A batch annealing furnace includes a coil support base on which an end face of a coil is mounted and that supports the coil with an axis of the coil being upright, an inner cover that covers an entire body of the coil mounted on the coil support base, and a cooling pipe that extends downward from the upper part of the inner cover to a cavity of the inner peripheral part of the coil mounted on the coil support base and cools the coil from the inner surface side by passing a coolant through the inside of the cooling pipe.

A system and method for melting a raw material. The raw material is fed into an electrically conductive vessel. A plasma arc torch melts at least some of the raw material within the vessel to thereby create a molten material. An inductor, physically disposed adjacent the vessel, and electrically disposed in series with the vessel in operation, effects electromagnetic stirring of the molten material by interacting with the current of the plasma arc torch.

A system and method for melting a raw material. The raw material is fed into an electrically conductive vessel. A plasma arc torch melts at least some of the raw material within the vessel to thereby create a molten material. An inductor, physically disposed adjacent the vessel, and electrically disposed in series with the vessel in operation, effects electromagnetic stirring of the molten material by interacting with the current of the plasma arc torch.

A vacuum furnace comprises a vessel having a door, a plurality of heating elements within the vessel, a vacuum system for evacuating an interior of the vessel, and a pivoting member for pivoting the vessel between a first position where the door when closed is facing substantially upward, and a second position where the door when closed is facing away from substantially upward. In a method of enabling heating a vacuum furnace, the vessel is able to pivot between two positions. In a method of operating a vacuum furnace, the vessel pivots between two positions.

Provided is a hot isostatic pressing (HIP) device (1) that can efficiently cool a hot zone during HIP processing while restraining temperatures in the lower part of a high-pressure container. This HIP device (1) is provided with the following: gas-impermeable casings (3, 4) that surround an object to be processed (W); a heating unit (7) that is disposed inside these casings and forms a hot zone around the object to be processed (W); a high-pressure container (2); and a cooling unit that guides a pressure-medium gas cooled on the outside of the casings into the hot zone to cool the hot zone. The cooling unit comprises the following: a gas introduction unit that introduces the pressure-medium gas that has been cooled on the outside of the casings (3, 4) into the hot zone; and a cooling promotion unit (37) that cools the pressure medium gas by causing the pressure-medium gas that has been cooled on the outside of the casings to exchange heat with a base (11) of the high-pressure container (2).

Provided is a hot isostatic pressing (HIP) device (1) that can efficiently cool a hot zone during HIP processing while restraining temperatures in the lower part of a high-pressure container. This HIP device (1) is provided with the following: gas-impermeable casings (3, 4) that surround an object to be processed (W); a heating unit (7) that is disposed inside these casings and forms a hot zone around the object to be processed (W); a high-pressure container (2); and a cooling unit that guides a pressure-medium gas cooled on the outside of the casings into the hot zone to cool the hot zone. The cooling unit comprises the following: a gas introduction unit that introduces the pressure-medium gas that has been cooled on the outside of the casings (3, 4) into the hot zone; and a cooling promotion unit (37) that cools the pressure medium gas by causing the pressure-medium gas that has been cooled on the outside of the casings to exchange heat with a base (11) of the high-pressure container (2).

A carburizing device includes a furnace body that performs heat treatment on a treatment object to perform carburization treatment on the treatment object, in which: a heater configured to perform heat treatment on the treatment object is provided upright in a vertical direction within the furnace body; a gas supply section configured to supply a gas for burnout toward the heater is provided at a lower end part of the heater; the heater is inserted through a protective tube provided upright in the vertical direction; and the gas supply section is configured to supply the gas for burnout to between the protective tube and the heater.

A vacuum refining furnace, including a furnace body, a graphite heater, an electrode, and a sealed furnace housing. The furnace body includes an evaporation laminate, a graphite condensing casing, and a graphite insulating casing. The evaporation laminate includes a plurality of evaporators. The evaporation laminate is nested within the graphite insulating casing, and the graphite insulating casing includes a plurality of through holes. At least two graphite condensing casings having different diameters are provided. The graphite insulating casing is nested within the graphite condensing casing having a smallest diameter, and the graphite condensing casing having a relatively small diameter is nested within the graphite condensing casing having a relatively large diameter. All the graphite condensing casings except for the graphite condensing casing having the largest diameter include a plurality of through holes.

A vacuum refining furnace, including a furnace body, a graphite heater, an electrode, and a sealed furnace housing. The furnace body includes an evaporation laminate, a graphite condensing casing, and a graphite insulating casing. The evaporation laminate includes a plurality of evaporators. The evaporation laminate is nested within the graphite insulating casing, and the graphite insulating casing includes a plurality of through holes. At least two graphite condensing casings having different diameters are provided. The graphite insulating casing is nested within the graphite condensing casing having a smallest diameter, and the graphite condensing casing having a relatively small diameter is nested within the graphite condensing casing having a relatively large diameter. All the graphite condensing casings except for the graphite condensing casing having the largest diameter include a plurality of through holes.

An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.