In a substrate pre-baking device, a baking box housing includes a baking chamber in an interior space of the baking box housing, wherein an opening corresponding to a side door is arranged on a lateral side of the baking box housing. The side door is arranged at the opening of the baking box housing. A heating structure is arranged in the baking chamber. A hot air curtain device is arranged at the side door of the baking box housing. When the side door is opened, the hot air curtain device is configured to form a hot air curtain for isolating the baking chamber from outside environment at the opening of the side door.

A disclosed method includes serially moving a plurality of dies through a series of interconnected chambers that are selectively sealable from each other. Through the series of interconnected chambers, each of the dies is introduced into a controlled gas environment, each of the dies is introduced into a controlled temperature environment, a process-environment-sensitive material is pressurized in each of the dies, and each of the dies is cooled. A disclosed apparatus includes a series of interconnected chambers that are selectively sealable from each other. A first one of the chambers is configured to establish a controlled gas environment therein, a second one of the chambers is configured to establish a controlled temperature environment therein, a third one of the chambers is configured to pressurize a process-environment-sensitive material and a fourth one of the chambers is configured to cool the process-environment-sensitive material.

In a substrate pre-baking device, a baking box housing includes a baking chamber in an interior space of the baking box housing, wherein an opening corresponding to a side door is arranged on a lateral side of the baking box housing. The side door is arranged at the opening of the baking box housing. A heating structure is arranged in the baking chamber. A hot air curtain device is arranged at the side door of the baking box housing. When the side door is opened, the hot air curtain device is configured to form a hot air curtain for isolating the baking chamber from outside environment at the opening of the side door.

Provided herein are an oven and a method of opening or closing the door. In more detail, disclosed herein are an oven having a door opening or closing unit capable of opening or closing a door driven by remote control and a method of opening or closing the door of the oven. Some of embodiments provide an oven capable of opening or closing a door by using a door opening or closing unit according to remote control and a method of opening or closing the door of the oven.

The invention relates to a process chamber (10) for carrying out thermal processes in the manufacture of an electronic assembly (30), comprising the following: at least one opening (20) for introducing and/or removing the electronic assembly (30); a device (40) for supplying a gas; a controllable protection device (50) which is arranged on the opening (20) in order to reduce a leakage of gas from the process chamber, wherein the controllable protection device (50) comprises a first movable element (50A) as an integral piece which covers the width between the total width of the opening and the width of the electronic assembly; a device for detecting data relating to the dimensions of the electronic assembly (30); and a controller (60) which can control the protection device (50) on the basis of the data relating to the dimensions of the electronic assembly (30) such that when the electronic assembly (30) passes through the opening (20), a defined spacing is constantly maintained between the electronic assembly and the first movable element (50A).

A multi-pane door assembly for an oven appliance includes a door having first and second door panes. The first door pane is secured to the second door pane at a hinge point and is rotatable with respect to the second door pane between open and closed positions. As such, the door panes define a space therebetween when the first door pane is in the closed position. The door assembly also includes an engagement device for securing the door panes together, a locking mechanism for locking the engagement device, and a controller communicatively coupled to the actuating device. The locking mechanism includes, at least, a locking member and an actuating device. Thus, the controller is configured to receive one or more safety conditions relating to the oven appliance and select whether to engage or disengage the actuating device based on whether the safety condition(s) correspond to the predetermined safety condition(s).

A vacuum oven comprising an inner cavity, a heating element, a first door, and a second door. The inner cavity configured for holding a hazardous material and is surrounded by a housing. The heating element is configured to heat the inner cavity and is joined to an outer surface of the housing. The first door covers a first side of the inner cavity. The second door covers a second side of the inner cavity opposite the first side.

The inventive concept relates to a substrate treating apparatus including a process chamber having a first and a second body, a support unit supporting a substrate, a heating unit heats the substrate, a driver moves any one of the first body and the second body, an interval state detection unit that detects an interval state between a side wall of the first body and a side wall of the second body when the first and the second body are placed in a process location, and a controller that controls the driver and the interval state detection unit, wherein the interval state detection unit includes a pressure provision line that provides a positive pressure or a negative pressure between the side wall of the first body and the side wall of the second body, and a pressure measurement member that measures a change in a pressure of the pressure provision line.