Apparatuses for annealing semiconductor substrates, such as a batch processing chamber, are provided herein. The batch processing chamber includes a chamber body enclosing an internal volume, a cassette moveably disposed within the internal volume and a plug coupled to a bottom wall of the cassette. The chamber body has a hole through a bottom wall of the chamber body and is interfaced with one or more heaters operable to maintain the chamber body at a temperature of greater than 290 C. The cassette is configured to be raised to load a plurality of substrates thereon and lowered to seal the internal volume. The plug is configured to move up and down within the internal volume. The plug includes a downward-facing seal configured to engage with a top surface of the bottom wall of the chamber body and close the hole through the bottom wall of the chamber body.

The present invention is directed to an oil-line assembly for an oil-fired boiler or furnace having a hinged door, the oil-line assembly includes a bracket, an elongated pipe, a first socket, a second socket, and a flexible hose. The bracket having a first plate member, a second plate member, the first plate member and a second plate member having a common edge. The elongated pipe member coupled to an edge opposite the common edge of the second plate member, the elongated pipe member extends along its longitudinal axis which runs parallel to the common edge, the elongated pipe member having a proximal end and a distal end; The first socket secured to the proximal end of the elongated pipe member. The free end of the first socket is configured to receive an oil-line that extends from an oil source. The second socket coupled to the distal end of the elongated pipe member. The flexible hose having a proximal end and a distal end, wherein the proximal end of the flexible hose is coupled to a free end of the second socket, the distal end of the flexible hose configured to couple to an input of the oil-fired heating unit.

A furnace system has a furnace-tube-cap (FTC) and a slider. The FTC has a first-cap-portion coupled to a furnace tube of a furnace, a second-cap-portion with a bearing-assembly-arrangement (BAA), and an inner-tube-cap-channel (ITCC) passing from the first-to-second cap portion with an ITCC sealing arrangement extending outside the ITCC. The slider slides in the BAA to/from inject-and-rinse positions, and has a first-ramp (FR), a first-raised-surface (FRS), an intermediate-lower-surface (ILS), a second-ramp (SR), and a second-raised-surface (SRS). When the slider moves to the inject-or-rinse positions, the BAA forces a slider-part to push against an inner-channel-sealing-arrangement (ICSA) as the BAA goes from the FR-to-FRS, or the SR-to-SRS. When the slider is in the inject-or-rinse position, a first-slider-part seals the ITCC sealing arrangement. When the slider transitions between the inject-and-rinse positions and the BAA rides along the ILS, the BAA allows the slider-part to float above the ICSA arrangement.

A furnace system has a furnace-tube-cap (FTC) and a slider. The FTC has a first-cap-portion coupled to a furnace tube of a furnace, a second-cap-portion with a bearing-assembly-arrangement (BAA), and an inner-tube-cap-channel (ITCC) passing from the first-to-second cap portion with an ITCC sealing arrangement extending outside the ITCC. The slider slides in the BAA to/from inject-and-rinse positions, and has a first-ramp (FR), a first-raised-surface (FRS), an intermediate-lower-surface (ILS), a second-ramp (SR), and a second-raised-surface (SRS). When the slider moves to the inject-or-rinse positions, the BAA forces a slider-part to push against an inner-channel-sealing-arrangement (ICSA) as the BAA goes from the FR-to-FRS, or the SR-to-SRS. When the slider is in the inject-or-rinse position, a first-slider-part seals the ITCC sealing arrangement. When the slider transitions between the inject-and-rinse positions and the BAA rides along the ILS, the BAA allows the slider-part to float above the ICSA arrangement.

An apparatus is disclosed for a split spray-cooled roof for a tilting metallurgical furnace. The split spray-cooled roof has a center, a first hollow metal roof section and a second hollow metal roof section. The first and second hollow roof sections are attached together along a prescription split line. The prescription split line having a first split line and a second split line, wherein the first split line is not aligned with the second split line and wherein the first and second split line are not aligned with the center.

A heat-treating furnace has: a rotary shaft; a rotary bottom surface pivotally supported by the rotary shaft and rotates; a plurality of workpiece storage chambers arranged on the rotary bottom surface in a multi-stage torus configuration around an axis of the rotary shaft as a center; a hollow bell-shaped hot-blast guide disposed in a center of the torus configuration on the rotary bottom surface around the axis of the rotary shaft as a center so as to decrease a volumetric capacity in the furnace and to adjust a quantity of a hot blast fed in from above itself into the workpiece storage chamber on each stage; a furnace body bottom surface spaced away from the rotary bottom surface; and a furnace body lateral surface disposed on the furnace body bottom surface.

A heat-treating furnace has: a rotary shaft; a rotary bottom surface pivotally supported by the rotary shaft and rotates; a plurality of workpiece storage chambers arranged on the rotary bottom surface in a multi-stage torus configuration around an axis of the rotary shaft as a center; a hollow bell-shaped hot-blast guide disposed in a center of the torus configuration on the rotary bottom surface around the axis of the rotary shaft as a center so as to decrease a volumetric capacity in the furnace and to adjust a quantity of a hot blast fed in from above itself into the workpiece storage chamber on each stage; a furnace body bottom surface spaced away from the rotary bottom surface; and a furnace body lateral surface disposed on the furnace body bottom surface.

A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.

An apparatus is disclosed for a split spray-cooled roof for a tilting metallurgical furnace. The split spray-cooled roof has a center, a first hollow metal roof section and a second hollow metal roof section. The first and second hollow roof sections are attached together along a prescription split line. The prescription split line having a first split line and a second split line, wherein the first split line is not aligned with the second split line and wherein the first and second split line are not aligned with the center.

A top-loading vertical kiln, a front-loading vertical kiln, and a vertical kiln retrofit kit are described. Each include a baffle having a central aperture and a plurality of rods spaced apart from each other and configured to rest in corresponding detents in a top surface of the baffle, wherein the detents include pairs of detents with a first detent of a pair being formed on a first side of the aperture and a second detent of the pair being formed on a second side of the aperture opposite the first side.