Methods and systems for inhibiting buildup of crystalline materials in a flue gas desulfurization (FGD) unit. Crystalline materials can accumulate in FGD units as a byproduct of chemical desulfurization processes and can adversely impact FGD unit function. The systems described in the present application include an FGD unit with one or more selected bacterial strains disposed therein. It is believed that the bacteria may form a biofilm on the surfaces in the FGD and/or form a biosurfactant to inhibit or prevent buildup of crystalline materials in the FGD unit. Methods include inoculating an FGD unit with one or more selected bacteria that inhibit or prevent buildup of crystalline materials in the FGD unit. Methods may include periodic reinoculation of the FGD unit.

The present disclosure provides a system and a method for cleaning of gas.

An operating method of an exhaust gas treatment facility, which is a method for operating an exhaust gas treatment facility that treats exhaust gas from an electronic component manufacturing process, the operating method comprising: the exhaust gas treatment apparatus being provided with a wet exhaust gas treatment apparatus including a water sprinkling mechanism; and setting a pH of water in the wet exhaust gas treatment apparatus within 5 to 8. The exhaust gas may contain a tungsten compound.

A process and related plant are used for treating a raw vent gas containing bitumen vapours released by equipment of a polymer-bitumen membranes production line, in which operations involve a filler powder, such mixing the filler powder with the bitumen, during which the filler powder is incorporated into the raw vent gas that is initially powder-free. The process includes first conveying the raw vent gas into a gas-washing device along with a solution of a surfactant and then contacting the raw vent gas with the solution and removing the powder from the powder-containing gas. A purified vent gas that is substantially free from the filler powder is released. The purified vent gas is conveyed into a boiler, and the bitumen vapours are burned. The process prevents the powder from quickly reaching the boiler making the burner and the heat-exchange surfaces ineffective.

A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.