A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas circulation system as opposed to introducing external air into the chamber through the FFU inlet. This enables precise control over the relative humidity and oxygen concentration of the gas used in the chamber, which reduces the oxidation of semiconductor wafers that are transferred through the chamber. The closed gas circulation system may also include an air-flow rectifier, a return vent, and one or more vacuum pumps to form a downflow of collimated gas in the chamber and to automatically control the feed-forward pressure and flow of gas through the chamber and the sealed plenum.

What is disclosed herein are embodiments of an enclosed manufacturing system configured to provide a controlled process environment for various articles of manufacture requiring a controlled process environment, and additionally to contain a process environment within the enclosure during periods of external access to the interior of the enclosed manufacturing system. Various embodiments of manufacturing systems of the present teaching can contain the environment within a manufacturing enclosure so as to minimize the interaction of an environment external to a manufacturing enclosure with the internal enclosure environment.

A device includes an air curtain generator including air curtain diffusor able to diffuse at least one air curtain along a plane, in at least first and second different diffusion directions. The air curtain generating device includes a control unit able to control the diffusion of the at least one air curtain in one and/or the other of the first and second diffusion directions.

An open display refrigerator comprises a refrigerated interior space, air in the refrigerated interior space being separated from air exterior to the open display refrigerator by an air curtain established by a fan which blows air through an air outlet towards a corresponding air inlet which recovers air from the air curtain for recirculation to the air outlet. A distal region of the air outlet is occluded to leave only a region of the air outlet proximal to the interior space open, and an air curtain guide is aligned in a direction of air flow of the air curtain with an edge of the blanking plate proximal to the interior space.

A humidity control device in a process space allows each process space to satisfy a unique humidity condition and includes an injection module arranged in a second process space maintained at second humidity lower than first humidity within a first process space in which processing for a wafer is performed and configured to inject a gas for forming an air curtain onto a first door through which the wafer enters and exits and which is connected to the second process space, a signal generation module configured to generate an injection signal for the injection module to inject the gas, and an injection control module configured to, when the injection signal is generated, control the injection module to form the air curtain lowering an amount of humidity flowing into the second process space through a space opened by the first door by injecting the gas.

The invention relates to a device (1) for generating an air wall across a passage opening (100), which passage opening (100) has lateral edges and a top edge, comprising: a first and second blowing device (10, 20), arranged at the lateral edges in such a way that planar air streams are blown over the height and respective parts of the width of the passage opening (100); wherein the device (1) is provided with regulating means (13; 23) for regulating the blowing speeds of the blowing devices; and wherein the first blowing device (10) and the second blowing device (20) are provided with secondary blower slits (12; 22) which are parallel to the respective primary blower slits (11; 21), which secondary blower slits (12; 22) are connected to secondary means for drying and/or heating air to be blown.

An air curtain apparatus comprises a generally horizontal duct having at least one inlet and defining at least one outlet in a wall thereof. A plurality of axial fan units are mounted side-by-side across the at least one outlet defined in the wall of the duct, the axial fan units having rotational axes generally parallel to one another and side-by-side to blow air from an interior of the duct to an exterior of the duct. One or more grills are positioned adjacent to the axial fan units in a downstream flow path of the axial fan units, the grill(s) directing an air flow of the axial fan units into a downwardly directed air curtain. A method for creating an air curtain is also provided.

An improvement in the insulation of the rapid rolling type doors has an insulation piece positioned longitudinally on the stems to enable the door to operate well by providing the removal of accumulated air in the curtain system from the stems during up and down movement of the door and thereby preventing icing in the stems. Ventilation holes provide the discharge of the compressed air. A hole shutter curtain is provided wherein one side is fixed on the curtain and the other side is free and which overlies the ventilation holes by acting as a skirt when downward movement of the door is completed and prevents heat transfer.

A magnetic switch controlled circuit for an electrical appliance includes a voltage input terminal, a voltage output terminal, a magnetic switch, a relay circuitry and a turn-off delay circuitry. When the magnetic switch detects a first change in the magnetic field from an idle status, the relay circuitry is configured to output an output voltage to the voltage output terminal so as to supply power to the electrical appliance. When the magnetic switch detects a second change in the magnetic field from the first change in the magnetic field, the turn-off delay circuitry is configured to control the relay circuitry to continue outputting the output voltage to the voltage output terminal for a predetermined period of time, the relay circuitry being switched off by the turn-off delay circuitry after the predetermined period of time elapses.

An active airflow inhibiting apparatus for an entranceway comprises a structure, an airflow sensor, and a controller. The structure comprises one or more air mover devices configured to be positioned adjacent an entranceway of a building and defining a passage therethrough for accessing the entranceway. The airflow sensor is configured to provide an output indicative of speed and direction of airflow through the entranceway or at the air mover devices. The controller is connected to the air mover devices and the airflow sensor. The controller is configured to receive the output of the airflow sensor and to control an output of the air mover devices based on the received output so as to generate a differential pressure across the air mover devices which inhibits airflow through the entranceway.