dioxide gas in the produced combustion flue gas from other gaseous constituents of the flue gas in an amount produced from the burning of plastic material contained in the mixed content solid waste. The separated carbon dioxide is sequestered in geologic formations, thereby providing environmentally sound disposal and elimination of plastic waste, in one consolidated process, free of the need for separation of plastic waste from other solid or the need to identify and separate the various forms and compositions of plastic waste material. The illustrative disposal of plastic waste hereby is generally free of emission into the atmosphere of carbon dioxide gas. The invention includes a fee-generation process applied to customers, which can quantified and generated in association with the application of the system or method.