The present disclosure relates to a single crystal furnace, which includes a main furnace body, an accessory furnace body, a furnace cover, and a driving component. The accessory furnace body is provided with a first connecting member. The furnace cover is provided with a second connecting member. The driving component can drive the first connecting member or the second connecting member to move, so as to match the first connecting member with the second connecting member, and connect the accessory furnace body with the furnace cover.

A flame holder system includes a support structure configured to support a plurality of burner tiles within a furnace volume. The support structure includes a frame supporting a support lattice. A number of burner tiles are arranged in an array on the support lattice. The support structure is configured to be assemblable without tools inside the furnace volume, using components that are sized to fit through an access port in a wall of the furnace.

A flame holder system includes a support structure configured to support a plurality of burner tiles within a furnace volume. The support structure includes a frame supporting a support lattice. A number of burner tiles are arranged in an array on the support lattice. The support structure is configured to be assemblable without tools inside the furnace volume, using components that are sized to fit through an access port in a wall of the furnace.

The present disclosure relates to a single crystal furnace, which includes a main furnace body, an accessory furnace body, a furnace cover, and a driving component. The accessory furnace body is provided with a first connecting member. The furnace cover is provided with a second connecting member. The driving component can drive the first connecting member or the second connecting member to move, so as to match the first connecting member with the second connecting member, and connect the accessory furnace body with the furnace cover.

A melting and holding furnace includes a main body and a material input mechanism supplying a molten metal to the body which includes a melting chamber; a molten metal receiving chamber; a pumping-out chamber; and a molten metal heating mechanism. The input mechanism includes a molten-metal surface level sensor to detect that the surface height position of the metal in the pumping-out chamber has reached a lower limit that is set to be above the lower surface height position of a lid of the melting chamber, and is set to supply the receiving chamber with the metal and/or the metal block when the sensor detects that the surface height position of the metal in the pumping-out chamber has reached the lower limit so that the surface height position of the metal in the pumping-out chamber is always kept above the lower surface height position of the lid.

A melting and holding furnace includes a main body and a material input mechanism supplying a molten metal to the body which includes a melting chamber; a molten metal receiving chamber; a pumping-out chamber; and a molten metal heating mechanism. The input mechanism includes a molten-metal surface level sensor to detect that the surface height position of the metal in the pumping-out chamber has reached a lower limit that is set to be above the lower surface height position of a lid of the melting chamber, and is set to supply the receiving chamber with the metal and/or the metal block when the sensor detects that the surface height position of the metal in the pumping-out chamber has reached the lower limit so that the surface height position of the metal in the pumping-out chamber is always kept above the lower surface height position of the lid.

The disclosure relates to a door opener to open a door of a cassette with substrates, the opener having a first wall to engage with the cassette and having a first opening to transfer the door and the substrates and a second wall opposite the first wall and having a second opening to transfer substrates. The door opener may have a closure device to hold the door of the cassette and having first and second sides and moveable in a chamber formed between the first and second wall. The opener may have a first actuator to move the closure device in a first direction from a first closing position where the first side closes against the first wall to a second closing position where the second side closes against the second wall, and from the second closing position to a transport position in between the first and second closing positions.

A semiconductor burn-in oven includes a housing including a burn-in chamber and an opening to the burn-in chamber surrounded by a front face, a heating device, testing circuitry, a door and a sealing mechanism. The door has an open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening. The sealing mechanism is configured to form a seal around the opening between an interior side of the door and the front face when the door is in the closed position. The sealing mechanism includes at least one sealing member having a recessed position, in which a gap extends between the front face and the interior side of the door, and a sealing position, in which the at least one sealing member closes the gap and forms the seal.

A semiconductor burn-in oven includes a housing including a burn-in chamber and an opening to the burn-in chamber surrounded by a front face, a heating device, testing circuitry, a door and a sealing mechanism. The door has an open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening. The sealing mechanism is configured to form a seal around the opening between an interior side of the door and the front face when the door is in the closed position. The sealing mechanism includes at least one sealing member having a recessed position, in which a gap extends between the front face and the interior side of the door, and a sealing position, in which the at least one sealing member closes the gap and forms the seal.

A metal furnace header gate system haying a recirculation port in the furnace, a hot gas generator, a gas blower, and a furnace door. The door has an embedded gas manifold and outlet ports that each connect the manifold to a directional nozzle. The blower draws exhaust from the recirculation port into the hot gas generator, which generates additional exhaust and mixes the exhaust gases together. The blower forces this exhaust mixture into the manifold, through the nozzles, and into the furnace. A computer controls the blower and the hot gas generator to regulate the system.